• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1157-1159
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• 1999

A new method was developed to fabricate 1-3 piezo composite, a part of ultrasonic transducer. PZT rod arrays were made by pressing PZT green sheet with LIGA mold, and were sintered. Its dielectric constant and electro-mechanical coupling coefficient showed 4000 and 55% at 1kHz, respectively. So, PZT rod arrays made by means of this process can be applied to ultrasonic transducer.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.04a
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• pp.7-13
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• 2003

Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for micro lens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of micro lens which depend on the thermal treatment. For the replication of micro lens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of micro lenses. Fabricated microlenses showed good surface roughness with the order of 1nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.199-199
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• 2009

Recently, polymeric microlens arrays have become important elements in many applications. Microlens arrays have been used to enhance luminance efficiency and luminance power efficiency of light-emitting diodes (LEDs) and organic LEDs. Many processes for fabrication of microlens array are studied. Though the MLA has been fabricated by electroformed mold, LIGA process and reflow method, these methods were required masks, multiple process steps and post processing. In this paper, we proposed rapid and direct UV laser direct fabrication process using colorless liquid photopolymer, NOA60 for polarization activated microlens. The microlens arrays are formed on the NOA60 on glass, after the focused laser energy was irradiated to the material. The diameter of MLA was varied from 42 to 88 ${\mu}m$, and the height from 0.9 to 1.6 ${\mu}m$. The MLA fabricated using NOA60 shows more then 85% transmittance as well as good hardness for optical module.

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.47-52
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• 2001

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in. micro-system industries, in particular the bioapplication industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, both experimental and numerical studies have been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness were fabricated and a flow visualization system was also developed to observe the filling flow into the micro-channels. Experimental flow observations were extensively made to find the effects of channel width and thickness, and effects of surface tension and volume flow rate and so on. And a numerical analysis system has been developed to simulate the filling flow into micro-channels with the surface tension effect taken into account. Discussed are the flow visualization experimental observations along with the predictability of the numerical analysis system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.1982-1988
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• 2002

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.7
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• pp.859-866
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• 2010

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.