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A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.239-240
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    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

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A Benchmark of AI Application based on Open Source for Data Mining Environmental Variables in Smart Farm (스마트 시설환경 환경변수 분석을 위한 Open source 기반 인공지능 활용법 분석)

  • Min, Jae-Ki;Lee, DongHoon
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2017.04a
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    • pp.159-159
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    • 2017
  • 스마트 시설환경은 대표적으로 원예, 축산 분야 등 여러 형태의 농업현장에 정보 통신 및 데이터 분석 기술을 도입하고 있는 시설화된 생산 환경이라 할 수 있다. 근래에 하드웨어적으로 급증한 스마트 시설환경에서 생산되는 방대한 생육/환경 데이터를 올바르고 적합하게 사용하기 위해서는 일반 산업 현장과는 차별화 된 분석기법이 요구된다고 할 수 있다. 소프트웨어 공학 분야에서 연구된 빅데이터 처리 기술을 기계적으로 농업 분야의 빅데이터에 적용하기에는 한계가 있을 수 있다. 시설환경 내/외부의 다양한 환경 변수는 시계열 데이터의 난해성, 비가역성, 불특정성, 비정형 패턴 등에 기인하여 예측 모델 연구가 매우 난해한 대상이기 때문이라 할 수 있다. 본 연구에서는 근래에 관심이 급증하고 있는 인공신경망 연구 소프트웨어인 Tensorflow (www.tensorflow.org)와 대표적인 Open source인 OpenNN (www.openn.net)을 스마트 시설환경 환경변수 상호간 상관성 분석에 응용하였다. 해당 소프트웨어 라이브러리의 운영환경을 살펴보면 Tensorflow 는 Linux(Ubuntu 16.04.4), Max OS X(EL capitan 10.11), Windows (x86 compatible)에서 활용가능하고, OpenNN은 별도의 운영환경에 대한 바이너리를 제공하지 않고 소스코드 전체를 제공하므로, 해당 운영환경에서 바이너리 컴파일 후 활용이 가능하다. 소프트웨어 개발 언어의 경우 Tensorflow는 python이 기본 언어이며 python(v2.7 or v3.N) 가상 환경 내에서 개발이 수행이 된다. 주의 깊게 살펴볼 부분은 이러한 개발 환경의 제약으로 인하여 Tensorflow의 주요한 장점 중에 하나인 고속 연산 기능 수행이 일부 운영 환경에 국한이 되어 제공이 된다는 점이다. GPU(Graphics Processing Unit)의 제공하는 하드웨어 가속기능은 Linux 운영체제에서 활용이 가능하다. 가상 개발 환경에 운영되는 한계로 인하여 실시간 정보 처리에는 한계가 따르므로 이에 대한 고려가 필요하다. 한편 근래(2017.03)에 공개된 Tensorflow API r1.0의 경우 python, C++, Java언어와 함께 Go라는 언어를 새로 지원하여 개발자의 활용 범위를 매우 높였다. OpenNN의 경우 C++ 언어를 기본으로 제공하며 C++ 컴파일러를 지원하는 임의의 개발 환경에서 모두 활용이 가능하다. 특징은 클러스터링 플랫폼과 연동을 통해 하드웨어 가속 기능의 부재를 일부 극복했다는 점이다. 상기 두 가지 패키지를 이용하여 2016년 2월부터 5월 까지 충북 음성군 소재 딸기 온실 내부에서 취득한 온도, 습도, 조도, CO2에 대하여 Large-scale linear model을 실험적(시간단위, 일단위, 주단위 분할)으로 적용하고, 인접한 세그먼트의 환경변수 예측 모델링을 수행하였다. 동일한 조건의 학습을 수행함에 있어, Tensorflow가 개발 소요 시간과 학습 실행 속도 측면에서 매우 우세하였다. OpenNN을 이용하여 대등한 성능을 보이기 위해선 병렬 클러스터링 기술을 활용해야 할 것이다. 오프라인 일괄(Offline batch)처리 방식의 한계가 있는 인공신경망 모델링 기법과 현장 보급이 불가능한 고성능 하드웨어 연산 장치에 대한 대안 마련을 위한 연구가 필요하다.

