• 제목/요약/키워드: Ion Gun

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Alignment and lattice quality of hexagonal rings of hexagonal BN films synthesized by ion beam assisted deposition (이온빔보조증착법으로 합성한 hexagonal BN막의 hexagonal ring의 배열과 결정성)

  • 박영준;한준희;이정용;백영준
    • Journal of the Korean Vacuum Society
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    • v.8 no.1
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    • pp.43-50
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    • 1999
  • We have studied the alignment and the lattice quality of hexagonal rings of h-BN films synthesized by ion beam assisted deposition (IBAD) method. Boron was e-beam evaporated at 1.5 $\AA$/sec and nitrogen gas was ionized using end-hall type ion gun at 60, 80, and 100 eV, respectively. Substrate was either not heated or heated at 200, 400, 500, and $800^{\circ}C$, respectively. As nitrogen ion energy increases, c-axes of hexagonal rings tend to align parallel to the substrate, which is explained by larger compressive stress at higher ion energies. Alignment of c-axis increases with temperature and shows maximum around $400^{\circ}C$. The lattice quality of hexagonal rings improves with temperature. Such behaviors can be understood from two counter trends of increasing the atomic mobility and decreasing compressive stress with temperature. Hardness of h-BN films shows the same trend with the alignment of c-axis. Ion beam assisted deposition method seems to be effective for aligning hexagonal rings and optimizing h-BN properties.

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Study on HV Nano-second Pulse Electron Gun System (고전압 Nano-second펄스 전자총에 관한 연구)

  • Son, Y.K.;Park, S.J.;Jang, S.D.;Oh, J.S.;Cho, M.H.;NamKung, W.
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1391-1393
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    • 1995
  • An electron gun system for the Pohang Light Source has been installed and operated successfully. The basic design parameters are acceleration voltage of 80 kV, maximum peak emission current of 5 A, minimum pulse width of 1 ns, and maximum repetition rate of 100 Hz. The gun has a triode structure and is composed of a cathode, a focusing electrode(Wehnelt), and an anode. To sustain a $5{\times}10^{-9}$Torr vacuum, a $230{\ell}/s$ Ion pump has been adopted. We adopted a control and monitoring system based on the fiber-optic technology. In this article, we present the structure and operation principle of the system with special interest on the nanosecond pulser, remote control and monitoring system.

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Change of Refractive Index and Residual Stresses of Ta2O5 Thin Film Prepared by Dual Ion Beam Sputtering Deposition as the Substrate Temperature and Assist ion Beam Energy (이중 이온빔으로 제작한 Ta2O5 박막의 기판 온도 및 보조 이온빔 에너지에 따른 굴절률과 판류응력의 변화)

  • Yeon, Seok-Gyu;Kim, Yong-Tak;Kim, Hwek-Yung;Kim, Myoung-Jin;Lee, Hyung-Man;Yoon, Dae-Ho
    • Journal of the Korean Ceramic Society
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    • v.42 no.1
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    • pp.28-32
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    • 2005
  • The optical properties and intrinsic stress of $Ta_{2}O_{5}$ thin films deposited by Dual ion-Beam Sputtering: (DIBS) and Single ion-Beam Sputtering (SIBS) were studied as a function of the substrate temperature and assist ion beam voltage. The refractive index showed the maximum value (n = 2.144) at $150^{circ}C$ in the SIBS process. When the substrate temperature has above $150^{circ}C$ in the SIBS process the refractive index decreased. In the DIBS process, the increase of the substrate temperature affected the increase of the refractive index at a maximum value (n = 2.1117, at $200^{circ}C$). The low temperature process $(<100^{circ}C)$ can greatly reduce residual stress with the assist ion gun, but the high temperature process was unaffected. As the assist ion beam voltage increase from 250 to 350 V the refractive index increased to 2.185. However, the refractive index was decreased at the range of 350-650 V, As the assist ion beam voltage increased, the stress of the deposited film decreased to 0.1834 GPa at 650 V.

