• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권8호
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• pp.598-604
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• 1999

This paper describes the research to minimize the film stress and maximize the aspect ratio of photoresist structure, especially about SU-8 for electroplating mold. UV LIGA process using SU-8 allows fabricating high aspect ratio polymer structures. However, it is hard to get fine patterns in the high aspect ratio structures because of high internal stress and difficulty of removing SU-8. The purpose of this paper is to setup the process condition for the obtainment of both low film stress and high aspect ratio and to find design rules that make the pattern be less dependent on stress problem. Firstly, the process of heat treatment and exposure of SU-8 are proposed. These two conditions control the amount of cross-linkage in polymer structure, which is the most important parameter of both pattern generation and remaining stress. Heat treatment is dealed with soft bake and post-exposure-bake. Temperature and time duration of each step are varied with heat treatment condition. Some test patterns are fabricated to evaluate the proposed process. Nickel electroplating is performed with the mold fabricated through the proposed process to confirm the SU-8 as a good electroplating mold.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 추계학술대회 논문집
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• pp.387-390
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• 2009

This study was designed to fabricate the micro-electro-mechanical systems (MEMS) parts such as micro spur gears using hot extrusion of gas atomized Al-78Zn powders. For this purpose, it is important to develop new methods to fabricate micro-dies and choose suitable extrusion conditions for a micro-forming. Micro-dies with Ni were fabricated by LIGA technology. LIGA technology was capable to produce micro-extrusion dies with close tolerances, thick bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro formability with average strain rates ranging from $10^{-3}$ to $10^{-2}\;s^{-1}$ and constant temperatures ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape (${\Phi}3{\times}h10$) under compressive force of 10kN and, subsequently, the compacted powders were extruded at 563k in a hot furnace. Micro-extrusion has succeeded in forming micro-gear shafts.

• 한국재료학회지
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• 제13권1호
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• pp.6-10
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• 2003

Electroplated Ni and Ni-W micro-molds using LIGA-like process for replication of micro-components such as microfluidic parts and micro optical parts have been investigated. In general, it is hard to produce micro-parts using conventional mechanical processes. Micro-mold formed by LIGA-like process could fabricate micro-parts with high aspect ratio. In this paper, fabrication and properties of electroplated Ni molds with varying applied current types as well as those of Ni-W molds were investigated. Ni molds fabricated under pulse-reverse current showed the highest hardness value of about 160 Hv. Ni-W molds showed the hardness of about 500 Hv which was much harder than that of Ni electroplated molds. The above results suggested that high quality micro-molds could be fabricated by using Ni electroplating of pulse-reverse type for core molds and sequential Ni-W alloys coating.

• 대한기계학회논문집A
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• 제26권9호
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• pp.1923-1930
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• 2002

In this paper, we present modeling and simulation of microlens formation by means of a deep X-ray lithography followed by a thermal treatment of a PMMA (Polymethylmethacrylate) sheet. According to this modeling, X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. In this modeling, the free volume theory including the relaxation process during the cooling process was considered. The simulation results indicate that the modeling in this study is able to predict the fabricated microlens shapes and the variation pattern of the maximum heights of microlens which depends on the conditions of the thermal treatment. The prediction model could be applied to optimization of microlens fabrication process and to designing a micro mold insert for micromolding processes.

• Korea-Australia Rheology Journal
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• 제19권3호
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• pp.171-176
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• 2007

LCD-BLU (Liquid Crystal Display-Back Light Unit) of medium size is usually manufactured by forming numerous dots with $50{\sim}300\;{\mu}m$ in diameter by etching process and V-grove shape with $50\;{\mu}m$ in height by mechanical cutting process. However, the surface of the etched dots is very rough due to the characteristics of the etching process and V-cutting needs rather high cost. Instead of existing optical pattern made by etching and mechanical cutting, 3-dimensional continuous micro-lens of $200\;{\mu}m$ in diameter was applied in the present study. The continuous micro-lens pattern fabricated by modified LIGA with thermal reflow process was tested to this new optical design of LGP. The manufacturing process using LIGA-reflow is made up of three stages as follows: (i) the stage of lithography, (ii) the stage of thermal reflow process and (iii) the stage of electroplating. The continuous micro-lens patterned LGP was fabricated with injection molding and its test results showed the possibility of commercial use in the future.

• 한국정밀공학회지
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• 제17권8호
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• pp.172-179
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• 2000

In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ${\mu}m$ length mirror-like three side-facets inclined to the base at 45$^{\circ}$ and knife edges. Two regular triangles of 45$^{\circ}$ and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider.

• 센서학회지
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• 제9권5호
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• pp.380-388
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• 2000

LIGA-like 공정을 이용하여 고종횡비를 갖는 초소형 니켈 터빈을 제작하기 위하여 블레이드에 대한 유한 요소 해석을 수행하여 안전한 운전 조건을 연구하였다. 이 해석으로부터 터빈의 입구와 출구의 압력 차이가 44kPa 정도일 때에 항복강도를 넘지 않도록 해야 하며 축의 외경과 터빈 날개의 내경 사이의 접촉에 의한 마찰계수와 최대 응력 사이의 관계는 약간 반비례하는 경향을 보였다. 즉, 터빈이 회전하는 상태에서 최대 응력은 접촉 마찰이 증가함에 따라 감소했다. 터빈과 같이 반복하중을 받는 부분은 취성이 강한 실리콘보다는 금속으로 제작해야 하며 이를 위해서는 표면 미세 가공 보다 LTGA-like 공정으로 제작되어야 한다. 본 연구는 초소형 구조물에서 움직이는 부분과 고정된 부분의 접촉 문제를 갖는 여러 종류의 문제를 다루는 데에 이용될 수 있다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1292-1293
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• 2006

A non-equilibrium powder metallurgy processing such as an MA/SPS (Mechanical Alloying / Spark Plasma Sintering) process is examined in a Ti-48moll%Al. TiAl intermetallic compound is a potential light-weight/high-temperature structural material. One of the major problems, however, limiting the practical use of the material is its poor workability. From this point, the powder metallurgy (PM) processing route has been attractive alternative of the conventional processing for such material The MA/SPS process is able to apply to a LIGA process. Optimization of the pseudo-superplasticity enables to fabricate micro-parts made of fine grained ceramics composites of TiAl by the LIGA process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2221-2223
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• 2000

본 연구에서는 새로운 개념의 초정밀 가공기술인 LIGA 기술(이하 X-선 가공기술이라 함)을 이용하여 정밀 격벽(barrier ribs) 성형용 Ni 금형을 제작하였다. 먼저 X-ray 투과도가 우수하며 내구성 및 기계적 강도가 뛰어난 새로운 재질의 graphite X-선 마스크를 제작하였으며 한정된 단위면적의 X-선 마스크를 이용하여 X-선 노광 면적을 최대화 할 수 있는 새로운 X-선 exposure 기술을 개발하였다. 제작된 barrier ribs 성형용 초정밀 금형의 전체 size는 170mm X 130mm이며 pitch 간격은 110/55${\mu}m$ $\pm$ 0.7${\mu}m$ 이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.134-134
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• 2004

LCD-BLU의 고효율 광특성을 유도하기 위한 도광판의 초미세패턴 형상가공기술, 미세사출성형기술과 미세형상패턴 광학해석기술 및 전광특성 측정 및 보완기술이 요구된다. 이러한 기술들을 바탕으로 LCD-BLU의 고단가의 주요요인인 기능성 광학 sheet(prism sheet 등)를 연차적으로 제거 및 도광판에 기능을 결합하는 기술개발이 본 연구의 목적이다.(중략)