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The effects of strength training on the change of ground reaction force for the children with Down syndrome (근력 훈련이 다운증후군 아동의 지면반력의 변화에 미치는 영향)

  • Lim, Bee-Oh;Han, Dong-Ki
    • Korean Journal of Applied Biomechanics
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    • v.12 no.2
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    • pp.1-16
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    • 2002
  • The purposes of this study were to investigate the effects of strength training on the change of ground reaction force for the children with trisomy 21 Down syndrome. The subjects of this study were consisted of eight elementary school students with Down syndrome who participated in the strength training. The strength training was administered by six items such as squat, leg curl, leg extension, toe raise, sit-ups, and hyperextension. For strengthening muscle, each group also was treated by walking for 8 weeks, three times a week, 10-15RM, 3sets, which was based on the principle of progressive overload. For inquiring the effect of strength training, the ground reaction force variables were measured in two phases : before-training and 8 week-after training. The gait of each subject was acquisition using 2 AMTI force platforms set at 100 frequency. The results of this study were as follows: The pattern of vertical, antero-posterior and medio-lateral forces, trajectory of net COP and the timing ratio of reaching the each events were shown variously. So, it is not easy to explain these variables clearly. As the result of strength training, these variables were changed. However, the results of within subjects differ greatly, there was no difference statistically.

The Relationship between Oceanographic Condition and Fishing Ground Distribution of Yellow Croaker in the East China Sea and the Yellow Sea (동지나해, 황해의 참조기 어장분포와 해황과의 관계)

  • YANG Seong-Ki;CHO Kyu-Dae
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.15 no.1
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    • pp.26-34
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    • 1982
  • The East China Sea and the Yellow Sea are abundant in nutritions because of river inflows and are important as the nursery and spawning grounds of demersal and pelagic fishes. The remarkable thermal front between the Yellow Sea Bottom Cold Water and the Tsushima Warm Current is formed in this region, and the fluctuation of this front may affect the variation of the yellow croaker fishing ground. To investigate the mechanism of the yellow croaker fishing ground, the distribution ana seasonal change of the fishing ground are examined by using catch of stow net fishery (Fisheries Research and Development Agency, 1970-1979) and the water temperature data (Japan Hydrographic Association, 1978). The main fishing ground of yellow croaker was nine sea areas (rectangle of 30' latitude by 30' longitude) located at 40-150 nautical miles west and southwest of Jeju Island, the area of which occupies no more than $11\%$ of all fishing grounds, and it appeared that about $70\%$ of total catch of ten years was concentrated in this area. The main fishing periods were from March to May and September to October. The coefficients of variation of the catch for the main fishing ground were from 0.8 to 2.1 and the condition of all fishing grounds was generally unstable. The mean CPUE was 27kg/haul at the main fishing ground, while it was the largest on boundary area of the Yellow Sea Bottom Cold Water. It was found that the seasonal movement of fishing ground is related to the expansion and reduction of the Yellow Sea Bottom Cold Water ($10^{\circ}C$).

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Financial Structure, Ownership, and Corporate Control (기업의 소유구조 및 지배력과 재무구조)

  • Rhieu, Sang-Yup;Cheong, Ki-Moon
    • Korean Business Review
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    • v.11
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    • pp.195-216
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    • 1998
  • Ownership of an asset can be identified with the right to exercise "residual control" where the contract is silent about decision rights, or with the right to receive any "residual returns" that remain after contractual. obligations are fulfilled. Although the concept of "ownership" seems reasonably clear in many of the cases, the concepts of residual control and the residual returns that define ownership are actually quite elusive. For large corporations, there is really no single individual who owns both the residual returns and the residual control. Despite the limited qualifications, ownership is clearly. the most common and effective meas to motivate people to create, maintain, and improve the value of assets. In this paper, we try to clarify the relationships among financial structure, ownership, and corporate control with the concept of ownership defined as the residual control and the residual returns, Financial securities are not just claims to part of a firm's net income. They give the security holder certain rights. A careful matching of rights of control and returns can create incentives that increase total value of the firms. In the corporate firms, managers, lenders, and shareholders have different interests. And the financial structure affects how different those interests are and what decisions management will make. Managers are, in general, better informed than investors about the firm's prospects. The financial decisions by managers may affect investors' beliefs and, therefore, the price of shares and the value of the firm.

