Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
- /
- Pages.473-474
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- 2009
초소형 전자컬럼에서 제어용 전압의 잡음 분석
- No, Yeong-Seop (Seoul University of Venture and Information) ;
- Kim, Heung-Tae (Seoul University of Venture and Information) ;
- Kim, Jin-Bae (CEBT Co. Ltd.) ;
-
O, Tae-Sik
(Sun Moon University)
;
-
Kim, Dae-Uk
(Sun Moon University)
;
-
Kim, Ho-Seop
(Sun Moon University)
- 노영섭 (서울벤처정보대학원대학교 임베디드시스템학과) ;
- 김흥태 (서울벤처정보대학원대학교 임베디드시스템학과) ;
- 김진배 (CEBT (주)) ;
-
오태식
(선문대학교 정보디스플레이학과)
;
-
김대욱
(선문대학교 정보디스플레이학과)
;
-
김호섭
(선문대학교 정보디스플레이학과)
- Published : 2009.06.18
Abstract
A miniaturized electrostatic column consists of a set of scan-deflector and lens components. Electrical noises of scan-deflectors have been classified by the applied voltage, and analyzed the noise effects of electron beam passing through the deflectors.