RF Power Conversional System for Environment-friendly Ferrite Core Inductively Coupled Plasma Generator |
Lee, Joung-Ho
((주)뉴파워프라즈마 기술기획팀)
Choi, Dae-Kyu ((주)뉴파워 프라즈마) Kim, Soo-Seok (서울산업대 전기공학과) Lee, Byoung-Kuk (성균관대 정보통신공학부) Won, Chung-Yuen (성균관대 정보통신공학부) |
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