• 제목/요약/키워드: Interferometry method

검색결과 301건 처리시간 0.028초

홀로그래픽 간섭계와 PIV를 이용한 Hele-Shaw Convection Cell 내부 열유동 해석 (Measurement of Thermal Flow in a Hele-Shaw Convection Cell Using Holographic Interferometry and PIV Technique)

  • 김석;이상준
    • 한국가시화정보학회:학술대회논문집
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    • 한국가시화정보학회 2002년도 추계학술대회 논문집
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    • pp.35-38
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    • 2002
  • Variations of temperature and velocity fields in a Hele-Shaw Convection Cell (HSC) were measured using a holographic interferometry and PIV technique with varying Rayleigh number. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow at high Rayleigh numbers. Two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed to measure the temperature field variations of HSC convective flow. In the double-exposure method, unwanted waves can be eliminated and reconstruction images are clear, but transient flow structure cannot be observed clearly. On the other hand, transient flow can be observed and reconstructed well using the real-time method. PIV results show that flow inside the HSC is periodic and the oscillating state is well matched with the temperature field results. The holographic interferometry and PIV techniques employed in this study are useful for analyzing the unsteady convective thermal fluid flows.

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마이크로 무아레 간섭계를 이용한 초정밀 변형 측정 (Nano-level High Sensitivity Measurement Using Microscopic Moiré Interferometry)

  • 주진원;김한준
    • 대한기계학회논문집A
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    • 제32권2호
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    • pp.186-193
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    • 2008
  • [ $Moir{\acute{e}}$ ] interferometry is an optical method, providing whole field contour maps of in-plane displacements with high resolution. The demand for enhanced sensitivity in displacement measurements leads to the technique of microscopic $moir{\acute{e}}$ interferometry. The method is an extension of the $moir{\acute{e}}$ interferometry, and employs an optical microscope for the required spatial resolution. In this paper, the sensitivity of $moir{\acute{e}}$ interferometry is enhanced by an order of magnitude using an immersion interferometry and the optical/digital fringe multiplication(O/DFM) method. In fringe patterns, the contour interval represents the displacement of 52 nm per fringe order. In order to estimate the reliability and the applicability of the optical system implemented, the measurements of rigid body displacements of grating mold and the coefficient of thermal expansion(CTE) for an aluminium block are performed. The system developed is applied to the measurement of thermal deformation in a flip chip plastic ball grid array package.

모듈레이팅 레이저를 이용한 ESPI 시스템 개발 (Development of ESPI System Using a Modulating LASER)

  • 이근영;강영준;박낙규;이동환
    • 한국정밀공학회지
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    • 제25권3호
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    • pp.93-100
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    • 2008
  • Laser interferometry is widely used as a measuring system in many fields because of its high resolution and ability to measure a broad area in real-time all at once. In conventional LASER interferometry, for example Out-of-plane ESPI(Electronic Speckle Pattern Interferometry), In plane ESPI, Shearography and Holography, it uses PZT or other components as a phase shift instrumentation to extract 3D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of LASER interferometry using a laser diode is proposed. Using LASER Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the LASER Diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact. This paper reports on a new approach to the LD Modulating interferometry that involves four-buckets phase shift method. This study proposes a four-bucket phase mapping algorithm, which was developed to have a guaranteed application, to stabilize the system in the field and to be a user-friendly GUI. In this paper, the theory for LD wavelength modulation and sinusoidal phase modulation of LD modulating interferometry is shown. Four-bucket phase mapping algorithm is then introduced.

Application of Phase-Shifting Method in Speckle Interferomtery to Measurement of Micro-Scale Displacement

  • Baek, Tae-Hyun;Kim, Myung-Soo
    • 비파괴검사학회지
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    • 제26권3호
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    • pp.162-168
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    • 2006
  • Speckle interferometry with phase-shifting method has been applied to measurement of micro-scale displacement through optical signal processing. Four-step phase-shifting method by PZT is used to measure out-of-plane displacement in spot-welded cantilever and results of optical experiments are comparable to those of FEM. Phase-shifting method using Fourier transform by PZT is applied to measurement of in-plane displacement on rectangular steel plate with a circular hole. The results of optical experiment agree well with theoretical calculation. New phase-shifting method in speckle interferometry has been implemented with a quarter wave plate. In-plane displacement of specimen is measured by the new phase-shifting method. Results of optical experiment show that the quarter wave plate can be used for phase-shifting method that is cheap and easy to use in speckle interferometry.

