• Journal of Astronomy and Space Sciences
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• v.15 no.2
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• pp.401-415
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• 1998

This paper reports the results obtained from the Langmuir probe (LP) and Electron Temperature Probe (ETP) experiments on the sounding rocket KSR-II (Korean Scientific Rocket - II) which was launched on Jun 11, 1998 at 10:00 KST from Tae-An peninsula (37$^{\circ}$ N, 126$^{\circ}$ E). The instruments successfully measured the electron density, electron temperature, and the floating potential at altitudes of 73km to 130km. While the electron temperature measurement is not easy in this region, since the temperature is very low and the contamination effect of the probe may give rise to a problem, we were able to obtain a reasonable electron temperature profile by employing two independent methods, the pulse modulated Langmuir Probe and Electron Temperature Probe. The preliminary results show that electron density increases sharply at about 90km, and forms a peak at 102km. The density profile is roughly consistent with IRI (International Reference Ionosphere)95-model or PIM (Parameterized Ionospheric Model) results except that the peak density appears at 110km in the model and model electron density is slightly lower than the observed one. Electron temperature obtained from ETP fluctuates between 200$^{\circ}$K and 700$^{\circ}$K, an effect presumably coming from the wakes developed by LP, and it tends to increase with the altitude, which is consistent with the LP results.

• Journal of Astronomy and Space Sciences
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• v.18 no.3
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• pp.249-256
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• 2001

KARI(Ko.ea Aerospace Research Institute) has measured the ionospheric electron temperature and density over the Korean Peninsular with the Langmuir and Electron Probe(LEP) onboard the Korean Sounding Rocket-II(KSR-II) In 1998. The purpose of LEP is to measure the electron density and temperature profile in the ionosphere. LEP consists of the Langmuir probe(LP) and the Electron temperature Probe(ETP) which are widely used for the measurement of the ionospheric plazma environment . We discuss the development of the Langmuir and Electron Probe which will be onboard the KSR-III and some test results in a simulated space plasma environment with the plasma chamber at the ISAS in Japan. These measurements could contribute to the basic study of ionospheric environment which also can be compared with other reference models such as IRI and PIM.

• Publications of The Korean Astronomical Society
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• v.15 no.spc2
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• pp.37-44
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• 2000

Two different types of plasma probes have been developed and are currently in operation on board the KOMPSAT-l. One is the cylindrical Langmuir Probe (LP) that measures the electron density and temperature from its current-voltage characteristics in thermal plasmas, and the other is the Electron Temperature Sensor (ETS) which directly gives the information of the ambient electron temperatures. These plasma probes provide the electron properties of the local nighttime ionosphere at the KOMPSAT-l altitudes. In this paper we briefly describe the probes and the initial results obtained from these probes since the beginning of their normal operation in April, 2000.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.734-737
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• 2004

The metal-ferroelectric-semiconductor (MFS) structure is widely studied for nondestructive readout (NDRO) memory devices, but conventional MFS structure has a critical problem. It is difficult to obtain ferroelectric films like PZT on Si substrate without interdiffusion of impurities such as Pb, Ti and other elements. In order to solve these problems, the metal-ferroelectric-insulator-semiconductor (MFIS) structure has been proposed with a buffer layer of high dielectric constant such as MgO, $Y_2O_3$, and $CeO_2$. In this study, the etching characteristics (etch rate, selectivity) of MgO thin films were etched using $Cl_2/Ar$ plasma. The maximum etch rate of 85 nm/min for MgO thin films was obtained at $Cl_2$(30%)/Ar(70%) gas mixing ratio. Also, the etch rate was measured by varying the etching parameters such as ICP rf power, dc-bias voltage, and chamber pressure. Plasma diagnostics was performed by Langmuir probe (LP) and optical emission spectroscopy (OES).

• Bulletin of the Korean Space Science Society
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• 2003.10a
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• pp.31-31
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• 2003

Equatorial Plasma Bubble(EPB)은 적도 지역에서 Rayleigh-Taylor Instability에 의해 발생하는 이온층 플라즈마의 불안정성 현상으로, 주변의 플라즈마 밀도에 비해 좁은 영역에서 플라즈마 밀도가 급격하게 떨어지는 현상을 말한다. 지역적으로 보면, 겨울철에는 대서양 지역에서 집중적으로 발생하고 여름철에서는 태평양 지역에서 많이 관측된다. 이러한 불안정 현상은 단파 통신 장애를 유발할 수 있기 때문에 많은 연구 대상이 되어왔지만, 아직까지 태양 활동이나 지자기 변화에 의한 상호 연관성이 규명되지 못 하고 있다. 이것은 Rayleigh-Taylor Instability를 발생시키는 여러 인자들이 매우 복잡하게 관련되어 있기 때문인데, 본 연구에서는 특정 지역에서 발생하는 EPB에 한정하여 태양 활동과의 상호 연관성에 대해 분석하고자 하였다. 또한 단순한 발생 빈도에 대한 통계적인 처리가 아닌, EPB하나 하나에 대한 특성을 분석함으로써 EPB의 발생과 관련한 보다 명확한 분석이 가능하게 되었다. 분석에 필요한 data는 KOMPSAT-1의 Langmuir Probe(LP)에 의해 2000년에서 2001년 사이에 얻은 이온층의 전자 밀도를 사용하였는데, KOMPSAT-1의 LP는 같은 기간 활동한 다른 위성에 비해 좋은 시간 분해능을 가지고 있기 때문에 EPB의 통계 처리에 적당한 것으로 생각되었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.174-177
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• 2003

