• 산업기술연구
• /
• 제15권
• /
• pp.203-208
• /
• 1995

This paper suggests the three dimensional steady state searching techniques of hard disk/head system, which has some skew angle with flexure. In order to analyze the steady state behaviors of magnetic head slider, the localized Knudsen number and the localized bearing numbers are sued. For finding the steady state of magnetic head slider under the pre-loaded condition, I proposed multi-dimensional Newton-Raphson method which traces the equilibrium position of magnetic head slider, which has 3-degrees of freedom, using Jacobian matrix. The multi-dimensional Newton-Raphson method is very efficient technique for finding the steady state position of magnetic head slider because it approaches to the equilibrium position with changing three parameters simultaneously.

• 한국공작기계학회논문집
• /
• 제17권2호
• /
• pp.45-50
• /
• 2008

Molecular flows inside a guide block in the OLED(organic luminescent emitting device) deposition process have been simulated using DSMC(direct simulation Monte Carlo) method. Because the organic materials are evaporated under vacuum, molecules flow at a high Knudsen number of the free molecular regime, where the continuum mechanics is not valid. A guide block is designed as a part of the linear cell source to transport the evaporated materials to a deposition chamber, When solving the flows, the inlet boundary condition is proved to affect significantly the whole flow pattern. Thus, it is proposed that the pressure should be specified at the inlet. From the analysis of the density distributions at the nozzle exit of the guide block, it is shown that the longer nozzle can emit molecules more straightly. Finally, a nondimensionalized mass flow profile is obtained by numerical experiments, where various nozzle widths and inlet pressures are tested.

• 대한기계학회논문집B
• /
• 제26권10호
• /
• pp.1406-1418
• /
• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• 대한기계학회논문집B
• /
• 제26권4호
• /
• pp.587-593
• /
• 2002

The present research proposes a pressure based approach along with Langmuir slip condition for predicting microscale fluid flows. Using this method, gaseous slip flows in 2 -dimensional microchannels are numerically investigated. Compared to the DSMC simulation, statistical errors could be avoided and computing time is much less than that of the aforementioned molecular approach. Maxwell slip boundary condition is also studied in this research. These two slip conditions give similar results except for the pressure nonlinearity at high Knudsen number regime. However, Langmuir slip condition seems to be more promising because this does not need to calculate the streamwise velocity gradient accurately and to calibrate the empirical accommodation coefficient. The simulation results show that the proposed method using Langmuir slip condition is an effective tool for predicting compressibility and rarefaction in microscale slip flows.

• 대한기계학회논문집B
• /
• 제30권1호
• /
• pp.1-7
• /
• 2006

The characteristics of micro gaseous flows in microchannels have been analyzed in view of flow resistance using the direct simulation Monte Carlo (DSMC) method which is a molecule-based numerical modeling technique. For this purpose, a DSMC code where the pressure boundary condition was specified at the inlet and outlet, has been developed and the results of simulations showed satisfactory agreements with the analytic solution in the slip flow regime. (0.01 < Kn < 0.1) By varying the height and length of the microchannel, the effect of pressure difference between the inlet and outlet was examined. The present computation indicates that the curvature in pressure distribution along the channel increases due to the effect of compressibility when the pressure difference increases. To obtain the flow resistance regardless of the channel dimensions, a standard curve is devised in the present study by introducing the concept of unit mass flowrate and unit driving pressure force. From this curve, it is shown that in micro flows, a significant deviation from the laminar incompressible flow occurs by reducing the flow resistance.

• 대한기계학회논문집B
• /
• 제24권6호
• /
• pp.860-869
• /
• 2000

Numerical and experimental investigations are performed for the molecular transition and slip flows in pumping channels of a disk-type drag pump. The flow occurring in the pumping channel develops from the molecular transition to the slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic approach through the use of the direct simulation Monte Carlo method. In the experimental study, the inlet pressures are measured for various outlet pressures in the range of 0.1{\sim}4Torr. From the present study, the numerical results of predicting the performance, obtained by both methods, agree well with the experimental data for the range of Knudsen number $Kn{\leq}0.1$ (i.e., the slip flow regime). But the results from the second method only agree with the experimental data for Kn>0.1(i.e., the molecular transition regime)

