• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.158-165
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• 2006

Lithography 장비의 국내 기술개발 수준은 선진사에 비해 많이 뒤져있다고 볼 수 있다. 최근 디스플레이 산업의 폭발적인 성장과 더불어 보다 확실하고 안정적인 생산을 위해서는 Lithography 장비의 국산화 기술개발이 시급한 상황이다. 현재 시중에 나와 있는 제품의 경우 Mask holder part의 과도한 중량으로 인해 교체의 어려움이 있고 그로 인해 장비의 자동화에 걸림돌이 되고 있는 상황이다. 이에 따라 Mask holder part의 교체를 양호하게 하기 위해 질량을 줄이고 처짐이 적게 발생할 수 있도록 형상을 최적화 시키는 것에 목적을 두고 실험계획법 중의 하나인 Taguchi method를 활용하여 Mask holder part의 형상을 최적화하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.314-317
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• 2006

Electroformed part is widely used in modem manufacturing industries, especially semi-conductor division. It is basically a specialized form of electroplating. So, it has very similar parameters with electroplating. The object of this study is development of the fine metal mask by electroforming process. In this paper considered two parameters. The first is relationship of UV exposure and soft baking time. The other one is thickness uniformity of electroformed parts by distance of between electrodes. This paper presents the fabrication method of fine metal mask by electroforming process.

• Journal of the korean academy of Pediatric Dentistry
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• v.23 no.3
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• pp.736-745
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• 1996

The conventional treatment of skeletal Class III malocclusion has been focused on application of orthopedic force primarily to the mandible. However, In Class III malocclusion with retrograde position or underdevelopment of Maxilla, this approach is not suitable treatment. These patients need an application of orthopedic forces via face-mask to the Maxilla to stimulate its growth and to change the direction of growth. In skeletal Class III patients who were treated by Face-Mask, the following results were obtained. 1. Forward growth of Maxilla was enhanced. 2. Labioversion of upper incisors and linguoversion of lower incisors were observed. 3. Mandible was rotated to clockwise direction and remodeling of B point was observed. 4. Anterior crossbite was corrected by combining of the above results.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.1
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• pp.55-62
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• 2004

This paper addresses the method for figuring out the hole diameter on the mask containing the information about machining depth. With this mask e micro machining is carried out with a simple 2D movement of the mask. Based on e suggested method excimer laser ablation processes are modeled and determination of the optimal laser ablation conditions such as hole diameter, step size, mask movement velocity, etc. is completed. The excimer laser ablation simulation for creating 3D micro lens is carried out by employing determined ablation conditions to prove verification of the method. The results from simulation illustrated the average error of 140nm and e relative error of 2％.

• Journal of Korean Vacuum Science & Technology
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• v.1 no.1
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• pp.1-12
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• 1997

A new three-dimensional (3D) Monte Carlo ion implantation simulator, TRICSI, has been developed to investigate 3D mask effects in the typical mask structure for ion implantation into crystalline silicon. We present the mask corner and mask size effects of implanted boron range profiles, and also show the calculated damage distributions by applying the modified Kinchin-Pease equation in the single-crystal silicon target. The simulator calculates accurately and efficiently the implanted-boron range profiles under the relatively large implanted area, using a newly developed search algorithm for the collision partner in the single-crystal silicon. All of the typical implant parameters such as dose, tilt and rotation angles, in addition to energy can be used for the 3D simulation of ion implantation.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.24 no.10A
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• pp.1603-1610
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• 1999

본 논문은 CMOS의 latch-up 특성을 개선하기 위한 효과적인 mask 설계 방법에 관한 것이다. Mask의 평면구조와 latch-up 파라메타와의 상관관계를 실물 제작에 의한 실험과 컴퓨터 시뮬레이션에 의해 도출하였으며, guard ring의 효과에 대해서도 비교 분석하였다. 실험 결과, 수평구조 바이폴라 트랜지스터의 전류증폭률($\beta$n)이 디자인룰에 반비례하였으며, 수직구조 바이폴라 트랜지스터의 전류증폭률($\beta$n)은 디지인룰과 무관하였다. 스위칭전압과 유지전류는 디자인룰에 비례하였다. Guard ring은 latch-up의 가능성을 줄이는 데 상당한 효과가 있었음이 확인되었으며, Guard ring이 없는 경우에 비하여 전류증폭률의 곱($\beta$n$\beta$n)이 약 31% 감소, 유지전류는 약 25%가 향상됨을 확인하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.318-321
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• 2005

