Analysis of Si Etch Uniformity of Very High Frequency Driven - Capacitively Coupled Ar/SF6 Plasmas |
Lim, Seongjae
(Department of Energy Systems Engineering, Seoul National University)
Lee, Ingyu (Department of Energy Systems Engineering, Seoul National University) Lee, Haneul (Department of Energy Systems Engineering, Seoul National University) Son, Sung Hyun (Department of Energy Systems Engineering, Seoul National University) Kim, Gon-Ho (Department of Energy Systems Engineering, Seoul National University) |
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