• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1261-1262
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• 2008

Laser-based crystallization techniques are ideally-suited for forming high-quality crystalline Si films on active-matrix display backplanes, because the highly-localized energy deposition allows for transformation of the as-deposited a-Si without damaging high-temperature-intolerant glass and plastic substrates. However, certain significant and non-trivial attributes must be satisfied for a particular method and implementation to be considered manufacturing-worthy. The crystallization process step must yield a Si microstructure that permits fabrication of thin-film transistors with sufficient uniformity and performance for the intended application and, the realization and implementation of the method must meet specific requirements of viability, robustness and economy in order to be accepted in mass production environments. In recent years, Low Temperature Polycrystalline Silicon (LTPS) has demonstrated its advantages through successful implementation in the application spaces that include highly-integrated active-matrix liquid-crystal displays (AMLCDs), cost competitive AMLCDs, and most recently, active-matrix organic light-emitting diode displays (AMOLEDs). In the mobile display market segment, LTPS continues to gain market share, as consumers demand mobile devices with higher display performance, longer battery life and reduced form factor. LTPS-based mobile displays have clearly demonstrated significant advantages in this regard. While the benefits of LTPS for mobile phones are well recognized, other mobile electronic applications such as portable multimedia players, tablet computers, ultra-mobile personal computers and notebook computers also stand to benefit from the performance and potential cost advantages offered by LTPS. Recently, significant efforts have been made to enable robust and cost-effective LTPS backplane manufacturing for AMOLED displays. The majority of the technical focus has been placed on ensuring the formation of extremely uniform poly-Si films. Although current commercially available AMOLED displays are aimed primarily at mobile applications, it is expected that continued development of the technology will soon lead to larger display sizes. Since LTPS backplanes are essentially required for AMOLED displays, LTPS manufacturing technology must be ready to scale the high degree of uniformity beyond the small and medium displays sizes. It is imperative for the manufacturers of LTPS crystallization equipment to ensure that the widespread adoption of the technology is not hindered by limitations of performance, uniformity or display size. In our presentation, we plan to present the state of the art in light sources and beam delivery systems used in high-volume manufacturing laser crystallization equipment. We will show that excimer-laser-based crystallization technologies are currently meeting the stringent requirements of AMOLED display fabrication, and are well positioned to meet the future demands for manufacturing these displays as well.

• 한국자기학회지
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• 제10권1호
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• pp.30-36
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• 2000

Q switch mode 혹은 Fixed Q mode Nd-YAG 레이저 어블레이션법으로 (100)Si 기판위에 SmCo 박막을 증착하였다. 증착시 Sm$_{100-x}$Co$_{x}$ (73$\leq$x$\leq$93) 조성의 타겟을 사용하였고, 기판온도는 600~$700^{\circ}C$ 변화시켰으며 각 mode 에너지를 조절하였다. Q switching mode로 증착된 박막의 4$\pi$Ms, $_{i}$H$_{c}$ 및 4$\pi$M$_{r}$/4$\pi$M$_{s}$는 각각 5.2~7.7 kG, 190~250 Oe, 0.4~O.74이었다. 반면, Fixed Q mode로 얻어진 박막의 $_{i}$H$_{c}$, 4$\pi$M$_{r}$/4$\pi$M$_{s}$는 각각 430~6290 Oe, 0.32~0.91로 훨씬 양호한 경자기 특성이 나타났다. 후자의 자기특성은 박막에 존재하는 입자(droplet)내 SmCo$_{5}$ 와 Sm$_2$Co$_{17}$상의 생성에 의한 것으로 판단된다. 입자의 존재로 인한 박막표면의 거칠기는 향후 연구에서 해결되어야 할 문제점으로 확인되었다.문제점으로 확인되었다.었다.