Hele-Shaw Cell 내부의 열유동 해석을 위한 홀로그래픽 간섭계와 2차원 PIV의 적용 (Application of Holographic Interferometry and 2-D PIV for HSC Convective Flow Diagnostics)

  • 김석;이상준
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.682-687
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    • 2003
  • The variations of temperature and velocity fields in a Hele-Shaw convection cell (HSC) were investigated using a holographic interferometry and 2-D PIV system with varying Rayleigh number. To measure quasisteady changes of temperature field, two different measurement methods of holographic interferometry; double-exposure method and real-time method, were employed. In the double-exposure method, unwanted waves can be eliminated effectively using digital image processing technique and the reconstruction images are clear, but transient flow structure cannot be reconstructed clearly. On the other hand, transient convective flow can be reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noises, compared with the double-exposure method. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow structure at high Rayleigh numbers. The periodic flow pattern at high Rayleigh numbers obtained by the real-time holographic interferometer method is in a good agreement with the PIV results.

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Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry

  • Hyun, Changhong;Kim, Seongryong;Pahk, Heuijae
    • Journal of the Optical Society of Korea
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    • 제18권5호
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    • pp.531-537
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    • 2014
  • Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

전자 광학적 훌로그래픽 간섭법을 이용한 진동물체의 모드형태 계측법 (Measurement Method of the Vibration Mode Shapes Using Electro-Optic Holographic Interferometry)

  • 최장섭;강영준
    • 대한기계학회논문집A
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    • 제20권2호
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    • pp.564-574
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    • 1996
  • This paper describes as Electronic Speckle Pattern Interferometry system which has been designed for measuring vibration patterns and quantitative measurement of vibration amplitude fields by using the time average method on a object. Visbility of fringe patterns is more improved by using the phase stepping and frame average method to reduce speckle and electric noise. And a bias vibration is introduced into the reference beam to shift the $\frac{2}{0}$ fringes so that fringe shift algorithms can be used to determine vibration amplitude. The experimental results are compared to those of the FFT analyzer and the FEM model analysis.

전자 스페클 간섭계에 의한 스피커 진동 해석 (Vibration Analysis of Loudspeaker by Using Electronic Speckle Pattern Interferometry)

  • 김정규;노경완;강영준;김동우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 추계학술대회 논문집
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    • pp.356-361
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    • 1996
  • Nowadays, Electronic Speckle Pattern Interferometry is a well established measuring technique with a wide range of industrial applications, particularly in the fields of deformation measurement and vibration analysis. Comparing with holographic inteferometry, it has some attractive features, which are rapid recording and reconstruction, satisfiable automation etc. Time-average ESPI was used to provide vibration mode shape of an object whose vibration amplitude is given as a fringe pattern. However, it is not possible to determine the direction of motions of a point on the object at any given time, because time-average method does not give any information about the phase of vibration. A better technique is stroboscopic method which can measure the amplitude and phase of vibrating surface. In this paper, loudspeakers were tested by these two methods and the mode shape and amplitude of vibration were visualized. As measured results, we can assume that these techniques will be applied directly in the loudspeaker industry.

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홀로그래픽 간섭법을 이용한 미소변형 측정법 (The Measurment Method of Small Deformation by using Holographic Interferometry)

  • 강영준;문상준
    • 한국정밀공학회지
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    • 제12권9호
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    • pp.52-58
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    • 1995
  • Conventional measurement methods for non-destructive testing(NDT) in nuclear power plants and other industrial plants have been performed as the methods of contact with objects to be inspect, but those methods have been taken relatively much time to be inspected. Holographic interferometry which is a non-contact optical measurement method using a coherent light can overcome these demerit, and also has an advantage that the quantitative measurement of small deformation for large areas can be accomplished at a time with high precision. In this paper the comparisons of the experimental results form holographic interferometry with those from the finite element method(FEM) and the analytical solutions of the elastic equation are discussed.

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전자 스페클 간섭계에 의한 스피커 진동 해석 (Vibration Analysis of Loudspeaker by Using Electronic Speckle Pattern interferometry)

  • 강영준
    • 한국생산제조학회지
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    • 제6권1호
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    • pp.92-99
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    • 1997
  • Nowadays, Electronic Speckle Pattern Interferometry is a well-established measuring technique with a wide range of industrial applications, particularly in the fields of deformation measurement and vibration analysis. Comparing with holographic interferometry, it has some attractive features, which are rapid recording and reconstruction, satisfiable automation etc. The Time-Average ESPI is used to provide vibration mode shape of an object whose vibration amplitude is given as a fringe pattern. Its merit is rapid and simple measurement for vibrating object. However, it is not possible to determine the direction of motions of a point on the object at any given time, because it does not give any information about the phase of vibration. But, Stroboscopic ESPI can measure the amplitude and phase of vibrating surface. In this paper, loudspeakers were tested by these two methods. As a result, we can assume that these techniques will be applied directly in the loudspeaker industry.

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