Black Silicon of Pyramid Structure Formation According to the RIE Process Condition |
Jo, Jun-Hwan
(Graduate School of Electrical Engineering and Computer Science, Kyungpook National University)
Kong, Dae-Young (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University) Cho, Chan-Seob (School of Electrical Engineering, Kyungpook National University) Kim, Bong-Hwan (Electronics Engineering, Catholic University of Daegu) Bae, Young-Ho (Dept. Electronics Engineering, Uiduk University) Lee, Jong-Hyun (Graduate School of Electrical Engineering and Computer Science, Kyungpook National University) |
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