• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.12
• /
• pp.13-20
• /
• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• The Journal of the Acoustical Society of Korea
• /
• v.16 no.1
• /
• pp.39-46
• /
• 1997

In this paper, the PA(PhotoAcoustic) signals excited in metals by Xef, KrF excimer laser pulse were detected by a PZT transducer, and its transforming machanism and directivity patterns were analysed. The laser energy density in irradiation spot divides the PA trasnsorming machanism to be classified into thermoelastic and plasma regime, and the transforming machanisms in two regimes are different from each other. Based on theoretical model, it is predicted that shear wave is greater than longitudinal in the thermoelastic regime and longitudinal is greater than shear wave by reaction force in plasma regime. These predictions were verified through experiments by using of the XeF excimer pulsed laser of 480nm center-wavelength and the KrF excimer pulsed laser of 248nm. Also, for its directivity pattern, an arrival angle of the maximum longitudinal energy was around $60^{\circ}$ and maximum shear energy was around $30^{\circ}$ in the thermoelastic regime, and an arrival angle of maximum longitudinal energy was shown on nomal to the surface and maximum shear energy was represented in about $30^{\circ}$ in plasma regime.

• Korean Journal of Optics and Photonics
• /
• v.7 no.4
• /
• pp.397-402
• /
• 1996

A compact excimer laser was developed with coaxial type which the one line cross flow fan is only used. At 1 kHz repetitive operation, average power of KrF laser is 56 watt. In this paper, Design parameter and CR characteristic are investigated for attainment of the compact 1 kHz excimer laser. We have obtained overall efficiency of 1.2% with KrF laser gas. At this time, CR and the variation of laser output are 2.97, $\pm$9%. Laser gas volume and active volume are 10 liter, 1.8(H)$\times$1.2(W)$\times$30(L)=64.8 ㎤, respectively.

• Proceedings of the KIEE Conference
• /
• 1990.07a
• /
• pp.462-464
• /
• 1990

We report the development of a surface discharge preionized KrF discharge Laser with a new type of high-brightness Corona preionizer using a segmented columnar $BaTiO_3$ dielectric. This Laser characteristic was higher value than that obtained with the conventional corona preionizer using a glass, $Al_2O_3ceramic$, Kapton film, or a Teflon insulator.

• Proceedings of the Optical Society of Korea Conference
• /
• 1990.02a
• /
• pp.9-12
• /
• 1990

본 연구는 KrF 엑사이머 레이저 증폭을 하기 위하여 먼저 능동매질을 N도 사용하여 발전기와 증폭기의 시간적인 동기회에 주 목적을 두었고 안정한 증폭기의 출력을 얻기 위해 방전관 에너지의 5%를 예비전리로 최적화 시켰으며 방전에 사용되는 Spark Gap Switch의 내부 인덕턴스를 고찰하였다.

• Journal of information and communication convergence engineering
• /
• v.1 no.1
• /
• pp.39-43
• /
• 2003

The technology required to advance the state of the art of ultra-high-intensity excimer amplifier construction to the 100 J/100fs output pulse level is identified. The preliminary design work for very large final amplifier pumped by electron beam module is described, and key design problems and approaches are presented and discussed in detail based on the recent experimental and theoretical results.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.2 no.4
• /
• pp.91-99
• /
• 1994

Tunable KrF Excimer Laser is used here for measuring OH and $O_2$ density distribustion in an open $H_2$/air premixed flame and in a combustion bomb. Laser Rayleigh Scattering(LRS) and Planar Laser Induced Predissociative Fluorescence(PLIPF) methods are used to obtain two-dimensional images of total and specific densities. Laser Excitation wavelengths are calibrated via flame images and combustion bomb images show good qualitative a greement with theoretical calculation. Furthermore images in a combustion bomb can be developed to study real Spark-Ignition engine combustions. Our experimental images show that there are no more collisional quenching problem at high pressure environment(including atmospheric pressure) using predissociative fluorescence technique. Further development to obtain two-dimensional temperature dustribution is ready to use eventhough it is not reported in this paper.

• Transactions of Materials Processing
• /
• v.13 no.3
• /
• pp.268-272
• /
• 2004

Transparent materials such as fused silica are widely utilized in optical and optoelectronics field because of its outstanding properties, such as transparency in a wide wavelength range, strong damage resistance for laser irradiation, and high thermal and chemical stability. In this study, we made a few micro patterns on the surface of fused silica plate using laser induced wet etching. KrF excimer laser was used as a light source. There were no burrs and micro cracks on the etched surface of fused silica and the flatness of the etched surface was fairly good. We investigated the influence of etchant upon the etch rate and quality in laser induced wet etching. Pyrene-acetone solution and toluene were used as etchant. In the side of etch rate, toluene solution was better than pyrene-acetone solution. But we made in wider range of energy density using pyrene-acetone solution. But pyrene-acetone solution gave us wider window of energy density for successful micro patterning.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2004.05a
• /
• pp.245-249
• /
• 2004

Transparent materials such as fused silica are important materials in optical and optoelectronics field because of its outstanding properties, such as transparency in a wide wavelength range, strong damage resistance for laser irradiation, and high thermal and chemical stability. However, these properties make it difficult to micromachine silica in micro-sized quantities. In this study, we fabricated a micro patterns on the surface of fused silica plate using laser induced wet etching. KrF excimer laser was used as a light source. There were no burrs and micro cracks on the etched surface of fused silica and the flatness of the etched surface was fairly good. We investigated the influence of etchant upon the etch rate and quality in laser induced wet etching. Pyrene-acetone, toluene, and pyrene-toluene solution were used as etchant. In the side of etch rate, toluene and pyrene-toluene solution were better than pyrene-acetone solution.

• Laser Solutions
• /
• v.6 no.2
• /
• pp.35-41
• /
• 2003

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.