• Title/Summary/Keyword: Interferometry method

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A Study on the Measurement of Vibration Mode Shape using Holographic interferometry (홀로그래픽 간섭법을 이용한 진동모드의 계측에 관한 연구)

  • 김광래
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.3
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    • pp.130-135
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    • 2000
  • In this study the vibration behavior of the stiffened double cylinder was experimently analyzed. Due to the complex structure of the double cylinder the outside cylinder frequency responses to the exciting forces applied on various posi-tions were analyzed by using spectrum analyzer in conjunction with an accelerometer and the natural frequencies were obtained. The technique of time-averaged holographic interferometry is applied to study the vibration characteristics of outside cylinder with stiffening T frame. The experimental data showed that the T frame had salient effect of damping on the testing structure at most of resonances. however the experimental results also revealed interesting phenomenon. At some particular frequencies the T frame. The experimental data showed that the T frame had salient effect of damping on the testing structure at most of resonances. However the experimental results also revealed interesting phenomenon. At some particular frequencies the T frame seemed to behave as a transmitter. In addition it has been successfully demon-started that optical method such as holographic interferometry is well suited for the identification of mode shapes. They can give us a whole-field non-contact measurement instead of the point-wise measurement by accelerometer in classical modal testing.

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Thickness Measurement of a Transparent Thin Film Using Phase Change in White-Light Phase-Shift Interferometry

  • Kim, Jaeho;Kim, Kwangrak;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.1 no.5
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    • pp.505-513
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    • 2017
  • Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

Adaptive Extraction Method for Phase Foreground Region in Laser Interferometry of Gear

  • Xian Wang;Yichao Zhao;Chaoyang Ju;Chaoyong Zhang
    • Current Optics and Photonics
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    • v.7 no.4
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    • pp.387-397
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    • 2023
  • Tooth surface shape error is an important parameter in gear accuracy evaluation. When tooth surface shape error is measured by laser interferometry, the gear interferogram is highly distorted and the gray level distribution is not uniform. Therefore, it is important for gear interferometry to extract the foreground region from the gear interference fringe image directly and accurately. This paper presents an approach for foreground extraction in gear interference images by leveraging the sinusoidal variation characteristics shown by the interference fringes. A gray level mask with an adaptive threshold is established to capture the relevant features, while a local variance evaluation function is employed to analyze the fluctuation state of the interference image and derive a repair mask. By combining these masks, the foreground region is directly extracted. Comparative evaluations using qualitative and quantitative assessment methods are performed to compare the proposed algorithm with both reference results and traditional approaches. The experimental findings reveal a remarkable degree of matching between the algorithm and the reference results. As a result, this method shows great potential for widespread application in the foreground extraction of gear interference images.

A Study on Measurement and Analysis of In-Plane Deformations by Using Laser Speckle Interferometry (II) (레이저 스페클 간섭법을 이용한 면내 변형 측정 및 해석에 대한 연구 (II))

  • 강영준;노경완;나의균
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.12
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    • pp.113-119
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    • 1998
  • Recently Electronic Speckle Pattern Interferometry(ESPI) has been studied because it has the advantages to be able to measure the whole-field surface deformations of engineering components and materials in industrial areas with noncontact. The speckle patterns to be formed with interference phenomena of scattering light from rough surfaces illuminated by laser light have phase informations of surface deformations. In this study we used this interference phenomena and the phase shifting method to measure the inplane deformations, together with the use of digital image equipment to process the informations contained in the speckle pattern and to display consequent interferograms on TV monitor. FEA was performed before experiments and we obtained good agreement between the experimental results and FEA.

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Characterization of Polyolefin Bumper Recycled by Chemical Removal Method using Electronic Speckle Pattern Interferometry (화학적 박리방법과 ESPI에 의한 재생된 폴리올레핀 범퍼수지의 물성평가)

  • 김현경;강기수;김경석;홍진후
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.295-298
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    • 1997
  • Recycl ing of PP/EPR based bumper coated with polyester urethane paint has been per formed by chemical decoating method. Electronic Speckle Pattern Interferometry (ESP11 has been applied to characterize the deformation of polyolef in based bumper. In additon, physical properties and processability of recycled materials have been investigated by dynamic mechanical thermal analysis, impact test and melt flower index measurement. The results show that the deformation ratio of recycled material is higher than that of virgin one. The morphological change of EPR, degree of distribution and dispersion during the recycling process seem to be the most important factor for the deformation and the mechanical properties of recycled materials. The experimental results obtained show that ESPI is very powerful technique to study the thermal mechanical property of polyolefin bumper system.

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A Study on the Vibration Characteristics of Stiffened Cylinder (보강된 실린더의 진동특성에 관한 연구)

  • Kim, Gwang-Rae;Jang, Yong-Hun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.3
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    • pp.408-414
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    • 2001
  • The structural characteristics of the stiffened double cylinder was investigated through experiment and analysis. The outside cylinder was excited with piezoelectric actuator and the mode shape of the cylinder with stiffening T frame was obtained by using holographic interferometry. Finite element method was applied for further modal investigation of the stiffened cylinder. The experimental results showed that the mode shape of cylinder was dependent on the exciting frequencies and the T frame showed salient effect of damping at most of the resonent frequencies. In particular frequencies, the T frame worked as a transmitter. FFM showed similar results with the experiments. This paper showed that the laser-based method such as holographic interferometry is well suited for investigation of the whole-field mode shapes and FEM has good performance to estimate the medal characteristics of the mechanical structure.