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
• /
• pp.25-29
• /
• 2007

마이크로 인공위성의 자세제어를 위한 마이크로 추진장치에 대한 연구는 대부분 기존의 추진장치를 소형화하는 방향으로 진행되고 있다. 본 연구에서는 이러한 미소추력 발생을 위한 노즐의 소형화로 인한 점성손실, 배압에 의한 손실 등을 대기압실험, 진공환경실험, CFD 해석을 통하여 검증하였다. 또한 마이크로 노즐에서의 유동 손실을 극복하기 위한 방법으로 열적발산원리에 대해 이론적 접근을 시도하였다. 마이크로 추진장치에 적용을 위한 열적발산원리는 움직이는 부품 없이 오직 온도 구배만으로 유동을 제어할 수 있기 때문에 추진장치의 소형화로 야기되는 손실을 극복할 수 있을 것으로 기대된다.

• 한국표면공학회지
• /
• 제52권6호
• /
• pp.357-363
• /
• 2019

We investigated a synthesis yield and diameter distribution of single-walled carbon nanotubes (SWNTs) with respect to the growth position in a horizontal chemical vapor deposition (CVD) chamber. Thin films and line-patterned Fe films (0.1 nm thickness) were prepared onto ST-cut quartz substrates as catalyst to compare the growth behavior. The line-patterned samples showed higher growth density and parallel alignment than those of the thin film catalyst samples. In addition, line density of the aligned SWNTs at central region of the chamber was 7.7 tubes/㎛ and increased to 13.9 tubes/㎛ at rear region of the CVD chamber. We expect that the enhanced amount of thermally decomposed feedstock gas may contribute to the growth yield enhancement at the rear region. In addition, the lamina flow in the chamber also contribute to the perfect alignment of the SWNTs based on the value of gas velocity, Reynold number, and Knudsen coefficient we employed.

• 멤브레인
• /
• 제25권2호
• /
• pp.123-131
• /
• 2015

PTMSP와 PDMS로부터 합성된 PTMSP/PDMS 그라프트 공중합체에 다공성 borosilicate를 0~5 wt% 첨가하여 PTMSP/PDMS-borosilicate 복합막을 제조하였다. 합성된 PTMSP/PDMS 그라프트 공중합체의 수평균분자량(${\bar{M}}_n$)은 460,000이었고, 중량평균분자량(${\bar{M}}_w$)은 570,000이었으며, 유리전이온도($T_g$)는 $33.53^{\circ}C$에서 나타났다. TGA 측정에 의하면 PTMSP/PDMS에 borosilicate가 첨가되면 복합막의 감량이 작아지고 감량이 완결되는 온도도 낮아졌다. SEM측정에 의하면 PTMSP/PDMS-borosilicate 복합막 내에 들어있는 borosilicate는 $1{\sim}5{\mu}m$ 크기로 분산되어 있었다. 기체투과 실험에 의하면 PTMSP/PDMS-borosilicate가 첨가되면서 자유부피, 공동, 기공률이 증가하여 기체투과가 용해확산에 의한 것보다 분자체거름, 표면확산, Knudsen 확산에 의해 일어나는 경우가 점차 증가하여 $H_2$와 $N_2$의 투과도는 증가하고 선택도($H_2/N_2$)는 감소하였다.

• 한국추진공학회지
• /
• 제17권3호
• /
• pp.37-46
• /
• 2013

최근, micro shock tube는 Micro combustion, Micro propulsion, Particle delivery systems 등과 같은 다양한 공학응용분야에서 사용 되고 있다. Micro shock tube 에서 일어나는 유동 특성은 아주 작은 레이놀즈수 와 높은 누센수의 영향으로 인해 잘 알려진 기존의 macro shock tube 유동 특성과 상당한 차이가 나타난다. 또한 기존의 많은 shock tube의 순간적 과정으로 간주되는 격막파막 과정은 micro shock tube의 격막 근처의 유동장과 충격파 형성을 결정하는 중요한 요인이 될 것이다. 본 논문에서는 micro shock tube를 모사하기 위해 축 대칭, Maxwell's 슬립속도 조건과 온도 변화 경계 조건을 적용하여 수치 해석을 수행 하였다. 또한 유동장과 충격파 형성에 대한 유한 파막 과정의 영향을 자세히 조사 하였고, 결과로부터 충격파 강도는 micro shock tube를 통해 전파됨에 따라 급격히 감소하였다.