• Title/Summary/Keyword: Interferometry method

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A Study on Measurement of Crack Length by using Laser Speckle Interferometry (레이저 스페클 간섭을 이용한 균열 길이 측정에 관한 연구)

  • Kang, Young-June;Bae, Jin-Kil;Ryu, Weon-Jae;Park, Nan-Kyu
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.5
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    • pp.34-41
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    • 2001
  • More accurate and fast inspection method for mechanical parts and structure is required to guarantee the safety. Conventional methods using compliance method, eddy current method, ultrasonic wave, acoustic emission for non-destructive testing in mechanical parts and structure have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time, money, and manpower. In this study, in order to overcome these shortcomings, we used In-plane Electronic Speckle pattern Interferometry(In-plane ESPI) that was full-field measurement and noncontact method. We detected the cracks of the specimen at a real time and measured the length of the crack by using In-place ESPI system. Finally, we compared this results with conventional microscope method.

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Evaluation of ALOS PALSAR Interferometry in the West Coast of Korea;Preliminary Results

  • Choi, Jung-Hyun;Lee, Chang-Wook;Won, Joong-Sun
    • Proceedings of the KSRS Conference
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    • 2007.10a
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    • pp.25-28
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    • 2007
  • Precise digital elevation model (DEM) is an important issue in coastal area where DEMs in a time series are especially required. Although LIDAR system is useful in coastal regions, it is not yet popular in Korea mainly because of its high surveying cost and national security reasons. Recently, precise coastal DEM have been made using radar interferometry, waterline method. One of these methods, Spaceborne imaging radar interferometry has been widely used to measure the topography and deformation of the Earth. We acquired ALOS PALSAR FBD mode (Fine Beam Dual) data for evaluating the quality of interferograms and their coherency. The purpose of this study is construction of DEM using the ALOS PALSAR data using radar interferometry and analysis of surface characteristics by coherence and magnitude map over the Ganghwado and Siwha tidal flats and near coastal lands.

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Accuracy Improvement and Systematic Bias Analysis of Scanning White Light Interferometry for Free-form Surfaces Measurements (자유 곡면 형상 측정을 위한 백색광 주사 간섭계의 정확도 향상 및 시스템 오차 분석)

  • Ghim, Young-Sik;Davies, Angela;Rhee, Hyug-Gyo
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.7
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    • pp.605-613
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    • 2014
  • Scanning white-light interferometry is an important measurement option for many surfaces. However, serious profile measurement errors can be present when measuring free-form surfaces being highly curved or tilted. When the object surface slope is not zero, the object and reference rays are no longer common path and optical aberrations impact the measurement. Aberrations mainly occur at the beam splitter in the interference objective and from misalignment in the optical system. Both effects distort the white-light interference signal when the surface slope is not zero. In this paper, we describe a modified version of white-light interferometry for eliminating these measurement errors and improving the accuracy of white-light interferometry. Moreover, we report systematic errors that are caused by optical aberrations when the object is not flat, and compare our proposed method with the conventional processing algorithm using the random ball test.

Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

  • Jo, Taeyong;Kim, KwangRak;Kim, SeongRyong;Pahk, HeuiJae
    • Journal of the Optical Society of Korea
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    • v.18 no.3
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    • pp.236-243
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    • 2014
  • Surface profiling and film thickness measurement play an important role for inspection. White light interferometry is widely used for engineering surfaces profiling, but its applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. The conventional bucket algorithm had given inaccurate surface profiles because of the phase error that occurs when a thin-film exists on the top of the surface. Recently, reflectometry and white light scanning interferometry were combined to measure the film thickness and surface profile. These techniques, however, have found that many local minima exist, so it is necessary to make proper initial guesses to reach the global minimum quickly. In this paper we propose combing reflectometry and white light scanning interferometry to measure the thin-film thickness and surface profile. The key idea is to divide the measurement into two states; reflectometry mode and interferometry mode to obtain the thickness and profile separately. Interferogram modeling, which considers transparent thin-film, was proposed to determine parameters such as height and thickness. With the proposed method, the ambiguity in determining the thickness and the surface has been eliminated. Standard thickness specimens were measured using the proposed method. Multi-layered film measurement results were compared with AFM measurement results. The comparison showed that surface profile and thin-film thickness can be measured successfully through the proposed method.

The measruement method for internal defect of pressure vessels by using holographic interferometry (홀로그래픽 간섭법을 이용한 압력용기의 내부결함 측정법)

  • 문상준;강영준;최장섭
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.04b
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    • pp.377-382
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    • 1995
  • Conventional measurement methods using ultrasonic wave or x-ray, eddy current for non-destructive testing(NDT) in nuclear power plants and other industrial plants have been performed as the method of contact with objects to be inspected. With this reason these methods have been taken relatively much time and the inspected area is limited by the location of probe or film. But holographic interferometry which is a non-contact optical measurement method using a coherent light source has an advantage that the quantitative measurement can be performed at a time. In this paper a new method using holographic interferometry and image processing for detecting internal flaws of pressure vessels is presented.

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Roughness Measurement Performance Obtained with Optical Interferometry and Stylus Method

  • Rhee Hyug-Gyo;Lee Yun-Woo;Lee In-Won;Vorburger Theodore V.
    • Journal of the Optical Society of Korea
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    • v.10 no.1
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    • pp.48-54
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    • 2006
  • White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

Focusing and Interferometry of a GB-SAR System (GB-SAR 시스템의 영상화 및 간섭기법)

  • Lee, Hoon-Yol;Cho, Seong-Jun;Sung, Nak-Hoon;Kim, Jung-Ho
    • 한국지구물리탐사학회:학술대회논문집
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    • 2007.06a
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    • pp.145-150
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    • 2007
  • We briefly introduce the theory of GB-SAR focusing and interferometry. Deramp-FFT algorithm is evaluated as a far-range, partial focusing method along with its limitations in the near-range application. Various interferometric configurations with temporal, spatial, and/or frequency baselines are also discussed.

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Encryption and decryption of binary data with 2-step phase-shifting digital interferometry (2-step 위상 천이 디지털 간섭계를 이용한 이진 데이터 암호화 및 복호화)

  • Byeon, Hyeon-Jung;Gil, Sang-Geun;Ha, Seung-Ho
    • Proceedings of the Optical Society of Korea Conference
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    • 2006.02a
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    • pp.335-336
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    • 2006
  • We propose a method of encryption and decryption of binary data using 2-step phase-shifting digital interferometry. This technique reduces the number of interferograms in the phase-shifting interferometry. The binary data has been expressed with random code and random phase. We remove the dc-term of the phase-shifting digital interferogram to restore the original binary data. Simulation results shows that the proposed technique can be used for binary data encryption and decryption.

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A Study on Shape Measurement by Using Electronic Speckle Pattern Interferometry (전자 스페클 패턴 간섭법을 이용한 형상 측정에 관한 연구)

  • 강영준;김계성
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.10
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    • pp.156-164
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    • 1998
  • Electronic Speckle Pattern Interferometry(ESPI) has been used to measure surface deformations of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive technique, is capable of providing full-field results with high spatial resolution and high speed. One of the important application using electronic speckle pattern interferometry is electronic speckle contouring of a diffused object for 3-D shape analysis and topography measurement. Generally the electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and the shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. We also describe formation process of depth contour fringes and grid contour fringes by shifting direction of the two illumination beams. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring, and then, the electronic speckle contouring experiment with various specimens. For quantitative analysis of the contour fringes, we used 4-frame phase shifting method with PZT Finally, good agreement between the geometric analysis and experimetal results is obtained.

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