Visualization of Unsteady DC Electro-osmotic flow by using Methods of Coupling Fortran and CFX Codes (포트란-CFX 연동해석 기법을 이용한 비정상 DC 전기삼투 유동 가시화)

  • Heo, Young-Gun;Jeong, Jong-Hyeon;Suh, Yong-Kweon
    • Journal of the Korean Society of Visualization
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    • v.9 no.4
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    • pp.22-27
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    • 2011
  • In this study, we present methods of coupling a commercial code, ANSYS CFX, and the user Fortran codes for solving an unsteady electro-osmotic flow around a pair of electrodes, receiving DC, attached to the top and the bottom walls of a two-dimensional cavity. We developed a module of Fortran programs for solving the ion-transport equations as well as the Poisson equations for the potential to be used in coupling with the CFX. We present how the developed codes are applied to solving the transient DC electro-osmotic flow problem within a simple cavity. We also address various problems encountered during the development process and explain why such problems are raised.

Poling-dependent Ferroelectric Properties of SBN30 Thin Films (분극에 의한 SBN30 박막의 강유전특성 변화)

  • Jang, Jae-Hoon;Lee, Dong-Gun;Lee, He-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.309-312
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    • 2002
  • Ferroelectric $Sr_{0.3}Ba_{0.7}Nb_{2}O_{6}$ (SBN30) thin films were deposited on Pt/Ti/$SiO_{2}$/Si(100) substrates by ion beam sputtering. During annealing treatment at $750^{\circ}C$, poling was attempted by applying dc voltage bias across polished surfaces. Phase relation, microstructure and crystallization behavior were examined using XRD and FE-SEM. Ferroelectric hysteresis characteristics were also determined where both remanent polarization and coercive values decreased with the increase of bias voltage. The measured remanent polarization and coercive field values at 5 V and 10 V bias were $36{\mu}C/cm^2$, $10{\mu}C/cm^2$ and 100kV /cm, 80kV /cm, respectively.

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Two-Stage Charge Equalization Scheme for Hybrid Electric Vehicle Lithium-Ion Battery Cells

  • Park, Hong-Sun;Kim, Chong-Eun;Moon, Gun-Woo;Lee, Joong-hui
    • Proceedings of the KIPE Conference
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    • 2007.07a
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    • pp.241-243
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    • 2007
  • Two-stage charge equalization scheme for HEV lithium-ion battery string is proposed with the optimal power rating design rule in this paper, where in the first stage the over charged energy of higher voltage cells is drawn out to the single common output capacitor and then, that discharged energy is recovered into the overall battery stack in the second stage. To achieve charge equalization of sort, the conventional flyback DC/DC converters of low power and minimized size are employed. The industrial sample employing both the proposed two-stage cell balancing scheme and the optimal power rating design rule shows good cell balancing performance with reduced size as well as low voltage stresses of the electronic devices.

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Modularized Charge Equalization Converter for Hybrid Electric Vehicle Lithium-Ion Battery Stack

  • Park, Hong-Sun;Kim, Chong-Eun;Kim, Chol-Ho;Moon, Gun-Woo;Lee, Joong-Hui
    • Proceedings of the KIPE Conference
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    • 2007.07a
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    • pp.350-352
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    • 2007
  • Modularized charge equalization converter for HEV lithium-ion battery cells is proposed in this paper, in which intra-module and inter-module charge equalization can be achieved at the same time. For intra-module charge equalization, the conventional flyback DC/DC converters of low power and small size are employed, in which all of the primary sides are coupled in parallel for selective charge of the specific under charged cell within the module. For inter-module charge equalization, the flyback DC/DC converters are also added, in which all the secondary windings are electrically linked in parallel for automatic charge balancing among the modules. An engineering sample of forty cells hiring the proposed cell balancing scheme is implemented and its experimental result shows that the proposed modularized charge equalization circuit has good cell balancing performance.

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Deposition of hard coatings on polycarbonate substrate by high frequency ion beam

  • Kim, Sung-Ryong;Song, Jun-Seob;Choi, Young-Joon;Kim, Jong-Hun
    • Journal of Korean Vacuum Science & Technology
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    • v.2 no.2
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    • pp.101-106
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    • 1998
  • The poor wear and scratch properties of polycarbonate have limited its application in many fields. In order to improve the wear and scratch properties of polycarbonate we have deposited diamond like carbon (DLC) coatings. The diamond like carbon coatings were made using a high frequency ion beam gun by introducing H2 and CH4 gases. The coatings were characterized with Raman spectroscopy, scanning electron microscope, ellipsometer, microscratch tester and hazemeter. Polymeric hard coating was applied onto the polycarbonate substrate before depositing a DLC coating to investigate the effect of interlayer on the system's failure mode.

