• 한국레이저가공학회지
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• 제12권4호
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• pp.17-25
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• 2009

The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

• Journal of the Optical Society of Korea
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• 제11권1호
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• pp.34-39
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• 2007

Laser-induced breakdown of colloidal suspensions, such as polystyrene, $ZrO_2$, and $SiO_2$ particles in diameters of 100-400 nm in water is investigated by nanosecond flash-pumped Nd:YAG laser pulses operating at a wavelength ${\lambda}$= 532 nm. The breakdown threshold intensity is examined in terms of breakdown probability as a function of laser pulse energy. The threshold intensity for $SiO_2$ particles ($1.27{\times}10^{11}\;W/cm^2$) with a size of 100 nm is higher than those for polystyrene and $ZrO_2$ particles with the same size, namely $5.7{\times}10^{10}$ and $5.5{\times}10^{10}\;W/cm^2$, respectively. Results indicate that the absorption of five photons is required to induce ionization of $SiO_2$ particles, whereas the other particles necessitate four-photon absorption. These breakdown thresholds are compared with those measured by nanosecond pulses from a diode-pumped Nd:YAG laser having a different focusing geometry.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 하계학술대회 논문집
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• pp.191-193
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• 1991

In this paper, we introduce silicon dioxide films deposited by Laser CVD, and evaluate the breakdown characteristics of these films by TZDB(Time Zero Dieiectric Breakdown) and TDDB(Time Dependent Dielectric Breakdown) test, failure times against eletric field are examined and accelation factors ${\beta}$ are obtained, and also, long term reliability is described by examining TDDB under positive voltage bias, all the above results are compared with PECVD(Plasma Enhanced CVD) $SiO_2$ breakdown, data, as a result, it is shown that the breakdown characteristics of Laser CVD $SiO_2$ films is improved.

• 한국기계가공학회지
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• 제16권1호
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• pp.83-89
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• 2017

The corrosion of metal specimens was analyzed in this study using laser-induced breakdown spectroscopy. The samples used in the study were magnesium alloys and corrosion, and standard specimens were prepared and analyzed using surface and depth analysis. The spectral wavelengths used in the oxide layer analysis were 777.196 nm, 777.421 nm, and 777.543 nm. The spectral line of the surface corrosion was confirmed by experimentation, and surface micro morphology analysis was performed using an optical microscope. Approximately $100{\mu}m$ corrosion depth was confirmed via laser irradiation in the depth direction. The results of laser-induced breakdown spectroscopy and the SEM-EDS analysis were compared and analyzed.

• 한국광학회:학술대회논문집
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• 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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• pp.182-183
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• 1999

• 대한전기학회:학술대회논문집
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• 대한전기학회 1990년도 하계학술대회 논문집
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• pp.177-179
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• 1990

Recently, it is reported that the behaviour of PECVD under high electric field and current condition has a major effect on MNS device degradation. In this paper, we evaluated the breakdown and TDDB characteristics of Laser assisted PECVD SiN films which is introduced new deposited method. And also, long term insulator breakdown reliability is described by examing time dependent dielectric breakdown under positive voltage. Failure tines against electric field are examined and acceleration factors are obtained for each case. From these data, breakdown wearout limitation for Laser Assisted PECVD SiN film can be characterized.

• 한국항공우주학회지
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• 제39권5호
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• pp.451-457
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• 2011

레이저 조사 시 발생되는 플라즈마는 물질에 따라 특정한 파장의 빛을 방출하므로, 이 빛을 수집하여 물질의 구성 성분을 정성 정량적으로 분석할 수 있다. LIBS(Laser-Induced Breakdown Spectroscopy)는 실시간에 가까운 분석과 원거리 검출이 가능하다는 점에서 우주 자원 탐사 기술로 주목받고 있다. 본 연구에서는 달 환경, 즉 고진공 하에서의 성분 분석을 위하여 double-pulse LIBS 기법을 이용하여 LIBS 신호 세기를 크게 증가시켰다. 또한 시편에 레이저가 조사되는 각도를 조절하여 임의 형상 물질의 분석을 모사하였다.

• 한국레이저가공학회지
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• 제11권2호
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• pp.33-38
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• 2008

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1440-1442
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• 1996

The laser annealing effects on the TEOS (Tetra-Ethyl-Ortho-Silicate) oxide of MOS (Al/TEOS/n+ Silicon) structures was investigated with different initial oxide conditions, such as breakdown field. The breakdown field increased up to the 170 $mJ/cm^2$ with increasing laser energy density and decreased at 220 $mJ/cm^2$. It is considered that the increase of breakdown field is originated from the restore of strains which exist mainly at the metal/oxide interface.

• 한국생산제조학회지
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• 제24권6호
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• pp.625-631
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• 2015

The hardness of surface treated magnesium alloy was evaluated using laser induced breakdown spectroscopy. The surface of the specimen was hardened mechanically, and the hardness profiles were measured using a traditional measurement technique. A laser beam was irradiated to generate a plasma, and the peaks of the components of the specimen were analyzed. A wavelength of 333.66 nm and 293.65 nm were selected as the atomic and ionic peaks, respectively. The ratios of the ionic peak to the atomic peak were obtained so as to compare the hardness profile. As the depth increased, the ratio decreased. These results are in good agreement with the previous hardness measurement results. It can be considered that this technique could be applied for remote and time-efficient hardness measurement.