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Growth Efficiency and Thermal Stress in Panax ginseng Grown at Various Temperatures under Dark (온도별 암하생장시 인삼의 생장효율과 열장애)

  • Park, Hoon;Yoo, Ki-Jung;Cooi, Byung-Ju
    • Journal of Ginseng Research
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    • v.12 no.1
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    • pp.1-10
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    • 1988
  • Panax ginseng seedlings were grown at various temperature regimes from 15 to $30^{\circ}C$ for 19 days under dark and the linear relationship between various regrowth efficiencies and thermal stress indices, cumulative superoptimum temperatures corrected with factors. Gross growth efficiency(shoot weight l root weight loss) was 37.5 % at the optimum temperature $15^{\circ}C$/$15^{\circ}C$, and 12.3% at the highest temperature, $30^{\circ}C$/$30^{\circ}C$ while net growth efficiency (shoot weight + Sm)l(root loss-Rm), which corrected by maintenance respiration for shoot(Sm) and root(Rm) was 39.6% and 16.7 at optimum and highest temperature respectively. All growth efficiencies showed negative correlations (p = 0.001) with all thermal stress indices and negative(p = 0.001) with shoot growth(St). When growth temperature difference in a day was nil or above $15^{\circ}C$ growth efficiency decreased greatly. Thermal stress indices showed negative correlation with root dry matter loss(RDL) but positive with Rm. St showed positive correlation with RDL. Thermal stress appeared to inhibit substrate supply for shoot growth resulting in the extremely low growth efficiency comparing with other crops that seems to be main rate limiting factor of slow growth, Thus it is necessary that growth efficiency and thermal stress must be elucidated in terms of metabolic pathway.

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A STUDY ON THE DIRECTION OF THE FUTURE WELFARE SYSTEM (미래 복지체계의 방향성에 관한 연구)

  • Kim, Youn-Jae;Keum, Ki-Youn
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.6 no.4
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    • pp.153-171
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    • 2011
  • The welfare system and the direction of the welfare policy have been unable to escape greatly from the frame of the past against the facts that the external environments of the national economy of the world including Korea have been changing in quick and rapid speed. Such results have caused the issues related with the welfare, economy and society ended in the ideological collision in connection with the goals of the policy, the right agreement between the policies lacked, and the intervention and conflict between the interest group concerning the policy continued. Social policy of Korea in the past had the level of complementing the parts which could not be solved through the growth. Employment creation had been achieved continuously backed up by the high rate of growth. And the low aging level, the young population structure, and the high rate of childbirth had been the structures that made such achievement possible. New economic, social and welfare environment at home and abroad has been requesting new change in welfare policy. Goal of the economic and social policy is to construct the safe economic and social system. And what has been requested has been the formation of the economic and social policy orienting the welfare nation in form of social investment and welfare expansion. Also the direction in strengthening the welfare system of Korea shall have the balance between the protection and activation strength with the necessity of converting to the prevention welfare from the post welfare. Also the public part, market, the 3rd sector and the share of the role of an individual shall be achieved. And what is needed is the achievement of the transfer from the paradigm of residual welfare to the universal welfare. And such improvements of the welfare system will be able to elevate the possible continuity of the system in long term basis through the improvement of the welfare system.

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The Evaluation of Predose Counts in the GFR Test Using $^{99m}Tc$-DTPA ($^{99m}Tc$-DTPA를 이용한 사구체 여과율 측정에서 주사 전선량계수치의 평가)

