• 제목/요약/키워드: Ion beam exposure

검색결과 104건 처리시간 0.029초

이온빔을 이용한 폴리이미드 표면의 액정배향효과 (Liquid Crystal Alignment Effect on Polyimide Surface by Ion-beam Irradiation)

  • 박홍규;오병윤;김영환;김병용;한정민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.330-330
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    • 2008
  • It is widely investigated to liquid crystal (LC) alignment using non-contact alignment method such as ion-beam (IB) irradiation, UV alignment, and oblique deposition. Because conventional rubbing method has some drawbacks. These include defects from dust and electrostatic charges and rubbing scratch during rubbing process. In addition, rubbing method needs additional process to remove these defects. Therefore rubbing-free methods like ion-beam irradiation are strongly required. We studied LC alignment effect on poly imide surface by IB irradiation and electro-optical (EO) characteristics of twisted nematic liquid crystal display (TN-LCD). In this experiment, a good uniform alignment of the nematic liquid crystal (NLC) with the ion-beam exposure on the polyimide (PI) (SE-150 from Nissan Chemical) surface was observed. We also achieved low pretilt angle as a function of ion-beam irradiation intensity. In addition, it can be obtained the good EO properties of the IB-aligned TN-LCD on PI surface. Some other experiments results and discussion will be included in the poster.

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Tilted Homeotropic Alignment using Ion Beam Process; Development of Novel Inorganic thin films

  • Hwang, Byoung-Har;Kim, Kyung-Chan;Ahn, Han-Jin;Kim, Jong-Bok;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.450-452
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    • 2005
  • The ion beam alignment technique is one of the potential and fascinating methods. However, there are merely a few reports about aligning nematic liquid crystals (NLCs) horizontally for in-plane switching mode (IPS) by means of low energy ion beam exposure on inorganic materials such as DLC. In this study, we have investigated the tilted vertical alignment of NLC by the ion beam technique on the thin films of various amorphous silicon compounds as new inorganic alignment materials. Appropriate pretilt angles of NLC with preferred orientation on these thin films were achieved. And the electro-optic property of vertically aligned single domain cells has been investigated.

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무기 박막을 이용한 이온빔 배향 FFS 셀의 전기광학특성에 관한 연구 (A Study on Electro-optical Characteristics of the Ion Beam Aligned FFS Cell on a Inorganic Thin Film)

  • 황정연;박창준;정연학;김경찬;안한진;백홍구;서대식
    • 한국전기전자재료학회논문지
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    • 제17권10호
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    • pp.1100-1106
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    • 2004
  • In this paper, we intend to make fringe-field switching (FFS) mode cell by the ion beam (IB) alignment method on the a-C:H thin film, to analyze electro-optical characteristics in this cell. We studied on the suitable inorganic thin film for fringe-field switching (FFS) cell and the aligning capabilities of nematic liquid crystal (NLC) using the alignment material of a-C:H thin film as working gas at 30 W rf bias condition. A high pretilt angle of about 5 $^{\circ}C$ by ion beam (IB) exposure on the a-C:H thin film surface was measured. Consequently, the high pretilt angle and the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film surface as working gas at 30 W rf bias condition can be achieved. An excellent voltage-transmittance (V -T) and response time curve of the IE-aligned FFS-LCD was observed with oblique IB exposure on the a-C:H thin films. Also, AC V-T hysteresis characteristics of the IB-aligned FFS-LCD with IE exposure on the a-C:H thin films is almost the same as that of the rubbing-aligned FFS cell on a polyimide (PI) surface.

Homeotropic Alignment Effect for Nematic Liquid Crystal on the SiOx Thin Film Layer by New Ion Beam Exposure

  • Han, Jeong-Min;Choi, Sung-Ho;Kim, Byoung-Yong;Han, Jin-Woo;Hwang, Jeoung-Yeon;Ok, Chul-Ho;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • 제7권6호
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    • pp.293-296
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    • 2006
  • We studied homeotropic alignment effect for a nematic liquid crystal (NLC) on the $SiO_{x}$ thin film irradiated by the new ion beam method. $SiO_{x}$ thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) and were treated by the DuoPIGatron ion source. A uniform liquid crystal alignment effect was achieved over 2100 eV ion beam energy. Tilt angle were about $90^{\circ}$ and were not affected by various ion beam energy.

Alignment of Nematic Liquid Crystals on Polyimide Surface Bombarded by $Ar^+$ Beam

  • Gwag, Jin-Seog;Lee, Seo-Hern;Park, Kyoung-Ho;Park, Won-Sang;Han, Kwan-Yougn;Yoon, Tae-Hoon;Kim, Jae-Chang;Kim, Hee;Cho, Seong-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.409-412
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    • 2002
  • We found that polyimide surfaces bombarded by a low energy argon ion beam align liquid crystals. The pretilt angle of the liquid crystals is controlled by ion beam parameters, such as the energy of the incident ions, the angle of incidence, exposure time and current density. The alignment direction of liquid crystal on substrates corresponded to ion beam direction. By argon ion beam the pretilt angle of the liquid crystals was controlled between $0.5^{\circ}$ and $4^{\circ}$for SE-3140 under the proper conditons. By the atomic force microscope (AFM), polyimide surfaces before and after bombarded by ion beam are compared.

