• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.485-485
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• 2009

Double side polishing process has been used for various industrial applications, such as polishing of semiconductor substrates and flat panel display glasses. In wafer manufacturing, double side polishing process is applied to improve wafer flatness and to minimize particle generation from wafers in device manufacturing processes, which is recognized as one of the most important processes. Whereas the kinematical modeling and analysis results of single side polishing, extensively used for chemical-mechanical polishing (CMP) in device manufacturing, are well investigated, the studies in conjunction with double side polishing are barely carried out, due to the complication of polishing system and the uncertainty of wafer motion in the carrier. This paper suggests the derivation of kinematical model with consideration of carrier and wafer motion in double side polishing, and then presents the effect of kinematical parameters on material removal amount and its non-uniformity. The kinematical analysis results help to understand the double side polishing process and to control the polishing results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.35-36
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• 2008

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.7
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• pp.865-874
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• 2016

This research is concerned with the experimental investigation on the vibrations of a flexible two-link system for verifying the theoretical result from simplified equations of motion for the system along with the kinematical synthesis are proposed to simulate the elastic vibrations of a previous study. The structure consists of flexible two-links; The link 2 is attached to the end of the link 1. The link 1 is made of composite fiber reinforced polymer and the link 2 is an aluminum beam. In order to verify the theoretical result, a flexible two-link system operated by the AC and RC servo motors was constructed. Experimental results show that the dynamic modeling approach and the kinematical synthesis proposed in this paper are effective.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.8
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• pp.642-653
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• 2008

In this paper, we propose a 3-D finite element (FE) analysis model with combined physical behavior and kinematical impact factors for evaluation of residual stress in multi-impact shot peening. The FE model considers both physical behavior of material and characteristics of kinematical impact. The physical parameters include elastic-plastic FE modeling of shot ball, material damping coefficient, dynamic friction coefficient. The kinematical parameters include impact velocity and diameter of shot ball. Multi-impact FE model consists of 3-D symmetry-cell. We can describe a certain repeated area of peened specimen under equibiaxial residual stress by the cell. With the cell model, we investigate the FE peening coverage, dependency on the impact sequence, effect of repeated cycle. The proposed FE model provides converged and unique solution of surface stress, maximum compressive residual stress and deformation depth at four impact positions. Further, in contrast to the rigid and elastic shots, plastically deformable shot produces residual stresses closer to experimental solutions by X-ray diffraction. Consequently, it is confirmed that the FE model with peening factors and plastic shot is valid for multi-shot peening analyses.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.5
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• pp.46-56
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• 1995

As demands on the precision bevel gears are increased in the related industry, the exact kinematical investigations of a pair of spherical involute bevel gears are required for the computer aided design. The exact angular velocity ratio based on the characteristics of the spherical involute tooth is derived and verified from the relationship between rotational angles. Elementary kinematics of the gearsets is investigated by applying the transformation of the coordinate systems. The tooth contact lines based on logarithmic tooth-wise curve are examines in three dimentional space. Contact ratio is formulated and simulated according to the system parameters such as shaft angles, pressure angle, and spiral angles. The condition of teeth interference is dervied and the critical numbers of gear teeth are calculated. The whole surface geometry of a spiral bevel gearsets are discretized and visualized by a computer graphic tool.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.115.3-115
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• 2002

To improve the performance of the tracked vehicle system, we examined the feasibility of using the preview control for the tracked vehicles suspension system. We proposed a method to apply a linear optimal preview control to the tracked vehicle system. To avoid the complexity of modeling the track subsystem and kinematical nonlinearity in the trailing arm suspension, we classified these as unknown dynamics and disturbances. We used the Time Delay Control(TDC) method to make sprung mass dynamics follow that of linear preview controlled tracked vehicle model by compensating the uncertainties and disturbances. We have verified by the computer simulation that the proposed method shows good robus...

• Journal of Mechanical Science and Technology
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• v.17 no.3
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• pp.380-390
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• 2003

This paper addresses the problem of the modeling and vibration control of tapered rotating blade modeled as thin-walled beams and incorporating damping capabilities. The blade model incorporates non-classical features such as anisotropy, transverse shear, secondary warping and includes the centrifugal and Coriolis force fields. For the rotating blade system, a thorough validation and assessment. of a number of non-classical features including the taper characteristics is accomplished. The damping capabilities are provided by a system of piezoactuators bonded or embedded into the structure and spread over the entire span of the beam. Based on the converse piezoelectric effect, the piezoactuators produce a localized strain field in response to a voltage and consequently, a change of the dynamic response characteristics is induced. A velocity feedback control law relating the piezoelectrically induced transversal bending moment at the beam tip with the appropriately selected kinematical response quantity is used and thebeneficial effects upon the closed-loop dynamic characteristics of the blade are highlighted.

• The Journal of Korea Robotics Society
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• v.3 no.4
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• pp.287-299
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• 2008

People have expected a humanoid robot to move as naturally as a human being does. The natural movements of humanoid robot may provide people with safer physical services and communicate with persons through motions more correctly. This work presented a methodology to generate the natural motions for a humanoid robot, which are converted from human motion capture data. The methodology produces not only kinematically mapped motions but dynamically mapped ones. The kinematical mapping reflects the human-likeness in the converted motions, while the dynamical mapping could ensure the movement stability of whole body motions of a humanoid robot. The methodology consists of three processes: (a) Human modeling, (b) Kinematic mapping and (c) Dynamic mapping. The human modeling based on optimization gives the ZMP (Zero Moment Point) and COM (Center of Mass) time trajectories of an actor. Those trajectories are modified for a humanoid robot through the kinematic mapping. In addition to modifying the ZMP and COM trajectories, the lower body (pelvis and legs) motion of the actor is then scaled kinematically and converted to the motion available to the humanoid robot considering dynamical aspects. The KIST humanoid robot, Mahru, imitated a dancing motion to evaluate the methodology, showing the good agreement in the motion.

• Korean Journal of Computational Design and Engineering
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• v.12 no.6
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• pp.429-440
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• 2007

The purpose of this research is to develop the Human-centered CAD system in which human factors can be considered during the design stage. For this system there are several issues to research, like the digital human modeling technology, the definition of interactions between human and product, the simulation of human motion when using the product, and the bio-mechanical analysis of human, etc. This paper introduces how to construct the kinematical structure of the digital human model. For our digital human model H-ANIM, the international specification of humanoid animation is referenced. And we added the skeleton geometry and the skin surfaces to our model. And it can manipulate its joints by forward kinematics. Also the IKAN inverse kinematics algorithm is adopted to support the posture prediction of the digital human model in the product environment. All of these ideas are implemented using CAD API so that we can apply these functions to the current commercial CAD systems. In this manner, the human factor issues can be effectively taken into account at the early design phase and the costs of bio-mechanical evaluation will be significantly reduced.

• Journal of Magnetics
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• v.5 no.2
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• pp.27-34
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• 2000

The structure of a series of Cu/Ni is characterized by using a program, SUPREX, to model the x-ray diffraction patterns, multilayers. The samples had nominal layer thickness of 3/3, 7/7, 13.5/13.5, 20/20, 30/30, 50/50, 80/80, 100/100, and 200/200 Angstroms. The diffraction patterns were taken around the (111) peak for the two constituent materials. A kinematical model is used to characterize the diffraction patterns and the parameters for the model are described. An initial model is calculated using initial guesses for the parameters. The model is then fit to the data by reducing $x^2$using the Levenberg-Marquardt algorithm. The samples are shown to be high quality supperlattices.