• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.297-297
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• 2008

Buffer layers play an important role in the development of high critical current density coated conductor. $LaMnO_3$, $SrTiO_3$ and $BaZrO_3$ buffer layers were compatible with MgO surfaces and also provide a good template for growing high current density REBCO(RE=Rare earth) films. Systematic studies on the influences of pulsed laser deposition parameters (deposition temperature, deposition pressure, processing gas, laser energy density, etc.) on microstructure and texture properties of $LaMnO_3$, $SrTiO_3$ and $BaZrO_3$ films as buffer layer deposited on ion-beam assisted deposition MgO (IBAD_MgO) template by pulse laser deposition method, were carried out. These results will be presented together with the discussion on the possible use of this material in HTS coated conductor as buffer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.282-283
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• 2005

Ion beam assisted deposition(IBAD) technique was used to produce biaxially textured polycrystalline MgO thin films for high critical current YBCO coated conductor. Hastelloy tapes were continuous electropolished with very smooth surface for IBAD-MgO deposition, RMS roughness of Hastelloy tape values below 2 nm and local slope of less than $1^{\circ}$. After the polishing of the tape an amorphous $Y_2O_3$ and $Al_2O_3$ are deposited Biaxially textured MgO was deposited on amorphous layer bye-beam evaporation with a simultaneous bombardment of high energy ions. We had developed the RHEED to measure in-situ biaxial texture of film surface as thin as tens angstrom. And also ex-situ characterization of buffer layers was studied using XRD and SEM. The full-width at half maximum(FWHM) out of plane texture of IBAD-MgO template is $4^{\circ}$.

• 한국화재소방학회논문지
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• 제18권4호
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• pp.22-26
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• 2004

정전기 방전에 의하여 주위의 가연성 가스에 폭발을 일으킬 수 있는 가스관련시설, 석유화 학 공장, 화약공장, 필름생산공장, 반도체 공장 등과 같은 가연성 가스를 주로 취급하는 장소에서는 정전기를 제거하기 위해 제전기를 사용하고 있다. 본 연구에서는 이들 장소에서 주로 사용되고 있는 전압인가식제전기(static eliminator)의 Bar에서 발생하는 방전에 의한 가연성 가스의 폭발현상을 고찰하였다. 가연성 가스는 수소, 에틸렌, 프로판, 메탄 가스 등을 사용하였으며, 제전기의 이온발생 Bar의 길이, 이온발생 전극의 수 및 이온발생 전극에 인가되는 전압의 변화에 따른 점화 현상을 연구하였다. 연구결과 Bar의 길이가 짧을수록 폭발의 위험성이 증가됨을 확인할 수 있었으며 또한 900㎜이상의 Bar에서 전극의 수가 1개인 경우 일반적으로 사용하는 가연성 가스에서는 점화가 되지 않음을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• KEPCO Journal on Electric Power and Energy
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• 제5권4호
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• pp.249-256
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• 2019

국내에 향후 건설 예정인 도체귀로형 HVDC ±500 kV Double Bipole 가공송전선로의 최적선로 형상을 설계하고 송전선로에서 발생되는 전기환경장해를 검증하기 위해 실증시험장을 구축하여 1년간 전기환경장해 평가시험을 수행하였다. 또한, HVDC Double Bipole 실선로에서 인체의 지표면 전계인지도 평가시험을 통해 HVDC 실규모 실증선로 직하에서 인체가 직류 전계를 감지하는 임계값을 조사하여 HVDC ±500 kV Double Bipole 가공송전선로의 직류전계 설계기준안의 타당성을 검증하였다. HVDC ±500 kV Double Bipole 시험선로의 극형상은 전기환경장해와 운영관점에서 동일한 극성을 대각으로 배치하였으며, 국내 가공송전선로의 전기환경장해의 사회적인 수용성을 고려하여 선로에서 코로나방전이 거의 발생되지 않도록 소도체 방식은 6 도체를 선정하였다. 도체귀로형 HVDC ±500 kV Double Bipole 가공송전선로 방식인 Cardinal×6B를 적용한 실증시험결과, 선로 도체에서 코로나 방전이 거의 발생되지 않았으며, 따라서 지표면 전계와 이온전류밀도는 모두 국내 가공송전선로 설계 기준값을 만족하였다. 또한 선로직하에서 피조사자들에 대한 전계 인지도 평가결과, 피조사자들의 70%는 23 kV/m에 노출되어도 직류전계를 인지하지 못하는 결과를 나타냈다.

• Bulletin of the Korean Chemical Society
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• 제32권spc8호
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• pp.3031-3038
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• 2011

Ion-coordinating ruthenium complexes [cis-Ru(dcbpy)(L)(NCS)$_2$, where dcbpy is 4,4'-dicarboxylic acid-2,2'-bipyridine and L is 1,4,7,10-tetraoxa-13-azacyclopentadecane, JK-121, or bis(2-(2-methoxy-ethoxy)ethyl) amine, JK-122] have been synthesized and characterized using $^1H$ NMR, Fourier transform IR, UV/vis spectroscopy, and cyclic voltammetry. The effect of $Li^+$ in the electrolyte on the photovoltaic performance was investigated. With the stepwise addition of $Li^+$ to a liquid electrolyte, the device shows significant increase in the photo-current density, but a small decrease in the open circuit voltage. The solar cell with a hole conductor, the addition of $Li^+$ resulted in a 30% improvement in efficiency. The JK-121 sensitized cells in the liquid and solid-state electrolyte give power conversion efficiencies of 6.95% and 2.59%, respectively, under the simulated sunlight.

