• Title/Summary/Keyword: Ion Range

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An analysis of the ion penetration phenomena in amorphous $Se_{75}Ge_{25}$ thin film (비정질 $Se_{75}Ge_{25}$박막으로의 이온침투 현상 해석)

  • 이현용;정홍배
    • Electrical & Electronic Materials
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    • v.7 no.5
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    • pp.389-396
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    • 1994
  • The bilayer film of Ag/a-S $e_{75.G}$ $e_{25}$ and the monolayer film of a-S $e_{75.G}$ $e_{25}$ act as a negative-type and a positive-type resist in focused ion beam lithography, respectively. Using a model which takes into account the ion stopping power, the ion projected range, the ion concentration implanted into resists and the ion transmission coefficient, etc., the ion resist parameters are calculated for a broad range of ion energies and implanted doses. Ion sources of A $r^{+}$, S $i^{++}$ and G $a^{+}$ are used to expose resists. As the calculated results, the energy loss per unit distance by Ga'$^{+}$ ion is about 10$^{3}$[keV/.mu.M] and nearly constant for all energy range. Especially, the projected range and struggling for 80[keV] G $a^{+}$ ion energy are 0.0425[.mu.m] and 0.020[.mu.m], , respectively and the resist thickness of a-S $e_{75}$ G $e_{25}$ to minimize the ion penetration rate into a substrate is 0.118[.mu.m].u.m]..u.m].

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Monte-Carlo Simulation for Exposure and Development of Focused Ion Beam Lithography (집속이온빔 리소그라피 (Focused Ion Beam Lithography)외 노출 및 현상에 대한 몬데칼로 전산 모사)

  • Lee, Hyun-Yong;Kim, Min-Su;Chung, Hong-Bay
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1246-1249
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    • 1994
  • Thin amorphous film of $a-Se_{75}Ge_{25}$ acts as a positive resist in ion beam lithography. Previously, we reported the optical characteristics of amorphous $Se_{75}Ge_{25}$ thin film by the low-energy ion beam exposure and presented analytically calculated values such as ion range, ion concentration and ion transmission coefficient, etc. As the calculated results of analytical calculation, the energy loss per unit distance by $Ga^+$ ion is about $10^3[keV/{\mu}m]$ and nearly constant for all energy range. Especially, the projected range and struggling for 80 [KeV] $Ga^+$ ion energy are 0.0425[${\mu}m$] and 0.020[${\mu}m$], respectively. Hear, we present the results of Monte-Carlo computer simulation of Ga ion scattering, exposure and development in $a-Se_{75}Ge_{25}$ resist film for focused ion beam(FIB) lithography. Monte-Carlo method is based on the simulation of individual particles through their successive collisions with resist atoms. By the summation of the scattering events occurring in a large number N(N>10000) of simulated trajectories within the resist, the distribution for the range parameters is obtained. Also, the deposited energy density and the development pattern by a Gaussian or a rectangular ion beam exposure can be obtained.

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Optical Transmittance Property of Polycarbonate film at UV Range by ion Implantation (이온주입에 의한 PC(Polycarbonate) 필름의 자외선 영역 광 투과 특성)

  • 이재형;이찬영;김재근
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.12
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    • pp.1091-1096
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    • 2003
  • Ion implantation in polymeric materials can induce dramatic chemical modifications, such as bond breaking, cross linking, formation of new chemical products, which have strong influences on the macroscopic properties of the materials. In this study ion implantation was performed onto polymer, PC(polycarbonate), in order to investigate change of the optical transmittance property focusing ultraviolet ray range(200-400nm). PC was irradiated with N, Ar, Kr, Xe ions at the ion energy of 50keV and the dose range of 5 ${\times}$ 10$\^$15/, 1 ${\times}$ 10$\^$16/, 7${\times}$10$\^$16/ ions/$\textrm{cm}^2$. FT-IR, XPS, UV/Vis transmittance spectroscopy measurement technologies were employed to obtain chemical. structural properties and optical transmittance of irradiated polymer. The original PC(unimplanted) is quite transparent that it has more than 88% transmittance in the range UV-A(320∼400nm), but after ion implantation, surface colors were changed to the dark brown and the transmittance of UV ray decreased for all implantation condition, and the absorption edge was shift to visible range with increasing mass of implanted ion species and dose.

