• Title/Summary/Keyword: Ion sensor

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Micromachinng and Fabrication of Thin Filmes for MEMS-infrarad Detectors

  • Hoang, Geun-Chang;Yom, Snag-Seop;Park, Heung-Woo;Park, Yun-Kwon;Ju, Byeong-Kwon;Oh, Young-Jei;Lee, Jong-Hoon;Moonkyo Chung;Suh, Sang-Hee
    • The Korean Journal of Ceramics
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    • v.7 no.1
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    • pp.36-40
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    • 2001
  • In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

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Wireless Telemetry System for the FET-type Ion Sensors (FET형 이온센서용 무선원격측정시스템)

  • Jeong, H.;Choi, B.D.;Kim, Y.J.;Lee, Y.C.;Sohn, B.K.
    • Journal of Sensor Science and Technology
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    • v.10 no.3
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    • pp.187-195
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    • 2001
  • A wireless telemetry measurement system, using ISFETs, was developed for environmental monitoring applications, industrial processes, medical treatments and so on. This system is composed of the measurement part located at remote site and a personal computer(PC) which control whole instrument process. The measurement part transmits measured data to the PC by RF transceiver, and transmitted data are analyzed and handled in the PC. Proposed system utilizing time division multiplexing for the transmission of 3channel ISFET signal. The measurement part has an identification number(ID) so that the PC controls many measurement parts separately. Experiments were performed using pH-ISFETs, and the implemented system operates well within designed specification and accuracy of 0.1 pH.

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Thermodynamic Analysis of Solid Electrolyte $CO_2$ Sensor in Continuous and Discontinuous Flow Systems (연속 기체흐름계 및 일시 기체흐름계에서의 고체 전해질 $CO_2$ 가스센서의 열역학적 분석)

  • Choi, Soon-Don
    • Journal of Sensor Science and Technology
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    • v.7 no.5
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    • pp.319-326
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    • 1998
  • Anodic half-reaction in the $Na^+$ ionic sensors using $Na_2CO_3$ and $MCO_3$ ($M=Cs_2,K_2,Li_2,Ca$) as a sensitive membrane is derived in continuous flow system to explain $CO_2$ sensing characteristics. For various gas-sensitive membranes, a well known overall reaction, $MCO_3\;=\;MO\;+\;CO_2$, cannot be applied for the EMF behaviors of these kinds of sensors. So, the anodic reaction is found to involve $Na_2CO_3$ and $M^{++}$-containing oxide phases by employing the ion exchange reaction at the interface of solid electrolyte and the sensitive membrane to maintain ionic balance in the whole cell. Based on the electrode reaction derived in flow system, differences of cell potentials between continuous and discontinuous flow systems were also discussed. These EMF differences were considerably caused by the partial pressures of oxygen and $CO_2$ as well as irreversible chemical reactions between electrode materials and $CO_2$ atmosphere.

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V(IV) Species, Location and Adsorbate Interactions in VH-SAPO-42 Studied by ESR and Electron Spin-Echo Modulation Spectroscopies

  • Back, Gern-Ho;Yu, Jong-Sung;Lee, Hye-Young;Kim, Min-Sik;Lee, Yong-Ill
    • Journal of the Korean Magnetic Resonance Society
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    • v.11 no.2
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    • pp.95-109
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    • 2007
  • Vanadium-incorporated aluminophosphate microporous molecular sieve VH-SAPO-42 has been studied by electron spin resonance(ESR) and electron spin-echo modulation (ESEM) spectroscopies to determine the vanadium location and interaction with various adsorbate molecules. The results are interpreted in terms of V(IV) ion location and coordination geometry. Assynthesized VH-SAPO-42 contains only vanadyl species with distorted octahedral or trigonal bipyramidal coordination. Vanadium incorporated into H-SAPO-42 occupied extra-framework site. After calcinations in $O_2$ and exposure to moisture, only species A is observed with reduced intensities. Species A is identified as a $VO(H_2O)_2^{2+}$ complex coordinated to three framework oxygen atoms bonded to aluminum. When hydrated VH-SAPO-42 is dehydrated at elevated temperature by calcination, species A loses its water ligand and transforms to $VO^{2+}$ ions coordinated to three framework oxygens (species B). Species B reduces its intensities significantly after treatment with $O_2$ at high temperature, thus suggesting oxidation of $V^{4+}$ to $V^{5+}$. When dehydrated VH-SAPO-42 makes contact with $D_2O$ at room temperature, the ESR signal of species A is regained. The species is assumed as a $VO(O_f)_3(D_2O)_2$ by considering three framework oxygens. Adsorption of deuterated methanol on dehydrated VH-SAPO-42 results in another new vanadium species D, which is identified as a $VO(CD_3OH)_2$ complex. When deuterated ethylene is adsorbed on dehydrated VH-SAPO-42, another new vanadium species E identified as a $VO(C_2D_4)^{2+}$, is observed. Possible coordination geometries of these various complexes are discussed.

