Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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슬릿 코터 노즐의 최적 설계 및 고속도포 공정의 적용 가능성에 대한 연구

  • 김태민 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 김광선 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 김기운 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 임태현 ((주)케이씨텍) ;
  • 정은미 ((주)케이씨텍)
  • Published : 2007.06.08
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Abstract

Slit-coater nozzle is one of core equipments of coating process in LCD panel manufactory. As a glass substrate size become bigger, a nozzle performance and a high-speed coating process are considered important issues. To design the optimal nozzle, the characteristics of fluid inside nozzle are studied using CFD (Computational Fluid Dynamics) method. Through research on design factors, we can know the coating uniformity influenced by lip length, cavity angle and gap size. The future work for this study is to find the factors in high-speed coating process and function between factors of design.

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