• Title/Summary/Keyword: Kim Tae-sun

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초소형 전자컬럼에서 제어용 전압의 잡음 분석

  • No, Yeong-Seop;Kim, Heung-Tae;Kim, Jin-Bae;O, Tae-Sik;Kim, Dae-Uk;Kim, Ho-Seop
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.473-474
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    • 2009
  • A miniaturized electrostatic column consists of a set of scan-deflector and lens components. Electrical noises of scan-deflectors have been classified by the applied voltage, and analyzed the noise effects of electron beam passing through the deflectors.

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