• Transactions on Electrical and Electronic Materials
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• 제5권3호
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• pp.98-103
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• 2004

The plasma properties in the facing target sputtering system during carbon nitride film deposition have been investigated. The ionized nitrogen species of the deposited films increased with increasing discharge current and were independent of the nitrogen pressure. The nitrogen content in the films did not vary significantly with the variation of nitrogen gas. The electron temperature was high close to that in the inter-cathode region, reduced as the electrons moved away from the most intense region of magnetic confinement and increased again outside this region. Calculations based on the film composition showed that the ion to carbon atom ratio at the substrate was about 50 and that the ratio between the ionized and neutral nitrogen molecules was about 0.25.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.378-379
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• 2006

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. We have investigate the possibility of new abrasive for the oxide CMP application.

• Nuclear Engineering and Technology
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• 제30권1호
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• pp.17-25
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• 1998

Transport of carbon and boron impurity ions parallel to magnetic field lines in the tokamak SOL (scrape-off layer) is numerically investigated for a one-dimensional steady state. The spatial distributions of density and velocity of the impurity ions in a steady state are calculated by finite difference method for a single-fluid model. The calculated results show that among forces acting on SOL particles thermal force produced tv plasma temperature gradient is a principal force determining the feature of impurity distribution profiles in the tokamak edge. However, strong collisional friction forces appearing dominant in front of the diverter plate restrain impurity ion flows due to temperature gradients from moving toward the midplane. Consequently, the stagnation point develops in the impurity flow by these two forces near the diverter region, in which ion flows change their directions. Impurity ions turn out to be accumulated at the stagnation points, where peaked profiles of highly-ionized state ions are relatively predominant over those of low-ionized state ions.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1992년도 추계학술발표강연 및 논문개요집
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• pp.6-6
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• 1992

Ionized cluster beam deposition (ICBD) technique has been employed to fabricate high-purity crystalline polyimide (PI) film. The pyromellitic dianhydride (PMDA) and oxydianiline (ODA) were deposited using dual ICB sources, Fourier trans forminfraredspectroscopy (FT-IR), X-ray photoemission spectroscopy (XPS), and Transmission electron microscopy (TEM)study show that the bulk and surface chemical properties and the crystalline structure are very sensitive to the ICBD conditions such as cluster ion acceleration voltage and ionization voltage, At optimum ICBD conditions, the PI films have a maximum imidization, negligible impurities(∼1% isoimide), and a good crystalline structure probably due to the high surface migration energy and surface cleaning effect. These characteristics are superior to those of films deposited by other techniques such as colvent cast, vapowr deposition, or sputtering techniques.

• 대한화학회지
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• 제39권3호
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• pp.213-217
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• 1995

수용액상에서 BUDDA(Butyldithiodiacetic acid), BMDDA(Benzmethyldithiodiac-etic acid), CHDDA(Cyclohexyldithiodiacetic acid)의 IR 스펙트라는 다양한 pH값에서 보고되어진다. 이온화된 carboxyl group과 비이온화된 carboxyl group의 비대칭 신축진동 흡수띠 차이를 이용하여 free-ligand의 구조를 추정한다. 또한 이들 연구의 접근은 리간드의 IR 스펙트라와 전위차 적정법을 이용하여 얻어진 $pk_a$값을 비교함으로서 설명된다.

• 한국전기전자재료학회논문지
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• 제15권8호
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• pp.658-663
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• 2002

Hall factor of electrons in $\Gamma$-valley is calculated as functions of temperature, impurity concentration, and nonparabolicity of conduction valleys by taking into account the current density obtained from the Boltzmann transport equation. The dependence of the Hall factor on the temperature is clearly shown in the case of the optical phonon scattering and that on the impurity concentration is obvious in the case of the ionized impurity scattering. As the nonparabolicity of the conduction band increases, the Hall factor due to the acoustic or optic phonon scattering increases, whereas that due to the ionized impurity scattering decreases. The change of the Hall factor can be analysed in terms of the dispersion of relaxation time.

• 천문학회지
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• 제8권1호
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• pp.29-34
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• 1975

Solar electrical conductivity has been calculated, making use of Yun and Wyller's formulation. The computed results arc presented in a tabulated form as functions of temperature and pressure for given magnetic field strengths. The results of the calculation show that the magnetic field does not play any important role in characterizing the electrical conductivity of the ionized gas when the gas pressure is relatively high (e.g., $P{\geq}10^4\;dynes/cm^2$). However, when the gas pressure is low (e.g., $P{\leq}10\;dynes/cm^2$), the magnetic field becomes very effective even if its field strength is quite small (e.g., $B{\leq}0.01$ gauss). It is also found that, except for lower temperature region (e.g., $T{\leq}10^{4^{\circ}}K$), there is a certain linear relationship in a log- log graph between the pressure and the critical magnetic field strength, which is defined as a field strength capable of reducing the non-magnetic component of the electrical conductivity by 20%.

• 천문학회보
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• 제43권1호
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• pp.37.2-37.2
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• 2018

The Wide-field Infrared Survey Explorer (WISE) mission has been efficient in selecting Active Galactic Nuclei (AGN) with high luminosities and large obscuration. According to the merger driven AGN powering scenarios, luminous and obscured AGN are in a stage where they go through feeding of gas accretion into the central black hole, and feedback to the host galaxy through outflows. We report the rest-frame UV-optical spectra of 11 Hot Dust Obscured Galaxies (Hot DOGs) at z~2, WISE color-selected to be extremely reddened AGN. A fraction of the targets show blueshifted and broadened [OIII] profiles indicative of ionized gas outflows. We present the occurrence and strength of the outflows, and discuss what impact these AGN activity could give on their hosts.

• 한국진공학회지
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• 제4권S2호
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• pp.139-147
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• 1995

The mechanism of the ionized cluster beam deposition has been studied using Molecular Dynamics Simulation. The Embedded Atom Method(EAM) potential were used in the simulation. The impact of a Au95-cluster on Au(100) substrate was studied for the impact energies 0.15-10eV/atom. The dependency of the impact energy of cluster beam was observed. For the cluster energy impact of 10eV per atom, the defects on surface were created and the cluster embedded into substrate as an amorphous state. For the energy of 0.5eV per atom, the defect free homoepitaxial growth was observed and atomic scale nucleation was formated, which are in good agreement with experiment. Thus molecular dynamics simulation is very useful to study the mechanism of the ionized cluster beam deposition.

• Bulletin of the Korean Chemical Society
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• 제16권10호
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• pp.908-911
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• 1995

The EPR spectra of Cu-or Zr-doped BaTiO3 ceramics exhibited absorption signals with g∥=2.380 and g⊥=2.063 which are assigned to Ba1+(Ba2+ + e'→Ba1+) ion reduced by an electron that was produced from the oxygen vacancy (VO..). The intensity of these signals decreased as the temperature increased indicating that Ba1+ was changed to Ba2+ as the temperature increased. These ceramics also showed the EPR signal with g=1.997 around TC which arises from ionized Ba-vacancies, VBa'(VBa + e'→VBa'. In the orthorhombic and tetragonal phase region g=1.997 signal was not seen. The electrons generating from the oxidation of Ba1+ and ionized Ba-vacancies may contribute to a space charge which is responsible for a dielectric relaxation of these samples.