• Title/Summary/Keyword: KrF

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Technology Trends for Photoresist and Research on Photo Acid Generator for Chemical Amplified Photoresist (포토 레지스트의 기술 동향과 화학 증폭형 포토레지스트에서의 광산 발생제의 연구)

  • Kim, Sung-Hoon;Kim, Sang-Tae
    • Journal of Integrative Natural Science
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    • v.2 no.4
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    • pp.252-264
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    • 2009
  • Lithographic data obtained from PHS(polyhydroxy styrene) having various functionalities were investigated by using a photoacid generator based on diazo and onium type. Chemically amplified photoresist based on the KrF type photoresist was developed by using a photoacid generator and multi-functional resin. Thermal stability for the photoacid generator showed that the increase of loading amount of photoacid generator resulted in the decrease of glass transintion temperature (Tg). The photoacid generators having methyl, ethyl, or propyl group in their cationic structure produced T-top structure in pattern profile due to the effect of acid diffusion during the generation of acid in the resist. The increase of carbon chain length in the anionic structure of photoacid generators resulted in lower pattern resolution due to the interruption of acid diffusion.

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Study of atmosphere parameters of the IVV-2M reactor hall

  • M.E. Vasyanovich;M.V. Zhukovsky;E.I. Nazarov;I.M. Russkikh
    • Nuclear Engineering and Technology
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    • v.55 no.11
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    • pp.3935-3939
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    • 2023
  • The paper presents the results of a study of radioactive noble gases and from decay products in the atmosphere of the reactor hall of the research nuclear reactor IVV-2M. The distribution of short-lived 88Rb and 138Cs activity by sizes of aerosol particles was measured in the range of 0.5-1000 nm. It is shown that radioactive aerosols are characterized by three main modes with AMTD 2-3 nm, 7-15 nm and 400 nm. About 70% of aerosol activity is due to 88Rb. The equilibrium factor between 88Kr and 88Rb is 0.2 ± 0.1. The total concentration of aerosols particles was measured using an aerosol diffusion spectrometer. The value of unattached fraction of radioactive aerosols in the atmosphere of reactor hall IVV2M was f = 0.15-0.25 at the average total aerosol particles concentration from 20,000 cm3 to 53,000 cm3.

Stiffness Analysis of a Low-DOF Parallel Manipulator including the Elastic Deformations of Both Joints and Links (ICCAS 2005)

  • Kim, Han-Sung;Shin, Chang-Rok;Kyung, Jin-Ho;Ha, Young-Ho;Yu, Han-Sik;Shim, Poong-Soo
    • 제어로봇시스템학회:학술대회논문집
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    • 2005.06a
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    • pp.631-637
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    • 2005
  • This paper presents a stiffness analysis method for a low-DOF parallel manipulator, which takes into account of elastic deformations of joints and links. A low-DOF parallel manipulator is defined as a spatial parallel manipulator which has less than six degrees of freedom. Differently from the case of a 6-DOF parallel manipulator, the serial chains in a low-DOF parallel manipulator are subject to constraint forces as well as actuation forces. The reaction forces due to actuations and constraints in each limb can be determined by making use of the theory of reciprocal screws. It is shown that the stiffness model of an F-DOF parallel manipulator consists of F springs related to the reciprocal screws of actuations and 6-F springs related to the reciprocal screws of constraints, which connect the moving platform to the fixed base in parallel. The $6{times}6$ stiffness matrix is derived, which is the sum of the stiffness matrices of actuations and constraints. The six spring constants can be precisely determined by modeling the compliance of joints and links in a serial chain as follows; the link can be considered as an Euler beam and the stiffness matrix of rotational or prismatic joint can be modeled as a $6{times}6$ diagonal matrix, where one diagonal element about the rotation axis or along the sliding direction is zero. By summing the elastic deformations in joints and links, the compliance matrix of a serial chain is obtained. Finally, applying the reciprocal screws to the compliance matrix of a serial chain, the compliance values of springs can be determined. As an example of explaining the procedure, the stiffness of the Tricept parallel manipulator has been analyzed.

