• Title/Summary/Keyword: Ion beam exposure

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Electro-Optical Characteristics of the Ion-Beam-Aligned FFS-LCD on a Diamond-like-Carbon Thin Film

  • Hwang, J.Y.;Park, C.J.;Seo, D.S.;Jeong, Y.H.;Kim, K.C.;Ahn, H.J.;Baik, H.K.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.1132-1136
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    • 2004
  • In this paper, we intend to make FFS mode cell with LC alignment used non-rubbing method, ion beam alignment method on the a-C:H thin film, to analyze electro-optical characteristics in this cell. We studied on the suitable inorganic thin film for FFS-LCD and the aligning capabilities of nematic liquid crystal (NLC) using the new alignment material of a-C:H thin film as working gas at rf bias condition. A high pretilt angle of about 5$^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. An excellent voltage-transmittance (V-T) and response time curve of the ion-beam-aligned FFS-LCD was observed with oblique ion beam exposure on the DLC thin films.

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Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method

  • Park, Chang-Joon;Hwang, Jeoung-Yeon;Seo, Dae-Shik;Ahn, Han-Jin;Kim, Kyung-Chan;Baik, Hong-Koo
    • Transactions on Electrical and Electronic Materials
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    • v.5 no.1
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    • pp.15-18
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    • 2004
  • We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of a-C:H thin film by plasma enhanced chemical vapor deposition (PECVD) system for 30 sec under 30W rf power at a gas pressure of 1.4*10$\^$-1/ torr. A high pretilt angle of about 5 by ion beam exposure on the a-C:H thin film surface was measured. A good LC alignment by the ion beam alignment method on the a-C:H thin film surface was observed at annealing temperature of 250$^{\circ}C$, and the alignment defect of NLC was observed above annealing temperature of 300$^{\circ}C$. Consequently, the high LC pretilt angle and the good thermal stability of LC alignment by the ion beam alignment method on the a-C:H thin film by PECVD method as working gas at 30W rf bias condition can be achieved.

A New Trend of In-situ Electron Microscopy with Ion and Electron Beam Nano-Fabrication

  • Furuya, Kazuo;Tanaka, Miyoko
    • Applied Microscopy
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    • v.36 no.spc1
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    • pp.25-33
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    • 2006
  • Nanofabrication with finely focused ion and electron beams is reviewed, and position and size controlled fabrication of nano-metals and -semiconductors is demonstrated. A focused ion beam (FIB) interface attached to a column of 200keV transmission electron microscope (TEM) was developed. Parallel lines and dots arrays were patterned on GaAs, Si and $SiO_2$ substrates with a 25keV $Ga^+-FIB$ of 200nm beam diameter at room temperature. FIB nanofabrication to semiconductor specimens caused amorphization and Ga injection. For the electron beam induced chemical vapor deposition (EBI-CVD), we have discovered that nano-metal dots are formed depending upon the beam diameter and the exposure time when decomposable gases such as $W(CO)_6$ were introduced at the beam irradiated areas. The diameter of the dots was reduced to less than 2.0nm with the UHV-FE-TEM, while those were limited to about 15nm in diameter with the FE-SEM. Self-standing 3D nanostructures were also successfully fabricated.

LC Aligning Capabilities of a Nematic Liquid Crystal on Homeotropic Polyimide Surface by New Ion-beam Irradiation

  • Ok, Chul-Ho;Kang, Dong-Hun;Lee, Kang-Min;Han, Jin-Woo;Kim, Byoung-Yong;Oh, Byeong-Yun;Kim, Young-Hwan;Hwang, Jeong-Yeon;Lee, Sang-Keuk;Han, Jeong-Min;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.6
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    • pp.265-267
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    • 2007
  • The liquid crystal(LC) aligning capabilities of a nematic liquid crystal(NLC) on a homeotropic polyimide(PI) surface using a new ion-beam method were studied. Exposure ion-beam of $45^{\circ}$ incidence angle shows a good LC alignment of the NLC on the homeotropic PI surface. Also, on the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam of $45^{\circ}$ incidence angle had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good at 1500 eV. And we achieved satisfactory result for EO character.

Investigation on Liquid Crystal Alignment Effects of SiNx Thin Film Irradiated by Ion Beam (이온 빔 조사된 SiNx 박막의 액정 배향 효과에 관한 연구)

  • Lee, Sang-Keuk;Kim, Young-Hwan;Kim, Byoung-Yong;Han, Jin-Woo;Kang, Dong-Hun;Kim, Jong-Hwan;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.398-398
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    • 2007
  • Most recently, the Liquid Crystal (LC) aligning capabilities achieved by ion beam exposure on the diamond-like carbon (DLC) thin film layer have been successfully studied. The DLC thin films have a high mechanical hardness, a high electrical resistance, optical transparency and chemical inertness. Nitrogen doped Diamond Like Carbon (NDLC) thin films exhibit properties similar to those of the DLC films and better thermal stability than the DLC films because C:N bonding in the NDLC film is stronger against thermal stress than C:H bonding in the DLC thin films. Moreover, our research group has already studied ion beam alignment method using the NDLC thin films. The nematic liquid crystal (NLC) alignment effects treated on the SiNx thin film layers using ion beam irradiation for three kinds of N rations was successfully studied for the first time. The SiNx thin film was deposited by plasma-enhanced chemical vapor deposition (PECVD) and used three kinds of N rations. In order to characterize the films, the atomic force microscopy (AFM) image was observed. The good LC aligning capabilities treated on the SiNx thin film with ion beam exposure for all N rations can be achieved. The low pretilt angles for a NLC treated on the SiNx thin film with ion beam irradiation were measure.

