Nano Scale Compositional Analysis by Atom Probe Tomography: I. Fundamental Principles and Instruments |
Jung, Woo-Young
(Department of Material Science and Engineering, POSTECH)
Bang, Chan-Woo (Department of Material Science and Engineering, POSTECH) Gu, Gil-Ho (Department of Material Science and Engineering, POSTECH) Park, Chan-Gyung (Department of Material Science and Engineering, POSTECH) |
1 | Vaumousse D, Cerezo A, Warren PJ: A procedure for quantification of precipitate microstructures from three-dimensional atom probe data. Ultramicroscopy 95 : 215-221, 2003. |
2 | Thompson K, Lawrence D, Larson DJ, Olson JD, Kelly TF, Gorman B: Strategies for fabricating atom probe specimens with a dual beam FIB. Ultramicoscopy 102 : 287-298, 2005. DOI ScienceOn |
3 | Tsong TT: Atom-Probe Field Ion Microscopy, Cambridge University Press, pp. 31-71, 1990. |
4 | Tsong TT, McLane SB, Kinkus TJ: Pulsed-laser time-of-flight atomprobe field ion microscope. Rev Sci Instrum 53 : 1442-1448, 1982. DOI |
5 | Seol JB, Gu GH, Lim NS, Das S, Park CG: Atomic scale investigation on the distribution of boron in medium carbon steels by atom probe tomography and EELS. Ultramicroscopy 110 : 783-788, 2010. DOI ScienceOn |
6 | Takahashi J, Kawakami K, Kobayashi Y, Toshimi T: The first direct observation of hydrogen trapping sites in TiC precipitation-hardening steel through atom probe tomography. Scripta Mater 63 : 261-264, 2010. DOI ScienceOn |
7 | Thompson K, Flaitz PL, Ronsheim P, Larson DJ, Kelly TF: Imaging of arsenic cottrell atmospheres around silicon defects by threedimensional atom probe tomography. Science 317 : 1370-1374, 2007. DOI |
8 | Portavoce A, Blum I, Mangelinck D, Hoummada K, Chow L, Carron V, Labar JL: Boron clustering in implanted NiSi. Scripta Mater 64 : 828-831, 2011. DOI ScienceOn |
9 | Rachbauer R, Stergar E, Massl S, Moser M, Mayrhofer PH: Threedimensional atom probe investigations of Ti-Al-N thin films. Scripta Mater 61 : 725-728, 2009. DOI ScienceOn |
10 | Ronsheim P, Flaitz P, Hatzistergos M, Molella C, Thompson K, Alvis R: Impurity measurements in silicon with D-SIMS and atom probe tomography. Appl Surf Sci 255 : 1547-1550, 2008. DOI ScienceOn |
11 | Muller EW, Tsong TT: Field Ion Microscopy Principles and Applications, Elsevier, New York, pp. 109-127, 1969. |
12 | Muller EW: The field ion microscope. Z phys 131 : 136-142, 1951. DOI |
13 | Muller EW, Brandon DG: Field ionization of gases at a metal surface and the resolution of the field ion microscope. Phys Rev 102 : 624-631, 1956. DOI |
14 | Muller EW, Panitz JA, McLane SB: The atom-probe field ion microscope. Rev Sci Instrum 39 : 83-86, 1968. DOI |
15 | Miller MK: Atom Probe Tomography, Springer, New York, NY, pp. 1-23, 157-194, 2000. |
16 | Gu GH, Park CG, Nam KB: Inhomogeneity of a highly efficient InGaN based blue LED studied by three-dimensional atom probe tomography. Phys Status Solidi RRL 3 : 100-102, 2009. DOI ScienceOn |
17 | Kellogg GL, Tsong TT: Pulsed-laser atom-probe field-ion microscopy. J Appl Phys 51 : 1884-1193, 1980. |
18 | Larson DJ, Foord DT, Petford-Long AK, Liew H, Blamire MG, Cerezo A, Smith GDW: Field-ion specimen preparation using focused ion-beam milling. Ultramicroscopy 79 : 287-293, 1999. DOI ScienceOn |
19 | Miller MK: Concepts in atom probe designs. Surf Sci 246 : 428-433, 1991. DOI |
20 | Muller EW: Field Desorption. Phys Rev 102 : 618-624, 1956 DOI |
21 | Gault B, Moody MP, Geuser F, Haley D: Origin of the spatial resolution in atom probe microscopy. Appl Phys Lett 95 : 034103-043705-3, 2009. DOI ScienceOn |
22 | Deconihout B, Renaud L, Costa GD, Bouet M, Bostel A, Blavette D: Implementation of an optical TAP: preliminary results. Ultramicroscopy 73 : 253-260, 1998. DOI ScienceOn |
23 | Farber B, Cadel E, Menand A, Schmitz G, Kirchheim R: Phosphorus segregation in nanocrystalline Ni-3.6 at.% P alloy investigated with the tomographic atom probe (TAP). Acata Mater 48 : 789-796, 2000. DOI ScienceOn |
24 | Gault B, Geuser F, Stephenson LT, Moody MP, Muddle BC, Ringer SP: Estimation of the reconstruction parameters for atom probe tomography. Microsc Microanal 14 : 296-305, 2008. |
25 | Gault B, Vurpillot F, Vella A, Gilbert M, Menand A, Blavette D, Deconihout B: Design of a femtosecond laser assisted tomographic atom probe. Rev Sci Instrum 77 : 043705-043705-8, 2006. DOI ScienceOn |
26 | Gorman B: Atom probe reconstruction refinements by pre- and postanalysis TEM structure quantification. Microsc Microanal 13 : 1616-1617, 2007. |
27 | Cerezo A, Godfrey TJ, Smith GDW: Application of a position-sensitive detector to atom probe microanalysis. Rev Sci Instrum 59 : 862-866, 1988. DOI |
28 | Blavette D, Deconihout B, Bostel A, Sarrau JM, Bouet M, Menand A: The tomographic atom probe: A quantitative three-dimensional nanoanalytical instrument on an atomic scale. Rev Sci Instrum 64 : 2911-2919, 1993. DOI ScienceOn |
29 | Bunton JH, Olson JD, Lenz DR, Kelly TF: Advances in pulsed-laser atom probe: instrument and specimen design for optimum performance. Microsc Microanal 13 : 418-427, 2007. |
30 | Cerezo A, Godfrey TJ, Sijbrandij SJ, Smith GDW, Warren PJ: Performance of an energy-compensated three-dimensional atom probe. Rev Sci Instrum 69 : 49-58, 1998. DOI ScienceOn |
31 | Colijn HO, Kelly TF, Ulfig RM, Buchheit RG: Site-Specific FIB preparation of atom probe samples. Microsc Microanal 10 : 1150-1151, 2004. |