  • Yeon, Joon-Ho;Lee, Hyuk;Chi, Yong-Ki;Kim, Soo-Yung;Lee, Kyoo-Bok;Seok, Jae-Dong
    • The Korean Journal of Nuclear Medicine Technology
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    • v.14 no.1
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    • pp.94-100
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    • 2010
  • Purpose: We can evaluate function of kidney by Glomerular Filtration Rate (GFR) test using $^{99m}Tc$-DTPA which is simple. This test is influenced by several parameter such as net syringe count, kidney depth, corrected kidney count, acquisition time and characters of gamma camera. In this study, we evaluated predose count according to matrix size in the GFR test using $^{99m}Tc$-DTPA. Materials and Methods: Gamma camera of Infinia in GE was used, and LEGP collimator, three types of matrix size ($64{\times}64$, $128{\times}128$, $256{\times}256$) and 1.0 of zoom factor were applied. We increased radioactivity concentration from 222 (6), 296 (8), 370 (10), 444 (12) up to 518 MBq (14 mCi) respectively and acquired images according to matrix size at 30 cm distance from detector. Lastly, we evaluated these values and then substituted them for GFR formula. Results: In $64{\times}64$, $128{\times}128$ and $256{\times}256$ of matrix size, counts per second was 26.8, 34.5, 41.5, 49.1 and 55.3 kcps, 25.3, 33.4, 41.0, 48.4 and 54.3 kcps and 25.5, 33.7, 40.8, 48.1 and 54.7 kcps respectively. Total counts for 5 second were 134, 172, 208, 245 and 276 kcounts from $64{\times}64$, 127, 172, 205, 242, 271 kcounts from $128{\times}128$, and 137, 168, 204, 240 and 273 kcounts from $256{\times}256$, and total counts for 60 seconds were 1,503, 1,866, 2,093, 2,280, 2,321 kcounts, 1,511, 1,994, 2,453, 2,890 and 3,244 kcounts, and 1,524, 2,011, 2,439, 2,869 and 3,268 kcounts respectively. It is different from 0 to 30.02 % of percentage difference in $64{\times}64$ of matrix size. But in $128{\times}128$ and $256{\times}256$, it is showed 0.60 and 0.69 % of maximum value each. GFR of percentage difference in $64{\times}64$ represented 6.77% of 222 MBq (6 mCi), 42.89 % of 518 MBq (14 mCi) at 60 seconds respectively. However it is represented 0.60 and 0.63 % each in $128{\times}128$ and $256{\times}256$. Conclusion: There was no big difference in total counts of percentage difference and GFR values acquiring from $128{\times}128$ and $256{\times}256$ of matrix size. But in $64{\times}64$ of matrix size when the total count exceeded 1,500 kcounts, the overflow phenomenon was appeared differently according to predose radioactivity of concentration and acquisition time. Therefore, we must optimize matrix size and net syringe count considering the total count of predose to get accurate GFR results.

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Molecular Identification of Trichogramma (Hymenoptera: Trichogrammatidae) Egg Parasitoids of the Asian Corn Borer Ostrinia furnacalis, Based on ITS2 rDNA Sequence Analysis (ITS2 rDNA 염기서열 분석을 통한 Trichogramma 속(벌목: 알벌과)의 조명나방 알기생벌에 대한 종 추정)

  • Seo, Bo Yoon;Jung, Jin Kyo;Park, Ki Jin;Cho, Jum Rae;Lee, Gwan-Seok;Jung, Chung Ryul
    • Korean journal of applied entomology
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    • v.53 no.3
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    • pp.247-260
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    • 2014
  • To identify the species of Trichogramma occurring in the corn fields of Korea as egg parasitoids of Ostrinia furnacalis, we sequenced the full-length of ITS2 nuclear rDNA from 112 parasitoids collected during this study. As a reference to distinguish species, we also retrieved full-length ITS2 sequences of 60 Trichogramma species from the NCBI GenBank database. On the basis of the size and 3'terminal sequence pattern of the ITS2 sequences, the Trichogramma samples collected in this study were divided into three groups (K-1, -2, and -3). Evolutionary distances (d) within and between groups based on ITS2 sequences were estimated to be ${\leq}0.005$ and ${\geq}0.080$, respectively. In the net average distance between groups or species, the d value between K-1 and T. ostriniae, K-2 and T. dendrolimi, and K-3 and T. confusum was the lowest, with values of 0.016, 0.001, and 0.002, respectively. In the phylogenetic tree, K-1 and K-2 were clustered with T. ostriniae and T. dendrolimi, respectively. However, K-3 was clustered with three different species, namely, T. confusum, T. chilonis, and T. bilingensis. NCBI BLAST results revealed that parasitoids belonging to K-1 and K-2 showed 99% identity with T. ostriniae and T. dendrolimi, respectively. Parasitoids in K-3 collected from Hongcheon showed 99-100% identity with T. confusum and T. chilonis, and one parasitoid in K-3 collected from Gochang had 98% identity with T. bilingensis, T. confusum, and T. chilonis. On the basis of these results, we infer that the species of Trichogramma collected in this study are closely related to T. ostriniae (K-1) and T. dendrolimi (K-2). However, it was not possible to distinguish species of K-3 using the ITS2 sequence alone.