The Role of Excipients in Iontophoretic Drug Delivery: In vitro Iontophoresis of Isopropamide and Pyridostigmine through Rat Skin and Effect of Ion-pair Formation with Organic Anions

  • Shim, Chang-Koo
    • Journal of Pharmaceutical Investigation
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    • v.23 no.3
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    • pp.41-50
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    • 1993
  • The iontophoretic delivery across rat skin of quaternary ammonium salts (isopropamide: ISP, pyridostigmine: PS), which are positively charged over a wide pH range, was measured ill vitro. The study showed that: (a) iontophoresis significantly enhanced delivery of ISP and PS compared to respective passive transport; (b) delivery of ISP and PS was directly proportional to the applied continuous direct current density over the range of $0-0.69\;mA/cm^2;$ (c) delivery of ISP and PS was also proportional to the drug concentration in the donor compartment over the range of $0-2{\time}l0^{-2}M:$ (d) sodium ion in the donor compartment inhibited the drug transport possibly due to decreasing the electric transference number of the drug; (e) delivery of ISP and PS increased as the pH of the donor solution increased over the pH range 2-7 suggesting permselective nature of the epidermis, and inhibition of the transference number of the drugs by hydronium ion; (f) some organic anions such as taurodeoxycholate, salicylate and benzoate which form lipophilic ion-pair complexes with ISP inhibited the delivery of ISP. The degree of inhibition by the organic anions was linearly proportional to the extraction coefficient $(K_e)$ of ISP from the partition system with each counteranion between phosphate buffer (pH 7.4) and n-octanol. For PS, however, taurodeoxycholate, but not salicylate and benzoate inhibited the iontophoretic delivery. It suggests that not only sodium ion and hydronium ion but also the counteranions which form lipophilic ion-pairs with quaternary ammonium drugs are not favorable components in formulating the donor solution of the drugs to achieve an effective iontophoretic delivery.

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The Kinetics and Mechanism of the Hydrolysis of a 1,1-Dicyano-2-p-dimethylaminophenyl-2-chloroethylene (1,1-Dicyano-2-p-dimethylaminophenyl-2-chloroethylene의 가수분해 반응메카니즘과 그의 반응속도론적 연구)

  • Tae Rin Kim;Tae Seong Huh
    • Journal of the Korean Chemical Society
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    • v.18 no.6
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    • pp.430-436
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    • 1974
  • The rate constants of hydrolysis of 1,1-dicyano-2-p-dimethylaminophenyl-2-chloroethylene(DPC) were determined at various pH and the rate equation which can be applied over wide pH range is obtained. From the rate equation the mechanism of the hydrolysis of a DPC over wide pH range is fully explained; below pH 3 and above pH 7.5, the rate constant is proportional to the concentration of hydronium ion and hydroxide ion, respectively. However, in the range of pH 3 to 7.5, water, hydronium ion and hydroxide ion catalyze the hydrolysis of DPC.

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Suggestion for deep learning approach to solve the interference effect of ammonium ion on potassium ion-selective electrode

  • Kim, Min-Yeong;Heo, Jae-Yeong;Oh, Eun Hun;Lee, Joo-Yul;Lee, Kyu Hwan
    • Journal of Surface Science and Engineering
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    • v.55 no.3
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    • pp.156-163
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    • 2022
  • An ammonium ion with a size and charge similar to that of potassium can bind to valinomycin, which is used as an ion carrier for potassium, and cause a meaningful interference effect on the detection of potassium ions. Currently, there are few ion sensors that correct the interference effect of ammonium ions, and there are few studies that specifically suggest the mechanism of the interference effect. By fabricating a SPCE-based potassium ion-selective electrode, the electromotive force was measured in the concentration range of potassium in the nutrient solution, and the linear range was measured to be 10-5 to 10-2 M, and the detection limit was 10-5.19 M. And the interference phenomenon of the potassium sensor was investigated in the concentration range of ammonium ions present in the nutrient solution. Therefore, a data-based analysis strategy using deep learning was presented as a method to minimize the interference effect.