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Black Silicon of Pyramid Structure Formation According to the RIE Process Condition (RIE 공정 조건에 의한 피라미드 구조의 블랙 실리콘 형성)

  • Jo, Jun-Hwan;Kong, Dae-Young;Cho, Chan-Seob;Kim, Bong-Hwan;Bae, Young-Ho;Lee, Jong-Hyun
    • Journal of Sensor Science and Technology
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    • v.20 no.3
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    • pp.207-212
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    • 2011
  • In this study, pyramid structured black silicon process was developed in order to overcome disadvantages of using wet etching to texture the surface of single crystalline silicon and using grass/needle-like black silicon structure. In order to form the pyramidal black silicon structure on the silicon surface, the RIE system was modified to equip with metal-mesh on the top of head shower. The process conditions were : $SF_6/O_2$ gas flow 15/15 sccm, RF power of 200 W, pressure at 50 mTorr ~ 200 mTorr, and temperature at $5^{\circ}C$. The pressure did not affect the pyramid structure significantly. Increasing processing time increased the size of the pyramid, however, the size remained constant at 1 ${\mu}M$ ~ 2 ${\mu}M$ between 15 minutes ~ 20 minutes of processing. Pyramid structure of 1 ${\mu}M$ in size showed to have the lowest reflectivity of 7 % ~ 10 %. Also, the pyramid structure black silicon is more appropriate than the grass/needle-like black silicon when creating solar cells.

A Study on the Fabrication of Piezoelectric Organic Thin Films by using Physical Vapor Deposition Method and Sensor Characteristics (진공증착법을 이용한 압전 유기 박막의 제조와 센서 특성에 관한 연구)

  • Park, Su-Hong;Lim, Eung-Choon;Park, Jong-Chan;Lee, Duck-Chool
    • Proceedings of the KIEE Conference
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    • 2001.07e
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    • pp.35-39
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    • 2001
  • The purpose of this paper is improvement the piezoelectric of Polyvinylidene fluoride(PVDF) organic thin films is fabricated by vapor deposition method. The piezoelectric of PVDF organic thin films attributed to dipole orientation in crystalline region. Also, the piezoelectric characteristic reduced that dipole moments orientation in crystalline region interfered with impurity carriers. Therefore, PVDF organic thin films fabricated with high substrate temperature condition for crystallinity improvement. The crystallinity of PVDF organic thin films fabricated by this condition increase from 47 to 67.8%. The ion density of PVDF organic thin films fabricated by substrate temperature variation from $30^{\circ}C$ to $105^{\circ}C$ decreased from $1.62{\times}10^{16}cm^3$ to $6.75{\times}10^{11}cm^3$ when temperature and frequency were $100^{\circ}C$, 10Hz, respectively. The $d_{33}$ and piezo-voltage coefficient of PVDF organic thin films increased from 20pPC/N to 33pC/N and $162.9{\times}10^{-3}V{\cdot}m/N$ to $283.2{\times}10^{-3}V{\cdot}m/N$, respectively. For the sake of the applications of piezoelectric sensor, we analyzed the output voltage characteristic as a function of the distance between an oscillator of 28kHz and PVDF organic thin film transducer. From this, we found that the output voltage is inversely proportional to the distance. At this time, the period was about $35.798{\mu}s$ and equal the oscillator frequency.

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A Study on the Formation of Detection Electrode for the IED Removal Robot by Using A Photosensitive CNT Paste (감광성 CNT 페이스트를 이용한 IED 폭발물 제거로봇 탐지전극 형성에 관한 연구)