The hydrodynamic characteristics of the canvas kite - 2. The characteristics of the triangular canvas kite - (캔버스 카이트의 유체역학적 특성에 관한 연구 - 2. 삼각형 캔버스 카이트의 특성 -)

  • Bae, Bong-Seong;Bae, Jae-Hyun;An, Heui-Chun;Lee, Ju-Hee;Shin, Jung-Wook
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.40 no.3
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    • pp.206-213
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    • 2004
  • As far as an opening device of fishing gears is concerned, applications of a kite are under development around the world. The typical examples are found in the opening device of the stow net on anchor and the buoyancy material of the trawl. While the stow net on anchor has proved its capability for the past 20 years, the trawl has not been wildly used since it has been first introduced for the commercial use only without sufficient studies and thus has revealed many drawbacks. Therefore, the fundamental hydrodynamics of the kite itself need to ne studied further. Models of plate and canvas kite were deployed in the circulating water tank for the mechanical test. For this situation lift and drag tests were performed considering a change in the shape of objects, which resulted in a different aspect ratio of rectangle and trapezoid. The results obtained from the above approaches are summarized as follows, where aspect ratio, attack angle, lift coefficient and maximum lift coefficient are denoted as A, B, $C_L$ and $C_{Lmax}$ respectively : 1. Given the triangular plate, $C_{Lmax}$ was produced as 1.26${\sim}$1.32 with A${\leq}$1 and 38$^{\circ}$B${\leq}$42$^{\circ}$. And when A${\geq}$1.5 and 20$^{\circ}$${\leq}$B${\leq}$50$^{\circ}$, $C_L$ was around 0.85. Given the inverted triangular plate, $C_{Lmax}$ was 1.46${\sim}$1.56 with A${\leq}$1 and 36$^{\circ}$B${\leq}$38$^{\circ}$. And When A${\geq}$1.5 and 22$^{\circ}$B${\leq}$26$^{\circ}$, $C_{Lmax}$ was 1.05${\sim}$1.21. Given the triangular kite, $C_{Lmax}$ was produced as 1.67${\sim}$1.77 with A${\leq}$1 and 46$^{\circ}$B${\leq}$48$^{\circ}$. And when A${\geq}$1.5 and 20$^{\circ}$B${\leq}$50$^{\circ}$, $C_L$ was around 1.10. Given the inverted triangular kite, $C_{Lmax}$ was 1.44${\sim}$1.68 with A${\leq}$1 and 28$^{\circ}$B${\leq}$32$^{\circ}$. And when A${\geq}$1.5 and 18$^{\circ}$B${\leq}$24$^{\circ}$, $C_{Lmax}$ was 1.03${\sim}$1.18. 2. For a model with A=1/2, an increase in B caused an increase in $C_L$ until $C_L$ has reached the maximum. Then there was a tendency of a very gradual decrease or no change in the value of $C_L$. For a model with A=2/3, the tendency of $C_L$ was similar to the case of a model with A=1/2. For a model with A=1, an increase in B caused an increase in $C_L$ until $C_L$ has reached the maximum. And the tendency of $C_L$ didn't change dramatically. For a model with A=1.5, the tendency of $C_L$ as a function of B was changed very small as 0.75${\sim}$1.22 with 20$^{\circ}$B${\leq}$50$^{\circ}$. For a model with A=2, the tendency of $C_L$ as a function of B was almost the same in the triangular model. There was no considerable change in the models with 20$^{\circ}$B${\leq}$50$^{\circ}$. 3. The inverted model's $C_L$ as a function of increase of B reached the maximum rapidly, then decreased gradually compared to the non-inverted models. Others were decreased dramatically. 4. The action point of dynamic pressure in accordance with the attack angle was close to the rear area of the model with small attack angle, and with large attack angle, the action point was close to the front part of the model. 5. There was camber vertex in the position in which the fluid pressure was generated, and the triangular canvas had large value of camber vertex when the aspect ratio was high, while the inverted triangular canvas was versa. 6. All canvas kite had larger camber ratio when the aspect ratio was high, and the triangular canvas had larger one when the attack angle was high, while the inverted triangluar canvas was versa.