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Homeotropic Alignment Effect for Nematic Liquid Crystal on the $SiO_x$ Thin Film Layer by New Ion beam Exposure (새로운 이온빔을 이용한 $SiO_x$ 박막 표면의 액정 배향 효과)

  • Choi, Sung-Ho;Kim, Byoung-Yong;Han, Jin-Woo;Oh, Yong-Cheul;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.311-312
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    • 2006
  • We studied homeotropic alignment effect for a nematic liquid crystal (NLC) on the $SiO_x$, thin film irradiated by the new ion beam method $SiO_x$ thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) and were treated by the DuoPIGatron ion source. A uniform liquid crystal alignment effect was achieved over 2100 eV ion beam energy. Tilt angle were about $90^{\circ}$ and were not affected by various ion beam energy.

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Investigation of Liquid Crystal Alignment on ion beam exposed polystyrene surface (이온빔을 조사한 폴리스타일렌 기판에서의 액정의 배향특성)

  • Hwang, Hyun Suk;Lee, Jong-Deok;Rho, Jungkyu;Han, Jeong-Min
    • Journal of Satellite, Information and Communications
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    • v.9 no.1
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    • pp.33-37
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    • 2014
  • This paper introduces homogeneous liquid crystal (LC) orientations on chemically modulated polystyrene (PS) surfaces using various ion beam (IB) exposure time. Transparent PS was replaced with conventional polyimide material. As a non-contact process, IB bombardment process induced LC orientation in the direction parallel to the IB process. Through x-ray photoelectron spectroscopy, it was shown that the chemical compositional changes of the IB-irradiated PS surfaces were determined as a function of IB exposure time.Using this analysis, the optimal IB bombardment condition was determined at IB exposure time of up to 15 s. Moreover, thermal stability on IB-irradiated PS surfaces were carried out which showed that a relatively high IB exposure time induced a thermally stable LC alignment property.

The penetration phenomena of LMIS Ga ion into amorphous Se-Ge thin film (비정질 Se-Ge 박막으로의 LMIS $Ga^+$ 이온 침투현상)

  • Lee, Hyun-Yong;Chung, Hong-Bay
    • Proceedings of the KIEE Conference
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    • 1993.07b
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    • pp.1262-1264
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    • 1993
  • An amorphous $Se_{75}Ge_{25}$ thin film as inorganic resist for the focused ion beam lithography(FIBL) is investigated. This film offers an attractive potential alternative to polymer resists because of a number of advantages, such as the possibility of preparing physically uniform films of thickness as small as 200A and obtaining both positive and negative resist action in the same material, compatibility with dry processing, the sensitivity on optical, e-beam and ion beam exposure, the high-temperature stability, etc. In previous paper, the defocused ion beam-induced characteristics in a-$Se_{75}Ge_{25}$ film has been propose. Practically it is neccesary to know the relation with resist and source ions. For the purpose, the ion stopping power, the ion projected range and ion transmission coefficiency are studied. In this paper, the theoretically calculated values of parameters are presented and compared with theory.

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Polarization-dependence of liquid crystal alignment on an organic surface with ion beam irradiation

  • Choi, Dae-Sub;Han, Jeong-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.208-208
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    • 2009
  • We used Brewster's Law to examine the mechanism of liquid crystal (LC) alignment on an organic insulation layer when subjected to ion-beam irradiation. Brewster's Law implies that the maximum rate polarized ray on a slanted insulation layers on the substrate and it illustrates the dependence of polarization and themechanical structure on the ion beam irradiation process. The pretilt angle of nematic LCs on the organic insulation surface was about $1.13^{\circ}$ for an ion beam exposure of $45^{\circ}$ for 1 minute at 1800eV. This shows the dependence of LC alignment on the polarization ratio in a slanted organic insulation layer.

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The effect of Ion Beam modification of Polyimide surface on alignment properties of liquid crystals

  • Cho, Seong-Jin;Kim, Chan-Soo;Roh, Jin-A;Gwag, Jin-Seog;Kim, Jae-Chang
    • Journal of the Korean Vacuum Society
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    • v.12 no.S1
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    • pp.107-112
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    • 2003
  • The alignment effect of liquid crystals on Polyimide surfaces bombarded by a low energy argon ion beam and the effect of pretilt angle on viewing characteristics of an LCD cell are discussed. The unidirectional out-of-plane liquid crystal tilt angle is varied with various ion beam irradiation conditions, such as the energy of the incident ions, the angle of incidence and exposure time. As low pretilt angle is profitable for wider viewing property, LCD cell with ion beam modified Polyimide layer show wider viewing characteristics.