$Cl_2$ 플라즈마를 이용한 BLT 박막의 식각에서 Ar 가스의 첨가에 따른 식각 속도, 선택비 및 식각 형상의 변화에 대하여 관찰하였다. BLT 박막의 식각 속도는 100% Ar 플라즈마에서 100 % $Cl_2$ 플라즈마에서의 식각 속도보다 약 1.5배정도 빨랐으며, 80% Ar/20% $Cl_2$ 조건에서 $503{\AA}/min$ 최대 식각의 최대 시각 속도를 얻었다. RF 전력과 직류 바이어스 전압을 증가함에 따라 식각 속도는 증가하였으며, $Ar/Cl_2$ 플라즈마의 식각 속도가 $Cl_2$ 플라즈마의 식각 속도 보다 높았다. 식각 공정 변수의 변화에 의한 플라즈마 변수가 BLT 식각 속도에 미치는 영향을 관찰하기 위하여 LP(Lanmuir porbe)와 OES(optical emission spectroscopy)분석을 수행하였다. Ar 첨가량이 증감함에 따라 LP 분석에서 전자의 온도는 증가하였으나 전자밀도는 감소하였다. 이는 Ar의 이온화 준위가 Cl 보다 높기 때문에 이온화 윷이 낮아지기 때문으로 판단된다, 또한, OES 분석에서 Ar 첨가량이 증가함에 따라 Cl 원자의 부피 밀도는 감소하였다. Ar 첨가에 의한 BLT 박막의 식각 속도의 변화와 LP 및 OES 분석을 고려하면, BLT 박막은 화학적 식각의 도움을 받는 무리적 식각에 의하여 식각됨을 확인하였다,

• Publications of The Korean Astronomical Society
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• v.15 no.spc2
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• pp.45-52
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• 2000

Four plasma instruments are currently under development for KAISTSAT-4 (K-4) which is scheduled for launch in 2002. They are the Solid-State Telescope, Electro-Static Analyzer, Langmuir Probe, and the Scientific Magnetometer, that will respectively allow in-situ detection of high energy and low energy components of auroral particles, ionospheric thermal electrons, and magnetic field disturbances. These instruments, together with the Far-ultraviolet IMaging Spectrograph, will provide micro-scale physics of Earth's polar ionosphere with detailed spectral information that has not been previously achieved with other space missions. In this paper, we review the concept of the four space plasma instruments as well as the anticipated results from the instruments.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.124.2-124.2
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• 2012

위성체의 전위는 위성 주변의 우주 환경에 크게 영향을 받는다. 본 연구에서는 과학기술위성 1호(STSAT-1)에 탑재된 LP(Langmuir Probe)와 ESA(Electro-Static Analyzer) 관측 자료를 이용하여 위성체의 전위에 위성 주변 고에너지 입자들이 미치는 영향을 분석하였다. 일반적으로 위성체가 대전되어 위성체의 부동전위가 감소할 때 위성 주변의 플라즈마 밀도는 감소하고 온도는 증가한다. 또한 DMSP 위성 등을 비롯한 이전 관측에서는 고에너지 입자의 플럭스가 증가하는 지역을 위성이 통과할 때 위성체의 전위가 감소하였다. 본 연구에서는 위성이 수 ~ 수 십 keV 정도의 고에너지 입자 플럭스가 증가한 후 감소하는 지역을 통과할 때에도 위성체의 전위가 감소하는 현상을 관측하였다. 고에너지 입자의 플럭스가 감소하는 지역에서 일어나는 위성의 대전현상을 통계적으로 분석해 보고 이러한 결과를 토대로 위성체 전위 변화에 우주환경 변화가 어떤 영향을 주는지 연구하였다.

• Journal of Astronomy and Space Sciences
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• v.31 no.4
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• pp.311-315
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• 2014

In this study, we investigated the effect of space plasmas on the floating potential variation of a low-altitude, polar-orbiting satellite using the Langmuir Probe (LP) measurement onboard the STSAT-1 spacecraft. We focused on small potential drops, for which the estimation of plasma density and temperature from LP is available. The floating potential varied according to the variations of plasma density and temperature, similar to the previously reported observations. Most of the potential drops occurred around the nightside auroral region. However, unlike the previous studies where large potential drops were observed with the precipitation of auroral electrons, the potential drops occurred before or after the precipitation of auroral electrons. Statistical analysis shows that the potential drops have good correlation with the temperature increase of cold electrons, which suggests the small potential drops be mainly controlled by the cold ionospheric plasmas.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.72-77
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• 2021

The radial distribution of etch rate was analyzed using the ion energy flux model in VHF-CCP. In order to exclude the effects of polymer passivation and F radical depletion on the etching. The experiment was performed in Ar/SF6 plasma with an SF6 molar ratio of 80% of operating pressure 10 and 20 mTorr. The radial distribution of Ar/SF6 plasma was diagnosed with RF compensated Langmuir Probe(cLP) and Retarding Field Energy Analyzer(RFEA). The radial distribution of ion energy flux was calculated with Bohm current times the sheath voltage which is determined by the potential difference between the plasma space potential (measured by cLP) and the surface floating potential (by RFEA). To analyze the etch rate uniformity, Si coupon samples were etched under the same condition. The ion energy flux and the etch rate show a close correlation of more than 0.94 of R² value. It means that the etch rate distribution is explained by the ion energy flux.