• Title/Summary/Keyword: KrF

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Preparation of Al Cathode for OLED by Sputtering Method (스퍼터링법을 이용한 OLED용 Al 음전극 제작)

  • Keum, Min-Jong;Kim, Kyung-Hwan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.8
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    • pp.729-733
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    • 2005
  • Al electrode for OLED was deposited by FTS (Facing Targets Sputtering) system which can deposit thin films with low substrate damage. The Al thin films were deposited on the cell (LiF/EML/HTL/Bottom electrode) as a function of working gas such as Ar or Ar+kr mixed gas. Also Al thin films were prepared with working gas pressure (1, 6 mTorr). The film thickness and I-V curve of Al/cell were measured and evaluated. In the results, when Al thin films were deposited using pure Ar gas, the turn-on voltage of Al/cell was about 11 V. And using the Ar:Kr($75\%:25\%$) mixed gas, the turn-on voltage of Al/cell decreased to about 7 V.

Deposition of YBCO and STO/YBCO thin films using ArF PLD system (ArF PLD System을 사용한 YBCO 박막과 STO/YBCO 박막의 제작)

  • Jung, Tae-Bong;Jang, Ju-Euk;Kang, Joon-Hee
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.43-47
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    • 1999
  • Instead of using KrF excimer lasers( ${\lambda}$ = 248 nm) in depositing oxide thin films, as in the most of the laboratories in Korea, we have used an ArF excimer laser( ${\lambda}$ = 197 nm) which has a shorter wavelength. By using a beam which has a shorter wavelength, we could obtain higher quality and smoother surface YBCO thin films. We fabricated YBCO thin films with the various substrate temperature conditions and analyzed the characteristics of these films. We also studied the charateristics of the films fabricated under the various conditions of the power of laser and the oxygen pressure. The characterization tools used in this work were a transport measurement setup, an XRD , and a SEM. We also fabricated STO/YBCO multilayers to use in SFQ devices fabrication. XRD patterns of the multilayers showed that the multilayer films were grown epitaxially.

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LASER ABLATION OF Bi-SUBSTITUTED GADOLINIUM IRON GARNET FILMS WITH LARGE FARADAY ROTATION

  • Watanabe, N.;Tsushima, K.
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.720-725
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    • 1995
  • Bi-substituted gadolinium iron garnet films were deposited on GGG(111) and NGG (111) substrates by irradiating KrF excimer laser onto targets having compositions of $Bi_{x}Gd_{3-x}Fe_{5}O_{12}$ ($2.0{\leq}x{\leq}3.0$) under substrate temperature of $580~620^{\circ}C$. Analysis on structure, composition and angle of Faraday rotation, ${\theta}_{F}$, were carried out. The composition, the structure and the magneto-optical properties of the obtained films were found to be strongly dependent both on the compositions of the targets and on the pressure of oxygen. Before annealing in air, all films showed ${\theta}_{F}{\geq}0$ at ${\lambda}=6328{\AA}$, while several films showed ${\theta}_{F}{\leq}0$ after the annealing. The highest value of Bi-substitution up to x = 1.76 with uniform composition was obtained.

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Development of fluoride varnish with sustained fluoride release and biocompatibility (불소 지속방출 및 생체적합성을 가진 불소 바니쉬의 개발)

  • Shin, Kyung-Su;Kim, Ah-Jin;Oh, Seunghan;Bae, Ji-Myung
    • Korean Journal of Dental Materials
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    • v.44 no.1
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    • pp.21-31
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    • 2017
  • The purpose of this study was to fabricate a biocompatible fluoride varnish with sustained fluoride release, and to compare it with commercial fluoride varnishes. For the experimental fluoride varnish, bis-GMA (BG) or two types of rosin (KR-610: K0, KR-612: K2) were used as bases. Either ethyl acetate or ethanol was added as solvent and 5 wt% NaF was used. 5 mg of experimental F- varnishes and 2 commercial products, Cavity shield (CS) and Flor-opal (FO), were applied on a labial surface of bovine teeth ($10mm{\times}7mm$). The amount of fluoride release was measured at 1 hr, 2 hrs, 3 hrs, 4 hrs, 8 hrs, 12 hrs, 1 day, 3 days, 5 days, 10 days, 15 days, 20 days and 30 days. MTT test was done with diluted F- varnishes using ethanol. Statistical analysis was done with one-way ANOVA and Duncan multiple range test (${\alpha}=0.05$). BG showed the highest fluoride release at 1 hr (P<0.05), while that of K0 was highest at 2 hrs (P<0.05). From 1 day to 5 days, experimental fluoride varnishes showed higher fluoride release than the commercial products (P<0.05), and there were no significant differences after 5 days (P>0.05). For MTT test, K0 and FO showed higher cell viability than other experimental groups (P<0.05), with no significant differences with K2 (P>0.05). Considering the sustained fluoride release and cell viability of the experimental rosin-based fluoride varnishes compared with commercial products, it will be appropriate for clinical application.