Measurement of Deformations in Micro-Area Using High Resolution AFM Scanning Moiré Technique (고분해능 원자 현미경 스캐닝 무아레 기법을 이용한 미소 영역의 변형량 측정)

  • Park, Jin-Hyoung;Lee, Soon-Bok
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.6 s.261
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    • pp.659-664
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    • 2007
  • $Moire\'{e}$ interferometry is a useful technique to assess the reliability of electronic package because $Moire\'{e}$ interferometry can measure the whole-field and real-time deformations. The shear strain of a small crack site is important to the reliability assessment of electronic package. The optical limitation of $Moire\'{e}$ interferometry makes ambiguous the shear strain of a small area. An atomic force microscope (AFM) is used to measure the profile of a micro site. High resolution of AFM can apply to the $Moire\'{e}$ technique. AFM $Moire\'{e}$ technique is useful to measure the shear strain of a small area. In this research, the method to accurately measure the deformation of a small area by using AFM $Moire\'{e}$ is proposed. A phase-shifting method is applied to improve the resolution of AFM $Moire\'{e}$.

Enhancement of Ionospheric Correction Method Based on Multiple Aperture Interferometry (멀티간섭기법에 기반한 이온왜곡 보정기법의 보완)

  • Lee, Won-Jin;Jung, Hyung-Sup;Chae, Sung-Ho;Baek, Wonkyung
    • Korean Journal of Remote Sensing
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    • v.31 no.2
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    • pp.101-110
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    • 2015
  • Synthetic Aperture Radar Interferometry (InSAR) is affected by various noise source such as atmospheric artifact, orbital error, processing noise etc.. Especially, one of the dominant noise source for long-wave SAR system, such as ALOS PALSAR (L-band SAR satellite) is the ionosphere effect because phase delays on radar pulse through the ionosphere are proportional to the radar wavelength. To avoid misinterpret of phase signal in the interferogram, it is necessary to detect and correct ionospheric errors. Recently, a MAI (Multipler Aperture SAR Interferometry) based ionospheric correction method has been proposed and considered one of the effective method to reduce phase errors by ionospheric effect. In this paper, we introduce the MAI-based method for ionospheric correction. Moreover we propose an efficient method that apply the method over non-coherent area using directional filter. Finally, we apply the proposed method to the ALOS PALSAR pairs, which include the west sea coast region in Korea. A polynomial fitting method, which is frequently adopted in InSAR processing, has been applied for the mitigation of phase distortion by the orbital error. However, the interferogram still has low frequency of Sin pattern along the azimuth direction. In contrast, after we applied the proposed method for ionospheric correction, the low frequency pattern is mitigated and the profile results has stable phase variation values within ${\pm}1rad$. Our results show that this method provides a promising way to correct orbital and ionospheric artifact and would be important technique to improve the accuracy and the availability for L-band or P-band systems.

Measurement Mothod for Internal Defect of Pipe by Using Phase Shifting Real-Time Holographic Interferometry (위상이동 실시간 홀로그래픽 간섭법을 이용한 파이프의 내부결함 측정법)

  • Kang, Young-June;Moon, Sang-Joon
    • Journal of the Korean Society for Precision Engineering
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    • v.13 no.2
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    • pp.68-75
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    • 1996
  • More accurate inspection method for facilities of nuclear power plants is required to guarantee the continuous and stable energy supply. The portion of inspection for pipes and pressure vessels is relatively big in the power plants. Conventional inspection methods using ultrasonic wave, x-ray and eddy current for nondestructive testing in nuclear power plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time, money and manpower. And the area to be inspected is limited by the location of probe or film. These difficulties make the inspection into a time-consuming work. We propose an optical defect detection method using phase shifting realtime holographic interferometry. This method has an advantage that the inspection can be performed at a time for relatively wide area illuminated by the laser beam, a coherent light source and can help an inspector recognize not only defects but also the high stressed areas. In this paper we show that the quantitative measurement using holographic interferometry and image processing for defect in pressure vessels is possible.

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A Study on Welding Residual Stress Measurement by Laser Inteferometry and Spot Heating Method (레이저 간섭법과 점 가열법을 이용한 용접부의 잔류응력 측정에 관한 연구)

  • Hong, Kyung-Min;Lee, Dong-Hwan;Kang, Young-June
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.3
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    • pp.101-108
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    • 2008
  • Residual stress is one of the causes which make defects in engineering components and materials. Many methods have been developing to measure the residual stress. Though these methods provide the information of the residual stress, they also have disadvantage like a little damage, time consumption, etc. In this paper, we devised a new experimental technique to measure residual stress in materials with a combination of laser speckle pattern interferometry and spot heating. The speckle pattern interferometer measures in-plane deformation during the heat provides for much localized stress relief. 3-D shape is used for determining heat temperature and other parameters. The residual stresses are determined by the amount of strain that is measured subsequent to the heat and cool-down of the region being interrogated. A simple model is presented to provide a description of the method. In this paper, we could experimentally confirm that residual stress can be measured by using laser interferometry and spot heating method.