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PI와 유기 절연막 과의 전기광학 특성 비교에 관한 연구 (Study on Electro-Optical Specific of Polyimide and Organic Overcoat)

  • 김병용;김종환;한정민;김영환;강동훈;김종연;옥철호;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.376-376
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    • 2007
  • In Liquid Crystal Display (LCD) manufacturing, the organic over coat materials over coat materials for insulation layer of color filter with acryl ate was widely used. Therefore, we approach that the organic overcoat material can use to insulation layer for color filter and liquid crystal (LC) alignment layer in this research. The LC aligning capabilities was successful stuided for the first time. The organic overcoat layer and polymer layer was coated by spin-coating. In order to characterize the LC alignment, electric optic and residual DC and atomic force microscopy (AFM) image was used. The good LCD aligning capabilities treated on the organic overcoat thin film surfaces with ion beam exposure of $45^{\circ}$ above ion beam energy density of 1200 eV can be achieved. Also the good LCD alignment capabilities treated polymer on surfaces with ion beam exposure of $45^{\circ}$ above ion beam energy density of 1800 eV can be achieved. Comparing electro-optical characteristics between the Polyimide (PI) and the overcoat, the resultant transmittance of the overcoat considerably matched that of the PI and the residual DC also exhibited similar features with the PI.

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고휘도 휴대용 디스플레이를 위한 액정소자의 폴리스타일렌 배향막에 관한 연구 (Chemically modulated polystyrene surface using various ion beam exposure time for liquid crystal alignment of high brightness mobile display)

  • 조명현;이호영
    • 한국위성정보통신학회논문지
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    • 제9권3호
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    • pp.22-26
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    • 2014
  • 본 연구에서는 액정의 수직배향을 달성하기 위해서 특별히 제조된 폴리스타일렌 박막에 다양한 이온빔을 조사하는 방법을 사용하였다. 일반적으로 폴리스타일렌 수지는 통상의 폴리이미드 계열의 수지에 비해서 박막코팅을 하였을 때 보다 우수한 투과율을 나타내므로, 투과형 디스플레이로 사용되는 LCD의 배향막 재료로 더 적합하다고 생각되었다. 특히 고휘도이면서 저전력 사양을 달성하여야 하는 휴대용 디스플레이에서의 응용가능성이 기대되었다. 그러나, 일반적인 러빙법에 의한 배향처리에 대해서는 액정분자의 배향성이 폴리이미드 계열의 재료에 비해서 열등하여 사용되지 못하였다. 본 연구에서는 폴리스타일렌 계열의 박막재료를 배향막으로 가공함에 있어서 새로운 이온빔 조사법에 의한 비접촉식 배향법을 사용하였으며, 배향성과 액정분자의 프리틸트각 특성에 대해서 정량적인 결과를 얻을 수 있었다. 실험에서는 폴리스타일렌 수지에 이온빔의 조사시간을 15초까지 변화시키면서 액정분자의 배향성 및 프리틸트각의 특성을 측정하였다. 측정결과 스마트폰 및 휴대용 정보단말기 등의 디스플레이에 적합한 고투과율 액정표시소자의 구현이 가능하였다.

집속 이온빔 마이크로리소그라피를 위한 비정질 $Se_{75}Ge_{25}$ 무기질 레지스터의 이온 유기 변화 (Ion-Induced Changes in a $Se_{75}Ge_{25}$ Inoaganic Resist for Focused Ion Beam Microlithgraphy)

  • 이현용;박태성;정홍배;강승언;김종빈
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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    • pp.30-33
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    • 1992
  • This thesis was investigated on ion-induced characteristics in a-$Se_{75}Ge_{25}$ positive and negative resists for focused-ion-beam microlithogaphy. The exposed a-$Se_{75}Ge_{25}$ inorganic thin film shows an increase in optical absorption after exposure to~$10_{16}$ dose of Ga+. The observed shift in the absorption edge toward longer wavelengths is consistent with that in films exposed to band-gap photons(~$10^{21}$photons/cm2). This result may be related with microstructural rearrangements with in the short range of SeGe network. Due to changes in the short range order, the chemical bonding may be affected, which results in increased chemical dissolution in ion-induced film. Also, this resist exhibits good thermal stability because of its high Tg(~$220^{\circ}C$). When focused ion beams are used for direct exposure of resist over a substrate, unwanted implantation of the substrate may be an issue. A possible way to avoid this is to match the thickness of the resist to the range of ions in the resist. Thin aspect is currently under investigation.

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이온빔 배향을 이용한 네마틱 액정의 프리틸트각 제어를 위한 통계적 모델링 (Statistical modeling of pretilt angle control for NLC using ion beam alignment)

  • 강희진;강동훈;이정환;윤일구;오용철;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.302-303
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    • 2006
  • The response surface modeling of the pretilt angle control using ion-beam (IB) alignment on nitrogen doped diamond-like carbon (NDLC) thin film layer is investigated. The response surface model is used to analyze the variation of the pretilt angle under various process conditions IB exposure angle and IB exposure time are considered as Input factors. The analysis of variance technique is used to analyze the statistical significance, and effect plots are also investigated to examine the relationships betweenthe process parameters and the response. The model can allow us to reliably predict the pretilt angle with respect to the varying process conditions.

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SiO 박막을 이용한 액정배향 효과 (Liquid Crystal Alignment Effects Using a SiO Thin Film)

  • 강형구;황정연;박창준;서대식;안한진;김경찬;김종복;백홍구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
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    • pp.198-201
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    • 2004
  • We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of a SiO thin film. The homogenous alignment can be obtain어 using ion beam (IB) exposure on the SIO thin film, when positive type NLC ($Delta\varepsilon$>0) was injected However, the homeotropic alignment can be obtained using ion beam (IB) exposure on the SiO thin film, when negative type NLC ($\Delta\varepsilon$>0) was injected The LC aligning ability on the SiO thin film depends on the dielectric anisotropy type of LC. It will be discussed.

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