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Individual Charge Equalization Converter Using Selective Two Current Paths for Series Connected Li-ion Battery Strings

  • Kim, Chol-Ho;Park, Hong-Sun;Moon, Gun-Woo
    • Proceedings of the KIPE Conference
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    • 2008.06a
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    • pp.274-276
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    • 2008
  • This paper proposes an individual charge equalization converter using selective two current paths for series connected lithium-ion battery strings. In the proposed equalizer, a central equalization converter acting as a controllable current source is sequentially connected in parallel with individual batteries through an array of cell selection switches. A flyback converter with a modified rectifier realizes a controllable current source. A central equalization converter is shared by every battery cells through the cell selection switch, instead of a dedicated charge equalizer for each cell. With this configuration, although the proposed equalizer has one dc-dc converter, individual charge equalization can be effectively achieved for the each cell in the strings. Furthermore, since the proposed equalizer would not allocate the separated dc-dc converter to each cell, such that the implementation of great size reduction and low cost can be allowed. In this paper, an optimal power rating design guide is also employed to obtain a minimal balancing size while satisfying equalization requirements. A prototype for eight lithium-ion battery cells is optimally designed and implemented. Experimental results verify that the proposed equalization method has good cell balancing performance showing small size, and low cost.

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산소 및 아르곤 이온 보조빔을 이용하여 증착한 저온 Indim Tin Oside(ITO) 박막의 특성 연구

  • 김형종;김정식;배정운;염근영;이내응;오경희
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.100-100
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    • 1999
  • 가시광선 영역에서 높은 광학적 투과성과 함께 우수한 전기 전도성을 갖는 ITO 박막은 디스플레이 소자나 투명전극재료 등 다양한 분야에서 응용성이 더욱 증대되고 있다. 증착기판으로서 유리를 사용할 때 생기는 활용범위 제한을 극복하고자 최근 유기물 위에 증착이 가능한 저온 증착방법에 대한 연구가 활발히 이루어지고 있다. 그 가운데 이온빔과 같은 energetic한 beam을 이용한 박막의 제조는 기판을 플라즈마 발생지역으로부터 분리시켜 이온빔의 flux 및 에너지, 입사각 등의 자유로운 조절을 통해 상온에서도 우수한 성질의 박막 형성 가능성이 제시되어 왔다. 본 연구에서는 ion beam assisted evaporation방법을 이용하여 ITO 박막을 성장시켰으며, ion-surface interaction 효과가 박막 성장주에 미치는 영향을 이해하기 위하여 먼저 반응성 산소 이온빔에 비 반응성 아르곤 이온빔을 다양하게 변화시켜가며 증착하였으며, 이와 더불어 산소 분위기에서 아르곤 이온빔에 의한 ITO 박막의 특성 변화를 각각 관찰하였다. 증착전 후의 열처리 없이 상온에서 비저항이 ~10-4$\Omega$cm 이하로 낮고 80% 이상의 투과율을 갖는 ITO 박막을 성장시켰다. 실험에서 이용된 e-beam evaporation 물질은 In2O3-SnO2(1-wt%)였으며, 이온빔 source는 산소에 의한 filament의 산화를 막기 위해 filament cathodes type이 아닌 rf(radio-frequency)를 사용하였다. 중요 증착변수인 이온빔의 flux 변화는 산소와 Ar의 flow rate를 MFC로 조절하고 rf power를 변화시켜 얻었으며, 이온빔 에너지는 가속 grid의 가속전압 변화와 ion gun과 기판사이의 거리 조절을 통해 최적화하였다. 이온빔의 에너지와 flux는 Faraday cup으로 측정하였으며, 성박된 박막의 특성은 UV-spectrometer, 4-point probe, Hall measurement. $\alpha$-step, XRD, XPS 등을 이용하여 광학적, 전기적, 구조적 특성을 분석하였다.

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