The Effects of Additional Gases(C,H,O) on Adhesive strength Ti$_{x}$ N Films Prepared by the DC Magetron Suttering Method
(DC Magetron Suttering법으로 제작한 Ti$_{x}$ N 박막의 밀착력에 미치는 첨가원소(C,H,O))
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- Journal of the Korean institute of surface engineering
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- v.31 no.3
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- pp.142-150
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- 1998