  • Kwon, Hye Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.4
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    • pp.231-237
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    • 2018
  • In this study, two important requirements for the home production of a robot to detect and remove improvised explosive devices (IEDs) are presented in terms of the total cost for robot system development and the performance improvement of the mine detection technology. Firstly, cost analyses were performed in order to provide a reasonable solution following an engineering estimate method. As a result, the total cost for a mass production system without the mine detection system was estimated to be approximately 396 million won. For the case including the mine detection system, the total cost was estimated to be approximately 411 million won, in which labor costs and overhead charges were slightly increased and the material costs for the mine detection system were negligible. Secondly, a method for fabricating the carbon nanotube (CNT) based gas detection sensor was studied. The detection electrodes were formed by a photolithography process using a photosensitive CNT paste. As a result, this method was shown to be a scalable and expandable technology for producing excellent mine detection sensors. In particular, it was found that surface treatments by using adhesive taping or ion beam bombardment methods are effective for exposing the CNTs to the ambient air environment. Fowler-Nordheim (F-N) plots were obtained from the electron-emission characteristics of the surface treated CNT paste. The F-N plot suggests that sufficient electrons are available for transport between CNT surfaces and chemical molecules, which will make an effective chemiresistive sensor for the advanced IED detection system.

A Study on the Fabrication of Multi-Walled Nanotubes (MWCNT) Based Thin Film and Chemical Sensor Operation Characteristics (Multi-Walled Carbon Nanotubes (MWCNT) 인쇄박막의 제작과 화학센서 동작 특성에 관한 연구)

  • Noh, Jae Ha;Choi, Junseck;Ko, Dongwan;Seo, Joonyoung;Lee, Sangtae;Jung, Jung-Yeul;Chang, Jiho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.3
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    • pp.181-185
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    • 2020
  • Hazardous and noxious substance (HNS) detection sensors were fabricated using multi-walled carbon nanotubes (MWCNTs) and various binder materials for ion batteries. To obtain uniformly printed films, the printing precision according to the substrate cleaning method was monitored, and the printing paste mixing ratio was investigated. Binders were prepared using styrene butadiene rubber + carboxymethyl cellulose (SBR+CMC), polyvinylidene fluoride + n-methyl-2-pyrrolidene (PVDF+NMP), and mixed with MWCNTs. The surface morphology of the printed films was examined using an optical microscope and a scanning electron microscope, and their electrical properties are investigated using an I-V sourcemeter. Finally, sensing properties of MWCNT printed films were measured according to changes in the concentration of the chemical under the various applied voltages. In conclusion, the MWCNT printed films made of (SBR+CMC) were found to be feasible for application to the detection of hazardous and noxious chemicals spilled in seawater.

A Study on Characteristics of A Diode Radiation Sensor for Portal Image of Therapy Radiation (치료방사선 Portal Image를 위한 다이오드 방사선 센서의 특성에 관한 연구)

  • Lee, Dong-Hun;Kwon, Jang-Woo;Hong, Seung-Hong
    • Journal of Sensor Science and Technology
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    • v.5 no.5
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    • pp.11-20
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    • 1996
  • In this paper, the characteristics of therapy radiation diode sensors have been studied by using therapy radiation from the MM22 microtron accelerator. The linearity, reproducibility and error ratio were measured for feasibility as a radiation detector. Energy dependence, sensitivity change after a amount of irradiation and output value according to a number of diodes were also measured for same purpose. We have formed pulse shaping of diode signal with nuclear instruments for portal image reconstruction. The percent depth dose ratio according to field size and depth was compared with that of the detector of a ion chamber. Using thirteen silicon diodes, we can directly read diode outputs on a computer monitor after A/D conversion with 16 channels analog to digital conversion board with 12 bit resolution. The possibility for portal image with diodes has been suggested from output comparison between output value with a human phantom and that without a human phantom.

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A Conceptual Design of HAUSAT-1(CubeSat) Satellite

  • Kim, Joon-Tae;Kim, Young-Suk;Seo, Seung-Won;Kim, Young-Hyun;Chang, Young-Keun
    • International Journal of Aeronautical and Space Sciences
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    • v.3 no.1
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    • pp.61-73
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    • 2002
  • This paper addresses the conceptual design results of the HAUSAT-1 (Hankuk Aviation University SATellite-1), developed by Space System Research Lab. of Hankuk Aviation Univ., which is a new generation picosatellite. This project has been funded by Korean Government for the purpose of developing the space core technology. This is the first attempt at the level of university in Korea to develop the satellite weighing less than 1kg and accelerates opportunities with low construction, low launch cost space experiment platforms. The purpose of the HAUSAT-1 project is to offer graduate and undergraduate students great opportunities to be able to understand the design process of satellite development as a team member. Its mission objectives are to track its position by the GPS receiver system, to deploy the thin film solar cell panel to generate extra power, and to measure plasma density and temperature with the plasma sensor. The HAUSAT-1 will orbit at the altitude of 650 km with 65 degree inclination angle with 12 months of design mission life. It is planned to be launched on November 2003 by Russian launch vehicle "Dnepr".