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Sequence analysis of the fusion protein gene of Newcastle disease virus isolated from breeder ducks in Korea

  • Han, Mi Na;Byeon, Hyeon Seop;Lee, Cho Yeon;Jo, Nam Sin;Lee, Jong Hwa;Jang, Rae Hoon;Kim, Chang Seop;Na, Ki Jeong
    • Korean Journal of Veterinary Service
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    • v.42 no.4
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    • pp.245-250
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    • 2019
  • Newcastle disease (ND) is an infectious poultry disease that caused high mortality and reduced egg production. NDVs are regularly present in the domestic duck population. And ducks play a possible role in the maintenance and transmission of NDVs. While we were monitoring the Avian Influenza, NDVs were isolated from field samples by accident. So we analysed the biological and genetic characteristics of these viruses. Lentogenic NDVs were isolated from two farms among twenty breeder duck farms. The ages of ducks were 39 weeks old in the 'A' farm and 3~72 weeks old in the 'B' farm. And they were not inoculated with the NDVs vaccine. In the biological characteristics, the both viruses which separated from the farm 'A' and 'B' were thermostable. The amino acid sequence of a site from 112 to 119 in the fusion (F) protein was 'GKQGRLIG' which has monobasic motif in the samples of both farms. And this means the separated NDVs are lentogenic. Phylogenetic analysis was performed by entire nucleotide sequence of F protein. The virus strains from the A farm (MN095239) and the B farm (MN095240) belonged to class II genotype I. Using the analysis of whole F protein nucleic acid sequence, the MN095239 (GenBank) had homology with Ulster strain about 99.95% and the MN095239 (GenBank) had homology with KR/CK/KU_LBM255/09 strain about 99.89%. NDV surveillance is needed to investigate epidemiological relationship of domestic breeder duck isolates in Korea.

Evaluation of the genotoxicity and cytotoxicity in the buccal epithelial cells of patients undergoing orthodontic treatment with three light-cured bonding composites by using micronucleus testing

  • Toy, Ebubekir;Yuksel, Sengul;Ozturk, Firat;Karatas, Orhan Hakki;Yalcin, Muhammet
    • The korean journal of orthodontics
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    • v.44 no.3
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    • pp.128-135
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    • 2014
  • Objective: This study evaluated the cytotoxicity and genotoxicity of fixed orthodontic treatment with three different light-cured orthodontic bonding composites by analyzing micronucleus (MN) formation in the buccal mucosa during a 6-month period. Methods: Thirty healthy volunteers were selected from consecutive patients referred for orthodontic treatment. Equilibrium 2 brackets and molar tubes (Dentaurum) were bonded with three different lightcured orthodontic bonding composites-Transbond XT (3M Unitek), Kurasper F (Kuraray Europe), or GrenGloo (Ormco Corporation)- to all teeth in both arches. Exfoliated buccal epithelial cells were scraped from the middle part of the inner cheeks with sterile cement spatulas before treatment and at 1, 3, and 6 months after treatment. MNs and nuclear alterations, such as karyorrhexis (KR), karyolysis (KL), and binucleated cells (BNs), were scored under a light microscope. Repeated measure ANOVA was used to calculate statistical differences in degenerative nuclear abnormalities. Results: MN rates did not significantly differ among different time points within the same cell type (p > 0.05). In contrast, the number of BNs in buccal epithelial cells significantly increased in all composite groups (p < 0.01, Transbond XT; p < 0.001, Kurasper F and GrenGloo). KL frequency significantly increased between the beginning and end of the study in the Kurasfer F ($0.80{\pm}0.79$ to $1.90{\pm}1.10$; p < 0.05) and GrenGloo ($1.30{\pm}1.06$ to $2.40{\pm}1.08$; p < 0.05) groups. Conclusions: After 6 months of fixed orthodontic treatment with different light-cured composites, morphological signs of cytotoxicity were observed but genotoxic effects were absent.