Growth of oriented $LaF_{3}$ thin films on Si (100) substrates by the pulsed laser deposition method

  • Yokotani, Atsushi;Ito, Tomomi;Sato, Akiko;Kurosawa, Kou
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.4
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    • pp.157-164
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    • 2003
  • $LaF_{3}$ thin films have been fabricated on Si (100) substrates under the highest possible vacuum condition by pulsed laser deposition (PLD) method. The temperature of the sbustrate varied from $20^{\circ}C$ to $800^{\circ}C$. The films deposited at the higher temperature indicated the sharper peaks in the X-ray diffraction measurement. A highly oriented film was successfully obtained at a substrate temperature of $800^{\circ}C$. The surface observation by the AFM revealed that the many hexagonal structures constructed the film. The XPS analysis revealed that the lacking of F in the film deposited at $600^{\circ}C$ were much more than that in film at $^20{\circ}C$. Adding the adequate amount of $CF_{4}$ gas in the growth chamber can compensate this lacking of F.

웨이퍼 스텝퍼에서의 기준정렬을 위한 2차원 버니어 패턴의 성능예측

  • 이종현;장원익;최부연;장기호;김도훈;유형준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.243-248
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    • 1993
  • New methodology for fiducial alignment is proposed to improve the alignment accuracy in wafer steppers. The positioning error is detected by PSD(Position Sensitive Detector)when 2-dimensional vernier patterns on a reticle on a reticle are projected on the fiducial marks of wafer stage. The width and period of vernier patterns are deter mined to get the highest S/N ratio for the exposure wavelength 248.4nm of KrF excimer laser. This new method has an advantage of higher accuracy and faster alignment over the conventional one.

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Novel Design of Ultrashort Pulse Excimer Laser Amplifier System II (Temporal Gain Control and Phase Distortion/ASE Characteristics)

  • Lee, Young-Woo
    • Journal of information and communication convergence engineering
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    • v.1 no.4
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    • pp.228-232
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    • 2003
  • The previous design work for very large final amplifier pumped by electron beam module was described from the point of view of energy characteristics. In this work, the design problems for phase front distortion, ASE, and gain control in large aperture amplifier are presented in detail.

Four-mirror optical system for UV submicron lithography (서브미크론 리소그라피를 이한 4 반사광학계의 설계)

  • 박성찬
    • Proceedings of the Optical Society of Korea Conference
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    • 1991.06a
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    • pp.81-87
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    • 1991
  • A design of a four-mirror optical system for submicron lithography using KrF excimer laser beam(λ=248nm) is presented. By using the third order aberration theory, analytic solutions for a telecentric, flat-field, and anastigmatic four-spherical-mirror system (reduction magnification 5$\times$) are found. Aspherization is carried out to the spherical mirror surfaces in order to reduce the residual higher order aberrations and vignetting effect. Finally we obtain a reflection system useful in submicron lithographic application.

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Study on the Application of Exicimer Laser(1) (엑사이머 레이저 응용 기술에 관한 연구(I))

  • Hwang, Gyeong-Hyeon;Yun, Gyeong-Gu;Lee, Seong-Guk;Kuzmichov, A.V.
    • 연구논문집
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    • s.25
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    • pp.115-120
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    • 1995
  • The aim of this project is the development of technology of production of micro mechanical parts. Materials are Cr, pt or film (thickness $1000-3000\AA$) on glass substrate. Method of manufacturing is resistless direct laser ablation based on the projection technology. A source of radiation is KrF excimer laser(248nm), Experiments of threshold energy are carried out and the results are analyzed by SEM.

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회원사 탐방 - 첨단 지능형 자동차 안전시스템용 카메라 렌즈 시장 선도 - (주)위오(WEEO CO., LTD.) -

  • 한국광학기기협회
    • The Optical Journal
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    • s.125
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    • pp.41-43
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    • 2010
  • (주)위오(대표 서동수, www.weeo.co.kr)는 1998년 비디오 도어폰용 카메라 렌즈 제조 전문업체인 M.F. 전광(주)의 자회사로 2003년 1 월 9일 납입자본금 5천만원과 첨단 지능형 자동차 안전시스템용 카메라 렌즈 개발 및 해외 판매 법인으로 출발했다. 2명으로 출발한 직원이 현재 30여명에 이르며 매출 30억원의 내실있는 중소기업으로 발돋움한 이 회사는 2010년 경인년(庚寅年)을 제2 도약의 원년으로 설정하고 2015년까지 첨단 자동차 부품 선도업체로의 도약을 준비하고 있다.

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