• 한국전기전자재료학회논문지
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• 제24권12호
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• pp.982-987
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• 2011

In this study, $Ge_8Se_{(2+x)}Te_{(6-x)}$ thin film amorphous-to-crystalline phase-change rate was evaluated in using a nano-pulse scanner. The focused laser beam with a diameter <10 ${\mu}m$ was illuminated in the power (P) and pulse duration (t) ranges of 1-31 mW and 10-460 ns, respectively, with subsequent detection of the responsive signals reflected from the film surface. We also evaluated the material characteristics, such as optical absorption and energy gap, crystalline phases, and sheet resistance of as-deposited and annealed films. The result of experiments showed that the thermal stability of the Ge-Se-Te film is largely improved by adding Se.

• 대한기계학회논문집
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• 제19권9호
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• pp.2328-2341
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• 1995

An experimental study on the flow over the axisymmetric backward-facing step was carried out. The purposes of the present study are to investigate the effect of the free stream turbulence intensity on the reattachment length and to understand the turbulence structure of the recirculating flows. Local mean and fluctuating velocity components were measured in the separated and reattaching axisymmetric turbulent boundary layer over the wall of convex cylinder placed in a water tunnel by using 2-color 4-beam fiber optics laser Doppler velocimetry. As the free stream turbulence intensity increased, the reattachment length became shorter due to the enhanced mixing in the separated shear layer. It was also observed that the reverse flow velocity and turbulent kinetic energy increase with increasing free stream turbulence intensity. Spectral data and flow visualization showed that low-frequency motions occur in the separated flow behind a backward-facing step. These motions have a significant effect on the time-averaged turbulence data.

• 한국기계가공학회지
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• 제14권4호
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• pp.43-48
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• 2015

A focal length-correcting lens called the F-theta lens is required to compensate for the different focus on spot size due to the deflected incident laser beam. The F-theta lens was designed by the ray tracing method and fabricated by a 3D printer with polymer-based material. The designed F-theta lens is able to compensate for the focus on spot size by an incidence angle of 0 to 2 degrees. Based on the analysis of the simulation, there was almost no aberration in the $0^{\circ}C$ incidence angle, and the maximum of $50{\mu}m$ of aberration was observed at the incidence angle of $2^{\circ}$. Diffraction-encircled energy was analyzed to characterize the designed optics, and an image simulation was performed to confirm the actual image resolution.

• 한국정밀공학회지
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• 제13권2호
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• pp.68-75
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• 1996

More accurate inspection method for facilities of nuclear power plants is required to guarantee the continuous and stable energy supply. The portion of inspection for pipes and pressure vessels is relatively big in the power plants. Conventional inspection methods using ultrasonic wave, x-ray and eddy current for nondestructive testing in nuclear power plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time, money and manpower. And the area to be inspected is limited by the location of probe or film. These difficulties make the inspection into a time-consuming work. We propose an optical defect detection method using phase shifting realtime holographic interferometry. This method has an advantage that the inspection can be performed at a time for relatively wide area illuminated by the laser beam, a coherent light source and can help an inspector recognize not only defects but also the high stressed areas. In this paper we show that the quantitative measurement using holographic interferometry and image processing for defect in pressure vessels is possible.

• 대한기계학회논문집B
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• 제20권4호
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• pp.1510-1520
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• 1996

An experimental study on the flow over the axisymmetric backward-facing step was carried out. The purpose of the present study is to investigate the effect of the separating streamline curvature on the reattachment length and to understand the structure of recirculating flows. Local mean and fluctuating velocity components were measured in the separating and reattaching axisymmetric region of turbulent boundary layer on the wall of convex cylinder placed in a water tunnel by using 2-color 4-beam fiber optics laser Doppler velocimetry. The study demonstrates that the reattachment length increases with increasing separating streamline curvature. It is also observed that the reverse flow velocity and turbulent kinetic energy increase with an increase in the separating streamline curvature. In addition, the behavior of maximum turbulent stresses show that the effect of separating streamline curvature is larger in the region of recirculating zone(X/H<2) than in the region of reattachment point.