• 한국진공학회지
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• 제8권4B호
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• pp.507-513
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• 1999

8mol%-yttria-stabilized zirconia(YSZ) thin films as oxygen ion conductor were deposited by rf-magnetron sputtering, and the oxygen gas sensors with the structure of $SiO_2$ substrate/Ni-NiO mixed reference layer/Pt/YSZ/Pt were fabricated and their oxygen sensing properties were investigated. The steady-state electro-motive force (EMF) values were measured as a function of oxygen partial pressure ($PO_2;form 1.013\times10^3 \textrm{Pa \;to}\; 1.013\times10^5$Pa) and operating temperature ($300^{\circ}C$ to $700^{\circ}C$). The fabricated YSZ oxygen sensor showed the best oxygen sensing properties at 50$0^{\circ}C$. However, oxygen sensing properties were very low at the temperature lower than 30$0^{\circ}C$ due to the lack of oxygen ion mobility and at the temperature higher than $700^{\circ}C$ due 새 intermixing of materials between the layers. Especially, the YSZ sensor operating at $500^{\circ}C$ and oxygen partial pressure above $1.565\times10^4$Pa showed the oxygen sensing properties close to the values predicted by ideal Nernst equation.

• 센서학회지
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• 제14권4호
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• pp.258-264
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• 2005

Li+-ion conducting ($Li_{3}PO_{4}$) thin films with thickness of $0.3{\mu}m$, $0.65{\mu}$, $1.2{\mu}$ were deposited on $Al_{2}O_{3}$ substrate at room temperature by thermal evaporation. They were sintered at $700^{\circ}C$ and $800^{\circ}C$ for 2 hours, respectively. Reference electrode and sensing electrode were printed on Au-electrode by silk printing method. The EMF and the ${\Delta}EMF$/dec were increased with increasing the electrolyte thickness and sintering temperature. The sample sintered at $800^{\circ}C$ was shown a good response and recovery characteristics more than those sintered at $700^{\circ}C$. The Nernst's slop of 75 mV per decade was obtained at operating temperature of $500^{\circ}C$.

• 한국진공학회지
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• 제7권4호
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• pp.410-414
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• 1998

본 연구에서는 플라즈마 중합 반응의 기판 재질과 전극 위치에 대한 의존성을 규명 하기 위해서 Ar방전의 발광 분석을 행하였으며 제작된 박막의 가교성을 확인하기 위해서 전자빔 노광을 시켜보았다. 기판의 재질이 도체 및 절연체인 양자의 경우를 비교해 보면 전 자는 후자에 비해서 전체적으로 발광 스펙트럼의 피이크 강도가 크게 나타났으며, 준안정상 태에 대한 피이크와 이온에 대한 피이크를 검토한 결과, 기판이 절연물일 때는 전극의 위치 를 멀게 할수록 이온의 피이크 강도가 극단까지 떨어짐을 알 수 있었다. 제작된 중합스티렌 박막을 통하여 발광 스펙트럼의 변화에 따라서 막의 가교성 변화가 생기는 것을 알 수 있었 으며 이 막을 전자빔에 노광하였을 때, 기판이 절연물인 경우에는 패턴을 제작하는 것이 가 능하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.7-7
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• 2011

Quantum beam technology has been expected to develop breakthroughs for nanotechnology during the third basic plan of science and technology (2006~2010). Recently, Green- or Life Innovations has taken over the national interests in the fourth basic science and technology plan (2011~2015). The NIMS (National Institute for Materials Science) has been conducting the corresponding mid-term research plans, as well as other national projects, such as nano-Green project (Global Research for Environment and Energy based on Nanomaterials science). In this lecture, the research trends in Japan and NIMS are firstly reviewed, and the typical achievements are highlighted over key nanotechnology fields. As one of the key nanotechnologies, the quantum beam research in NIMS focused on synchrotron radiation, neutron beams and ion/atom beams, having complementary attributes. The facilities used are SPring-8, nuclear reactor JRR-3, pulsed neutron source J-PARC and ion-laser-combined beams as well as excited atomic beams. Materials studied are typically fuel cell materials, superconducting/magnetic/multi-ferroic materials, quasicrystals, thermoelectric materials, precipitation-hardened steels, nanoparticle-dispersed materials. Here, we introduce a few topics of neutron scattering and ion beam nanofabrication. For neutron powder diffraction, the NIMS has developed multi-purpose pattern fitting software, post RIETAN2000. An ionic conductor, doped Pr2NiO4, which is a candidate for fuel-cell material, was analyzed by neutron powder diffraction with the software developed. The nuclear-density distribution derived revealed the two-dimensional network of the diffusion paths of oxygen ions at high temperatures. Using the high sensitivity of neutron beams for light elements, hydrogen states in a precipitation-strengthened steel were successfully evaluated. The small-angle neutron scattering (SANS) demonstrated the sensitive detection of hydrogen atoms trapped at the interfaces of nano-sized NbC. This result provides evidence for hydrogen embrittlement due to trapped hydrogen at precipitates. The ion beam technology can give novel functionality on a nano-scale and is targeting applications in plasmonics, ultra-fast optical communications, high-density recording and bio-patterning. The technologies developed are an ion-and-laser combined irradiation method for spatial control of nanoparticles, and a nano-masked ion irradiation method for patterning. Furthermore, we succeeded in implanting a wide-area nanopattern using nano-masks of anodic porous alumina. The patterning of ion implantation will be further applied for controlling protein adhesivity of biopolymers. It has thus been demonstrated that the quantum beam-based nanotechnology will lead the innovations both for nano-characterization and nano-fabrication.