• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.10a
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• pp.18-23
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• 1995

The study was carried out to develope a precision positioning apparatus, consisting of DC servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system, Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by DC servo motor. Control system output a signal from laser interferometer and microsense to amplifier of DC servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.56-62
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• 1999

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.2
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• pp.188-196
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• 2003

Liquid-assisted cleaning technology utilizing a nanosecond laser pulse is effective for removing submicron particulates from a variety of solid substrates. In the technique, saturated vapor is condensed on a solid surface to form a thin liquid film and the film is evaporated explosively by laser heating. The present work studies the role of liquid-film evaporation in the cleaning process. First, optical interferometry is employed for in-situ monitoring the displacement of the laser-irradiated sample in the cleaning process. The experiments are performed for estimating the recoil force exerted on the target with and without liquid deposition. Secondly, time-resolved visualization and optical reflectance probing are also conducted for monitoring the phase-change kinetics and plume dynamics in vaporization of thin liquid layers. Discussions are made on the effect of liquid-film thickness and dynamics of plume and acoustic wave. The results confirm that cleaning force is generated when the bubble nuclei initially grow in the strongly superheated liquid.

• Korean Journal of Optics and Photonics
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• v.6 no.4
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• pp.365-372
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• 1995

A signal processing technique for interferometric fiber-optic sensors is proposed. It does not require a any special optic components such as phase modulator, $3times3$ couplers,to obtain the full sensitivity of the interferometer. Instead, it requires a reference interferometer for phase referencing and a reference mirror for intensity referencing, but intensity referencing can be done without using the r reference mirror. The new technique utilizes the frequency chirping of the laser diode to process t the sensor signal with both wide dynamic range and high sensitivity of the interferometer. It was a applied to an internal-mirrored FP interferometric temperature sensor to obtain the system noise of $4\times10^{-3\circ}C$ from I cm FP Interferometor sensor device.