• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.2
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• pp.115-123
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• 2000

We propose an extended version of multi-step algorithm of self-calibration of interferometric optical testing instruments. The key idea is to take wavefront measurements with near equal steps in that a slight angular offset is intentionally provided in part rotation. This generalized algorithm adopts least squares technique to determine the true azimuthal positions of part rotation and consequently eliminates calibration errors caused by rotation inaccuracy. In addition, the required numbers of part rotation is greatly reduced when higher order spatial frequency terms are of particular importance.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.322-327
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• 2000

Natural convection heat transfer in an enclosure with an opening in the right vertical wall and a heat source at the bottom surface is investigated using a holographic interferometric technique. The effects of the opening length, divider length attached to the top wall, and heater temperature on the temperature distribution are examined. The openging length as well as the divider length greatly affects the degree of inflow and outflow of air. With a small opening, the opening doesn't affect much the upward warm air flow resulting in the symmetric temperature distribution. On the other hand, with the increase of the opening length, the inward cold flow moves the upward flow to the left direction. With the increase of the divider length, temperature in the lower region of enclosure becomes higher for the small opening and lower for the large opening.

• The Journal of the Korea Contents Association
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• v.2 no.3
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• pp.80-86
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• 2002

In this paper, we propose the new optical security technique using two phase holograms based on interferometer. The encoded random phase image does not have any information on the original image. Without Hewing the key mask, one cannot decode the encrypted image and regenerate the original image. And the use of two phase only images in the proposed security system leads to maximum optical efficiency (100% in theory). Also they cannot be detected by an intensity detector such as a CCD camera. Computer simulations and optical experiments show performance of the proposed methods.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Korean Journal of Remote Sensing
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• v.21 no.3
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• pp.221-228
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• 2005

Baekdusan is a Cenozoic stratovolcano in which a series of micro-seismic events and gaseous emissions have been reported in 1990s. Two-pass DInSAR technique was applied to determine displacement in the volcano by using 10 ERS SAR and 41 JERS-1 SAR datasets. Most interferometric phases out of 58 JERS-1 differential interferograms showed concentric fringe patterns that correlated with elevation. From an analysis of fringe-duration relation, the fringe patterns were found to be severely distorted specifically by stratified troposphere. To estimate the tropospheric delay, we used the data in the Sobaeksan located about 20 km away from the summit of Baekdusan. The maximum and mean magnitudes of the phase delay in the Baekdusan were respectively 13.8 cm and 3.8 cm over 1200 m in altitude. After removing tropospheric effects, a mean inflation rate was estimated to be about 3 mm per year from 1992 to 1998. Although the inflation rate of the volcano is inconclusive without ground truth data, the results indicate that there exists slow upward deformation in the Baekdusan volcano.

• Korean Journal of Optics and Photonics
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• v.3 no.1
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• pp.16-19
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• 1992

The Fourier transform spectra of a grating have been employed to determine the refractive index of a simple lens. The shearing interferometric technique is used for collimation testing of the expanded laser beam and for determining the exact focal plane. The slit attached to micro X-Y translator has been used to measure the distance between two sucessive diffraction orders in the back focal plane of the test lens. The experimental equipment is described and results are presented.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.1
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• pp.97-104
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• 2009

There is a many kinds with nondestructive testing such as RT and UT representatively. Referred before two testing methods there is a limit which is spatial such as nuclear pipe, small vessel, sealing up vessel. So a new technique needs to overcome the limit which is spatial. shearography will be able to overcome the limit which is spatial. This paper introducing shearography which was known as non-contact full-field testing method and It is an interferometric technique for measurement of surface deformation such as displacement or displacement gradient. Also, a research about internal defect of the flange welding zone was accomplished. About variation with method pressurized with the Gaseous Nitrogen. Phase map where is various were measured according to changing a sheared direction, size of crack and loaded pressure. Consequently, crack quantitatively to be detected qualitatively was measured by using shearography.

• Journal of the Optical Society of Korea
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• v.11 no.1
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• pp.18-25
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• 2007

We present an ultrahigh-resolution full-field optical coherence tomography (FF-OCT) implemented with a white-light interference microscope and a detector array as an alternative OCT technique. The use of detector array allows the capture of two-dimensional en-face images in parallel without taking any lateral scanning process. The phase shifting interferometric technique with the sinusoidal phase modulation (SPM) is utilized to get the demodulated OCT images. The configuration of the system and the resolution of the obtained image are presented. The topographic images, taken with the implemented system, of a coin, an integrated circuit chip, and the tomographic images of an onion epithelium are demonstrated also. Axial and lateral spatial resolution of ${\sim}1.0{\mu}m$ and ${\sim}2.0{\mu}m$ are achieved with the system respectively.