The superconductivity and pinning properties of Y2O3-doped GdBa2Cu3O7-δ films prepared by pulsed laser deposition

  • Oh, Won-Jae;Park, Insung;Yoo, Sang-Im
    • Progress in Superconductivity and Cryogenics
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    • v.20 no.4
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    • pp.41-45
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    • 2018
  • We have investigated the effect of $Y_2O_3$ nanoparticles on the pinning properties of $Y_2O_3$-doped $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) films. Both undoped and $Y_2O_3$-doped GdBCO films were grown on $CeO_2$-buffered MgO (100) single crystal substrates by pulsed laser deposition (PLD) using KrF (${\lambda}=248nm$) laser. The $Y_2O_3$ doping contents were controlled up to ~ 2.5 area% by varying the internal angles of $Y_2O_3$ sectors put on the top surface of GdBCO target. Compared with the $Gd_2O_3$-doped GdBCO films previously reported by our group [1], the $Y_2O_3$-doped GdBCO films exhibited less severe critical temperature ($T_c$) drop and thus slightly enhanced critical current densities ($J_c$) and pinning force densities ($F_p$) at 65 K for the applied field parallel to the c-axis of the GdBCO matrix (B//c) with increasing the doping content. Below 40 K, the in-field $J_c$ and $F_p$ values of all $Y_2O_3$-doped GdBCO films exhibited higher than those of undoped GdBCO film, suggesting that $Y_2O_3$ inclusions might act as effective pinning centers.

Magnetic Properties of Heteroepitaxial $Y_{3}Fe_{5)O_{12}$ Films Grown by a Pulsed Laser Ablation Technique (펄스 레이저 증착기술에 의한 $Y_{3}Fe_{5)O_{12}$ 에피택셜 박막제조)

  • Yang, C.J.;Kim, S.W.
    • Journal of the Korean Magnetics Society
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    • v.5 no.2
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    • pp.128-133
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    • 1995
  • Yttrium Iron Garnet($Y_{3}Fe_{5)O_{12}$) films have been succsssfully grown on(111)GGG wafer by KrF excimer laser ablation of stoichiometric garnet target at the oxygen partial pressure, $P(O_{2}$, ranging 20 to 500 mTorr. During the deposition of the films the substrate temperature was maintained at $700^{\circ}C$ and the laser beam energy density at $7.75\;J/cm_{2}$. Microstructure, composition and magnetic properties of the films obtained were investigated as a function of oxygen pressure and thickness of the films. Epitaxial films with a dense and a smooth surface were reproducible at a low oxygen pressure. The films of $2.75\;{\mu}$ min thickness deposited at 20 mTorr of $P(O_{2})$ showed $4{\pi}M_{s}$ of 1500 Gauss and $H_{c}$ of 3 Oe after annealing at $800\;^{\circ}C$ for 20 minutes. As-deposited films of $0.8\;\mu\textrm{m}$ in thickness exhibited the $4{\pi}M_{s}$ of 1730 Gauss and $H_{c}$ of 7 Oe. The magnetic properties of the films obtained were almost identical to those of a single crystal YIG.

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Surface properties on ion beam irradiated polycarbonate (이온주입에 의한 폴리카보네이트의 표면특성 조사)

