• Korean Journal of Materials Research
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• v.5 no.7
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• pp.794-801
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• 1995

To connect the driver IC and Al coated glass, a method has been developed to plate electrolessly Ni on Al/PR system. It Is necessary to pretreat Al to remove oxide film before plating. In order to find pretreatment process which does not damage photoresist or glass, alkaline and fluoride zincate process have been investigated. Because photoresist and aluminum thin film can easily dissolve in alkaline solution, it is considered that the fluoride zincate process was a suitable one. After immersion in the zincate solution containing 1.5 g/$\ell$ ammonium bifluoride and 100 g/$\ell$ zinc sulfate, electroless nickel plating could be performed. The additive in the zincate solution and thiourea in the plating solution increased smoothness of the plated surface. Acld dip could improve the uniformit of the surface.

• Laser Solutions
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• v.14 no.2
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• Composites Research
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• v.35 no.5
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• pp.303-308
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• 2022

PIC (Piecewise Integrated Composite) is a new concept for designing a composite structure with mosaically assigning various types of stacking sequences in order to improve mechanical properties of laminated composites. Also, machine learning is a sub-category of artificial intelligence, that refers to the process by which computers develop the ability to continuously learn from and make predictions based on data, then make adjustments without further programming. In the present study, the tapered box beam type PIC robot arm for carrying and transferring wide and thin LCD display was designed based on the machine learning in order to increase structural stiffness. Essential training data were collected from the reference elements, which were intentionally designated elements among finite element models, during preliminary FE analysis. Additionally, triaxiality values for each finite element were obtained for judging the dominant external loading type, such as tensile, compressive or shear. Training and evaluating machine learning model were conducted using the training data and loading types of elements were predicted in case the level accuracy was fulfilled. Three types of stacking sequences, which were to be known as robust toward specific loading types, were mosaically assigned to the PIC robot arm. Henceforth, the bending type FE analysis was carried out and its result claimed that the PIC robot arm showed increased stiffness compared to conventional uni-stacking sequence type composite robot arm.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.134-134
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• 2012

최근 반도체 및 디스플레이 산업에서 진공, 특히 플라즈마 공정은 중요한 기술로 알려져 있다. 반도체 제조공정은 플라즈마를 이용하여 증착(deposition)공정 및 패터닝을 위한 식각(Dry Etch)공정으로 크게 나뉘고, 디스플레이 공정에서는 Glass위에 형성된 금속오염입자 및 polymer와 같은 불순물을 제거하는 공정으로 식각(Dry Etch)공정을 주로 사용하고 있다. 진공공정장비인 CVD, Etcher는 플라즈마와 활성기체, 고온의 공정온도에 노출 되면서 진공공정장비 부품에 부식이 진행되기 때문에 내플라즈마성이 강한 재료를 코팅하여 사용하고 있다. 하지만 장시간 부식환경에 노출이 되면, 코팅부품에서도 부식이 진행되면서 다량의 오염입자가 발생하여 생산수율 저하에 원인이 되기도 하고, 부품 교체비용이 많이 들기 때문에 산업체에서 많은 어려움을 겪고 있다. 본 연구에서는 산업체에서 코팅부품으로 많이 사용되고 있는 다양한(Al2O3, Y2O3 등) 산화막 및 세라믹코팅 부품의 내플라즈마 특성을 비교 연구하였다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.169-173
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• 2007

Slit-coater nozzle is one of core equipments of coating process in LCD panel manufactory. As a glass substrate size become bigger, a nozzle performance and a high-speed coating process are considered important issues. To design the optimal nozzle, the characteristics of fluid inside nozzle are studied using CFD (Computational Fluid Dynamics) method. Through research on design factors, we can know the coating uniformity influenced by lip length, cavity angle and gap size. The future work for this study is to find the factors in high-speed coating process and function between factors of design.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1267-1268
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• 2008

The two-shot SLS method has recently been successfully implemented in volume manufacturing of advanced LTPS-based LCDs. In this presentation, we discuss how the approach is also well suited for being implemented in high-throughput and high-yield manufacturing of large AMOLED displays on large glass substrates.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1673-1675
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• 2006

As the manufacturing capacity needs for large size LCD TV shifts very fast into next generation, processing and test equipment makers face more difficult challenges in accommodating productivity, reliability and lead time of panel makers as well as the prerequisite of high process quality. In this paper, AKT will discuss its new innovative productivity solutions in PECVD (Plasma Enhanced Chemical Vapor Deposition), as the key thin film process system, and EBT (Electron Beam Test), as the key array test system, for the huge glass size with surface dimension larger than 2 meter by 2 meter.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1542-1545
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• 2005

Transparent conducting aluminum-doped zinc oxide (AZO) thin films have been deposited on corning 1737 glass by DC magnetron sputter. The structural, electrical and optical properties of the films were investigated as a function of various substrate temperatures. AZO thin films were fabricated by dc magnetron sputtering with AZO ceramic target $(Al_2O_3: 2wt %)$. The obtained films were poly crystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity is $6.0{\times}10^{-4}$ Ocm with the carrier concentration of $2.694{\times}10^{20}\;cm^{-3}$ and Hall mobility of $20.426cm^2/Vs$. The average transmittance in the visible range was above 90%.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1546-1549
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• 2005

Al-doped ZnO (ZnO:Al) thin films were grown on corning 1737 glass substrates by dc magnetron sputtering. The structural, electrical and optical properties of the films were investigated as a function of various discharge power. The obtained films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity is $6.0{\times}10^{-4}$ Ocm with the carrier concentration of $2.694{\times}10^{20}$ $cm^{-3}$ and Hall mobility of $20.426cm^2/Vs$. The average transmittance in the visible range was above 90%.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1351-1354
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• 2006

In this paper, we study the effect of substrate temperature on property of Ga doped ZnO (GZO) thin film for transparent conductive oxide (TCO).GZO thin films have been deposited on corning glass 1737 by D.C. magnetron sputtering. We investigated the structural and electrical properties of GZO films using the X-Ray Diffractometer(XRD), Field Emission Scanning Electron Microscopy(FESEM) and 4-points probe .