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Nano Scale Compositional Analysis by Atom Probe Tomography: I. Fundamental Principles and Instruments  

Jung, Woo-Young (Department of Material Science and Engineering, POSTECH)
Bang, Chan-Woo (Department of Material Science and Engineering, POSTECH)
Gu, Gil-Ho (Department of Material Science and Engineering, POSTECH)
Park, Chan-Gyung (Department of Material Science and Engineering, POSTECH)
Publication Information
Applied Microscopy / v.41, no.2, 2011 , pp. 81-88 More about this Journal
Abstract
Even though importance of nano-scale structure and compositional analysis have been getting increased, existing analysis tools have been reached to their limitations. Recent development of Atom Probe Tomography (APT), providing 3-dimensional elemental distribution and compositional information with sub-nm scale special resolution and tens of ppm detection limit, is one of key technique which can overcome these limitations. However, due to the fact that APT is not well known yet in the domestic research area, it has been rarely utilized so far. Therefore, in this article, the theoretical background of APT was briefly introduced with sample preparation to help understanding APT analysis.
Keywords
Atom probe tomography; Field evaporation; Pulsed laser atom probe; Energy compensator; Focused Ion Beam;
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