  • Lee, Jae-Hyung;Yang, Dae-Jeong;Kil, Jae-Kyun;Kim, Bo-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.31-35
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    • 2003
  • 폴리카보네이트는 내열성과 투명성이 우수한데 비해 내후성이 좋지 않아 황변 및 물성이 저하되고, 내찰상성이 약하여 긁히기 쉬운데다 이물질에 의해 오염되기 쉬워 투명성이 저하되는 문제점이 있다. 이러한 단점을 극복하고, 사용하는 용도에 따라 요구되는 다양한 기능성을 부여하기 위하여 폴리카보네이트 표면에 기능성층을 형성시킴으로써 그 목적을 달성하고자 한다. 본 논문에서는 이온 주입기술을 이용하여, 폴리카보네이트 표면의 전기전도도 특성을 향상시키고, 피부암 및 백내장 등을 유발하는 유해한 자외선 (UV-A, UV-B)을 차단하려 한다. 표면전기전도도의 향상은 이물질로부터 오염되는 정도를 낮추며, 정전기를 방지할 수 있다. PC(Polycarbonate) 표면에 $N^+,\;Ar^+,\;Kr^+,\;Xe^+$ 이온을 에너지 20keV에서 50keV을 사용하여, 주입량 $5{\times}10^{15}\;{\sim}\7{\times}10^{16}\cm^2$ 로 조사하였다. 이온 주입된 PC의 표면을 두 접점 방법의 표면 저항 측정으로 표면전기전도도 특성을 알아보았고, 자외선차단 특성은 UV-Vis 로 분석하였다. 이들 전기적 광학적 특성간의 상관관계를 관찰하고, 이러한 특성을 나타내는 화학적 기능그룹들의 변화를 보기 위해 FTIR 분석법으로 관찰하였다. 이온조사량의 증가에 따라 표면저항은 $10^7{\Omega}/sq$까지 감소하여 표면전기특성을 증가시키며, 자외선 차단 특성은 UV-A를 95%까지 차단하여 인체에 유해한 자외선 차단에 유용함을 확인하였다. 이러한 특성은 PC 표면에 카본 네트워크 형성과 $\pi$전자들의 운동량을 증가시키는 구조로 고분자 사슬들의 결합구조 변형에 의한 것으로 생각된다.블을 가지고 파서를 설계하였다. 파서의 출력으로 AST가 생성되면 번역기는 AST를 탐색하면서 의미적으로 동등한 MSIL 코드를 생성하도록 시스템을 컴파일러 기법을 이용하여 모듈별로 구성하였다.적용하였다.n rate compared with conventional face recognition algorithms. 아니라 실내에서도 발생하고 있었다. 정량한 8개 화합물 각각과 총 휘발성 유기화합물의 스피어만 상관계수는 벤젠을 제외하고는 모두 유의하였다. 이중 톨루엔과 크실렌은 총 휘발성 유기화합물과 좋은 상관성 (톨루엔 0.76, 크실렌, 0.87)을 나타내었다. 이 연구는 톨루엔과 크실렌이 총 휘발성 유기화합물의 좋은 지표를 사용될 있고, 톨루엔, 에틸벤젠, 크실렌 등 많은 휘발성 유기화합물의 발생원은 실외뿐 아니라 실내에도 있음을 나타내고 있다.>10)의 $[^{18}F]F_2$를 얻었다. 결론: $^{18}O(p,n)^{18}F$ 핵반응을 이용하여 친전자성 방사성동위원소 $[^{18}F]F_2$를 생산하였다. 표적 챔버는 알루미늄으로 제작하였으며 본 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으

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Fabrication of Fluorinated Polymeric Membranes and Their Noble Gas Separation Properties (불소 표면 개질 고분자 분리막의 제조와 노블가스 분리특성)

  • Kim, Gi-Bum;Yoon, Kuk-Ro
    • Applied Chemistry for Engineering
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    • v.21 no.4
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    • pp.475-478
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    • 2010
  • Fluorinated polymeric membranes were prepared by direct surface modification of PDMS with fluorine gas ($50{\sim}2000\;{\mu}mol/mol$ in nitrogen). The formed fluorinated polymeric membranes were characterized by FT-IR spectroscopy, GC (Gas chromatography), atomic force microscopy, and scanning electron microscopy. Direct fluorination resulted in the change of permeability and selectivity of various gases (pure gases such as $CO_2$, $O_2$, $N_2$, $C_2H_4$, mixture of He, Ne, Kr, Xe) through PDMS membranes. Fluorination resulted in the maximum 50% increase of selectivity through PDMS membrane.

Stability of hydrophobic properties of plasma polymerized tetrakis(trimethylsilyloxy)silane film surface

  • Jang, Jinsub;Woo, Sungmin;Ban, Wonjin;Nam, Jaehyun;Lee, Yeji;Choi, Woo Seok;Jung, Donggeun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.147.1-147.1
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    • 2016
  • Hydrophobic thin films are variously applicable for encapsulation of organic devices and water repulsive glass, etc. In this work, the stability of hydrophobic characteristics of plasma polymerized tetrakis (trimethylsilyloxy) silane (ppTTMSS) thin films were investigated. The films were deposited with plasma enhanced chemical vapor deposition (PECVD) on the glass. The deposition plasma power and deposition pressure was 70 W and 600 mTorr, respectively. Thereafter, deposited films were treated by 248nm KrF excimer laser. Stability of hydrophobic properties of plasma polymerized tetrakis(trimethylsilyloxy)silane film surface was tested by excimer laser irradiation, which is thought to simulate severe outdoor conditions. Excimer laser irradiation cycles changed from 10 to 200 cycles. The chemical structure and hydrophobicity of ppTTMSS films were analyzed by using Fourier transform infrared (FTIR) spectroscopy and water contact angle (WCA) measurement, respectively. Absorption spectra peaks and WCA of excimer laser treated ppTTMSS films did not change notably. These results show that our ppTTMSS films possess stable hydrophobic properties.

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