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http://dx.doi.org/10.3795/KSME-A.2007.31.6.659

Measurement of Deformations in Micro-Area Using High Resolution AFM Scanning Moiré Technique  

Park, Jin-Hyoung (한국과학기술원 기계공학과)
Lee, Soon-Bok (한국과학기술원 기계공학과)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.31, no.6, 2007 , pp. 659-664 More about this Journal
Abstract
$Moire\ interferometry is a useful technique to assess the reliability of electronic package because $Moire\ interferometry can measure the whole-field and real-time deformations. The shear strain of a small crack site is important to the reliability assessment of electronic package. The optical limitation of $Moire\ interferometry makes ambiguous the shear strain of a small area. An atomic force microscope (AFM) is used to measure the profile of a micro site. High resolution of AFM can apply to the $Moire\ technique. AFM $Moire\ technique is useful to measure the shear strain of a small area. In this research, the method to accurately measure the deformation of a small area by using AFM $Moire\ is proposed. A phase-shifting method is applied to improve the resolution of AFM $Moire\.
Keywords
AFM; $Moire\; ACF;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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