Temperature Dependence of Mn2+ Paramagnetic Ion in a Stoichiometric LiNbO3 Single Crystal

  • Yeom, Tae Ho;Lee, Soo Hyung
    • Journal of Magnetics
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    • v.18 no.3
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    • pp.221-224
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    • 2013
  • Electron paramagnetic resonance (EPR) spectra of $Mn^{2+}$ impurity ion in Stoichiometric $LiNbO_3$ single crystal (SLN) was investigated with an X-band EPR spectrometer in the temperature range of 3 K~296 K. The intensity of EPR spectrum of $Mn^{2+}$ ion was increased to 20 K and decreased again below 20 K as the temperature decreases. The zero-field splitting parameter D decreased as the temperature increases. It was suggested that $Mn^{2+}$ ion substitute for $Nb^{5+}$ ion instead of $Li^+$ ion. No changes for hyperfine interaction of $Mn^{2+}$ ion was obtained in the temperature range of 3 K~296 K.

A Study on Improvement of the Performance of Pulsed AC Ion Bar (1) (바 형태 정전기제거장치의 정전기제거성능 향상을 위한 연구 (1))

  • Lee, Dong Hoon;Choi, Dong Soo;Jung, Yong Chul;Kim, Sang Min
    • Journal of the Korean Society of Safety
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    • v.29 no.3
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    • pp.34-38
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    • 2014
  • In Display such as LCD, LED, and AMOLED or semiconductor related industries are required to have static ionizer in order to produce reliable goods since the ionizer can create balanced ion that is delivered to producing goods to minimize electrical damages when manufacturing. However, the most general type of ionization is called, "Corona Discharge" that has a slight chances to generate unequal and unstable amount of each +/- ion to the target object. Then, the ionization performance will drastically decrease and end up with quality deterioration problem. In this research, our objective to resolve the current issue via applying "Coupling Condenser" on each counter electrodes of Corona discharging type ionizer. The result is that the ion balance was maintained the satisfied range that is within +/-100V when we changed the duty ratio of the High Voltage of Pulse AC about 40 ~ 70%. In addition, when levelling the High Voltage of Pulse AC, the ion balance holds the range within +20 ~ 0V. Even though we have tested the same experiment for a year, we have seen the range changes roughly ${\pm}50V$.

Ion-Induced Changes in a $Se_{75}Ge_{25}$ Inoaganic Resist for Focused Ion Beam Microlithgraphy (집속 이온빔 마이크로리소그라피를 위한 비정질 $Se_{75}Ge_{25}$ 무기질 레지스터의 이온 유기 변화)

  • 이현용;박태성;정홍배;강승언;김종빈
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.05a
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    • pp.30-33
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    • 1992
  • This thesis was investigated on ion-induced characteristics in a-$Se_{75}Ge_{25}$ positive and negative resists for focused-ion-beam microlithogaphy. The exposed a-$Se_{75}Ge_{25}$ inorganic thin film shows an increase in optical absorption after exposure to~$10_{16}$ dose of Ga+. The observed shift in the absorption edge toward longer wavelengths is consistent with that in films exposed to band-gap photons(~$10^{21}$photons/cm2). This result may be related with microstructural rearrangements with in the short range of SeGe network. Due to changes in the short range order, the chemical bonding may be affected, which results in increased chemical dissolution in ion-induced film. Also, this resist exhibits good thermal stability because of its high Tg(~$220^{\circ}C$). When focused ion beams are used for direct exposure of resist over a substrate, unwanted implantation of the substrate may be an issue. A possible way to avoid this is to match the thickness of the resist to the range of ions in the resist. Thin aspect is currently under investigation.

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Simulation Study to Improve Ion Transmission Efficiency in Mass Spectrometry with a Dual Ion Funnel Ion Source

  • Baek, Sun Jong;Kim, Seung Yong;Kim, Taeman;Kim, Hyun Sik
    • Mass Spectrometry Letters
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    • v.4 no.4
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    • pp.91-94
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    • 2013
  • We performed computer simulations to improve transmission efficiencies of a dual ion funnel system implemented on an FT-ICR MS. We found that the low m/z range from 50 to 150 could be significantly improved by operating the two ion funnels at different RF amplitudes. These new operational conditions could be applied to analyze metabolome samples, which require high sensitivity in the m/z range from 50 to 1,000.