• Fire Science and Engineering
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• v.26 no.5
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• pp.41-47
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• 2012

As a core process in the manufacture of state-of-the-art industrial technologies such as semiconductor and LCD, a clean room is the most important process which can affect the performance and quality of products drastically. Nevertheless, scientific research on comprehensive safety measures from a fire protection standpoint is not being carried out in Korea. This study aims to derive measures to improve smoke control systems by identifying performance and problems of smoke systems installed in clean rooms as an LCD manufacturing process and analyzing fire and evacuation simulations considering several scenarios. As a result of analysis of fires and smoke in a clean roomas an LCD manufacturing process, it is found to be necessary to stop air handling units through interlocking in case of a fire and exhaust smoke out of the room through the top of FAB in consideration of buoyancy of smoke. It is also found to be necessary to install quick response sprinkler heads and accessories to accelerate the response time, because the heat-accumulating performance of sprinkler heads decreases in this application. Despite its low density of dwelling due to the automation process, clean room is characterized by an array of complex production equipment and working environment requiring dustproof clothes, which makes it difficult to acquire evacuation safety performance. Thus, thorough control of danger factors in processes and periodic education and training are required. It is also necessary to establish a level of domestic technologies equivalent to the level of standards of advanced countries in fire protection.

• Journal of Information Display
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• v.13 no.2
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• pp.83-89
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• 2012

The crosstalk evaluation of multiview autostereoscopic three-dimensional (3D) displays is discussed, with both the human and technical factors investigated via image quality assessment. In the imaging performance measurements and analysis for a multiview autostereoscopic display prototype equipment, it was inferred that crosstalk would have both a positive and a negative effect on the imaging performance of the equipment. The importance of the attached diaphragm in the crosstalk evaluation was proposed and then experimentally verified, using the developed prototype equipment. The luminance distribution and crosstalk situation were given, with two different diaphragm arrays applied. The analysis results showed that the imaging performance of this 3D display system can be improved with minimum changes to the system structure.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.97-102
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• 2011

The size of TV and TFT-LCD are bigger and bigger for the next generation exposure equipment install that existing fab are getting a lot of additions. When the new fab build an extension that the shortening of the construction and non-vibration are use cast in place concrete pile method. In this study when lay the foundation of existing fab adjoin use vibration monitoring system are rotator type all casing method among cast in place concrete pile method. The evaluation of ground vibration of rotator type all casing method effect to precision equipment and vibration area of influence.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.49-54
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• 2005

In the case of a sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. The aim of this study is to evaluate the allowable vibration response of a precision inspect ion equipment, which has some trouble in field, by using experimental measurement data and to proposal a proper ant i-vibration method.

• Proceedings of the KIPE Conference
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• 2008.06a
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• pp.553-555
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• 2008

현재 사용하고 있는 LCD(Liquid Crystal Display) Backlight용 램프는 주로 CCFL(Cold Cathod Fluorescent Lamp)과 EEFL(External Electrode Fluorescent Lamp)이 사용되고 있다. 하지만 이 램프는 수은을 사용하여 RoHS(the Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)규제가 점점 강화되면서 사용이 제한되고 있으며, 이에 따라 수은을 사용하지 않는 램프의 제작이 불가피해지고 있다. 또한 LCD TV는 CRT와 PDP와는 다른 LCD만의 Hold-type 특성과 LC(Liquid Crystal)의 응답속도로 인하여 Motion Blur현상이 나타나는 단점이 있다. 본 논문에서는 RoHS 규제를 만족시키는 무수은 면광원 램프를 구동하기 위한 인버터를 제안한다. 제안한 인버터는 포워드 방식을 사용하여 반도체 소자 및 자기 소자의 수를 줄여서 구동회로가 간단하다. 또한 면광원 램프를 세로방향으로 6블록으로 나누어 스캔구동을 하여 Motion Blur현상을 저감 시켰다. 끝으로 실험을 통하여 제안한 인버터의 유용성을 입증하였다.

• Advances in materials Research
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• v.2 no.4
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• pp.181-193
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• 2013

Description and theory of spin coating technique has been elaborately outlined and a spin coating machine designed and fabricated using affordable components. The system was easily built with interdisciplinary knowledge of mechanics, fluid mechanics and electronics. This equipment employs majorly three basic components and two circuit units in its operation. These include a high speed dc motor, a proximity sensor mounted at a distance of about 15 mm from a reflective metal attached to the spindle of the motor to detect every passage of the reflective metal at its front and generate pulses. The pulses are transmitted to a micro-controller which process them into rotational speed (revolution per minute) and displays it on a lead crystal display (LCD) which is also a component of the micro-controller. The circuit units are a dc power supply unit and a PWM motor speed controlling unit. The various components and circuit units of this equipment are housed in a metal casing made of an 18 gauge black metal sheet designed with a total area of 1, $529.2cm^2$. To illustrate the use of the spin-coating system, ZnO sol-gel films were prepared and characterized using SEM, XRD, UV-vis, FT-IR and RBS and the result agrees well with that obtained from standard equipment and a speed of up to 9000 RPM has been achieved.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.11 s.353
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• pp.185-191
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• 2006

DSRC((Dedicated Short Range Communication) is dedicated short range communication for wireless communications between RSE(Road Side Equipment) and OBE(On-Board Unit) within vehicle moving high speed. In this paper, we implemented 5.8GHz DSRC modem according to Korea TTA(Telecommunication Technology Association) standard and investigated implementation results and design process for SoC(System on a Chip) embedding ARM CPU which control overall signal and process arithmetic work. The SoC is implemented by 0.11um design technology and 480pins EPBGA package. In the implemented SoC ($Jaguar^{TM}$), 5.8GHz DSRC PHY(Physical Layer) modem and MAC are designed and included. For CPU core ARM926EJ-S is embedded, and LCD controller, smart card controller, ethernet MAC, and memory controller are designed as main function.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.8
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• pp.6-14
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• 2006

This paper is a study about a proper method of plasma generation to cleaning method and a high frequency power equipment circuit to generation of plasma that used cleaning of chamber for TFT-LCD PECVD. The high density plasma required for cleaning causes a possibility of high density plasma more than $1{\times}10^{11}[EA/cm^3]$. It apply a ferrite core of ferromagnetic body to a existing ICP form. In case of power transfer equipment on 400[kHz] high frequency to generation of plasma it makes certain a stable switching operation in condition of plasma through using a inverter form for general purpose HB. And it demonstrates the performance of power transfer equipment using methods of measurement which use a transformer of series combination the density of plasma and the rate of dissolution of $NF_3$ in condition of $A_r\;and\;NF_3$.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.26 no.8
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• pp.35-41
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• 2012

As automation equipment and electronic device progresses, the importance of power quality is more increasing. This paper represents the analysis and suppression about the causes of trouble by the inverter's ON/OFF noise in plant in order to prevent damage resulting in a secondary damage to conduct precise diagnosis and effective noise reduction. The countermeasure as a reduced carrier frequency and the LC resonant filter had been applied and confirmed the effective results to solve the trouble of noise.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.145-149
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• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.