FIB (Focused ion Beam) milling on a 500-nm-thick silicon nitride membrane was studied in order to fabricate a high-resolution shadow mask, or called a nanostencil. The silicon nitride membrane was fabricated by MEMS processes of LPCVD, photolithography, ICP etching and bulk silicon etching. The apertures made by FIB milling and normal photolithography were compared. The square metal pattern deposited through FIB milled shadow mask showed 6 times smaller comer radius than the case of photolithography. The results show high resolution patterning could be achieved by local deposition through FIB milled shadow-mask.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.4
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• pp.1202-1215
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• 1996

In this study, in order to achieve the uniformity of mechanical properties and microstructures of a hot-rolled coil in the transversal direction, the edge mask device is newly device is newly developed and installed at the upper laminar-flow cooling head in the run out table, which controls the transversal temperature of strip with enco panel and bar edge heater. The device that is transversally movable prevents the temperature drop of strip edge by blocking the cooling water into the strip edge. So, the pattern of edge mask set-up condition of the device was derived by analyzing the characteristics of strip temperature and mechanical properties according to the on-line application of edge mask.

• (The) Research of the performance art and culture
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• no.22
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• pp.5-43
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• 2011

Before the Korean War, Korean mask dramas had been performed as parts of seasonal customs and had been passed down in connection with various seasonal events, such as village rites, tug of war, torch fighting, Jisinbabgi(stepping on evil spirits), Gilnori, and Sattonoreum. However, after the Korean War, the dramas were played independently regardless of those seasonal events; thus, they have lost their original functions and meanings. After the Korean War, the lion dance in the Bukcheong lion mask play included two lions (as opposed to one lion prior to the Korean War) and the Aeonesung and Sadang dances were added. The scene in which a lion eats a child changed to a lion eating a rabbit doll. Furthermore, whereas mask types used to be diverse, they are now standardized to one type of lion mask. In the Yangju Byulsandae-nori, eight monks and Waejangnye, Aesadang appeared in 'Aesadang Bubgonori', but now the Malddugi mask character is added. Current performances omit sexually suggestive scenes. In the pre-Korean War version of the old man and old woman act, the old man sang a song to the soul of the dead woman, but now a shaman appears and performs an exorcism. In the dialogues, vulgar and sexual statements have been shortened as many audience members are women and children. Regarding the appearance of the masks, the lotus leaf, the monk with Scabies, and sannim masks have been significantly changed. Bongsantalchum has also changed, especially in the old monk act. Previously, two Somu used to appear whereas now only one appears. The scene of the shoe seller's and the monkey's departure is also different. Furthermore, while the former masks once had big eye holes on each side of the nose, now the masks have smaller holes on the eyes.

• The Journal of Korean Society for Radiation Therapy
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• v.24 no.2
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• pp.175-181
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• 2012

Purpose: This study aimed to analyze the influence of aquaplastic mask which is used for the radiotherapy for patients with head and neck cancer on patient positioning by analyzing the results of 2D/2D matching with the use of Exactrac 6D couch system. Materials and Methods: 2D/2D matching-based Image guidance was performed with the use of Exactrac 6D couch system on a total of 14 patients with head and neck cancer who received radiotherapy at this hospital in a period from June 2010 to June 2011. The adjusted 6D values obtained after the image guidance were classified into values related with patients and values not related with patients as to the correlation between the results. Results: In the analysis of the relation of each adjusted value to patients, the coefficient of determination ($R^2$) of longitudinal and pitch direction was 0.76, of longitudinal and yaw direction was 0.48, and of pitch and yaw direction was 0.42 although the coefficient of determination for above factors was 0.03 or less when the dependency of patients was excluded. Conclusion: It was demonstrated that intrinsic factors of aquaplastic mask had influence on the immobilization of patients by aquaplastic mask although various factors related with patients had influence on the immobilization of patients. It is believed that if these factors are adjusted, the treatment of patients with head and neck cancer can be more accurate.