• 한국정밀공학회지
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• 제16권6호
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• pp.141-147
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• 1999

Optical disk technology with a laser beam for data recording and retrieval is one of the most promising route for high density information storage in multimedia era. As the storage density and data transfer rates are increased, mechanical issues, mainly noise and vibration, become critical. Rubber materials are extensively used in various machine design application, mainly for vibration/shock/noise control devices. Over the years an enormous effort has been put into developing procedures to provide properties of rubber components with complex shape and under pre-deformed state. In this paper, non-linear large deformations of a rubber mount for optical disk drive were investigated using the finite element method. A tension test of rubber material was performed, to calculate a strain energy function. According to the pre-deformed state, the variation of rubber mount stiffness were calculated and the reliability of numerical results were checked by compared with the measuring the deflection values. Also, the effects of the pre-deformed rubber mount on the system dynamic characteristics were investigated and the relation between the static stiffness variation of rubber mount and the natural frequence variation of system was discussed.

• Applied Microscopy
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• 제41권2호
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• pp.81-88
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• 2011

최근 나노 영역에서의 구조분석과 조성분석의 중요성이 증대되고 있으나, 기존의 분석장비들은 한계에 부딪히고 있다. 최근 개발된 APT는 nm 이하의 공간분해능과 수십 ppm수준의 detection limit으로 원소의 3차원분포와 조성정보를 제공해 주는 분석장비로서, 이러한 기존 분석의 한계를 극복할 수 있는 새로운 분석장비이다. 그러나 국내에는 아직 잘 알려지지 않아 활용이 미비한 실정이다. 따라서, 본 논문에서는 APT에 대한 이해를 돕기 위해 APT분석의 원리와 시편준비에 대해 소개하였다.

• 한국광학회지
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• 제18권6호
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• pp.452-460
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• 2007

ZERODUR와 용융 석영으로 저산란 반사경을 제작하고 산란 특성을 연구하였다. Bowl feed 법을 이용하여 초연마면인 표면거칠기 0.326 ${\AA}$인 용융 석영 기판과 표면거칠기 0.292 ${\AA}$의 ZERODUR 기판을 얻었다. 이온빔 스퍼터링 방법으로 초연마된 기판 위에 $SiO_2$와 $Ta_2O_5$를 교번으로 22층을 증착하여 다층박막 고반사 거울을 얻었다. 용융 석영 반사경과 ZERODUR 반사경의 산란이 각각 4.6 ppm과 30.9 ppm으로 측정되었으며, 이로부터 산란이 매우 작은 경우 기판의 표면거칠기가 산란을 결정하는 주요 파라미터가 아니라는 것을 알았다. 나아가 반사경의 표면거칠기를 AFM으로 측정한 결과. ZERODUR 반사경이 용융 석영 반사경 보다 박막의 표면거칠기가 2.3배 더 높게 측정 되었다. 이 결과는 기판-박막 경계면에서 박막 형성 초기에 기판의 화학조성 또는 결정방향과 증착물질의 상호관계로 인하여 박막 형성 초기에 표면거칠기가 급격히 나빠져서 발생하는 것으로 유추되었다. SEO 300A으로 접촉각 측정을 하여 Giriflaco-Good-Fowkees-Young 방법으로 표면에너지를 계산하였다. 표면거칠기 0.46 ${\AA}$을 갖는 용융 석영 기판이 표면거칠기 0.31 ${\AA}$을 갖는 ZERODUR 기판보다 접촉각이 더 작고 표면에너지는 크게 나타났다. 이러한 차이가 기판 종류에 따라 박막형성 초기에 표면거칠기를 다르게 하는 한 요인으로 판단되며, 기판의 표면에너지가 높을수록 미려한 박막표면을 얻는 것으로 확인되었다. ZERODUR의 표면에너지 차이를 설명하기 위해 XPS 분석으로 용융 석영은 Si, O로 구성되었고 ZERODUR는 Si, O, Al, Na 그리고 F로 구성되었다는 것을 알 수 있었다.