Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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A Study on the Design and Control Super-Precision Positioning Apparatus

초정밀 위치결정기구의 제어성능 평가에 관한 연구

  • 김재열 (조선대학교 공과대학 기계공학부, 수송기계부품자동화 연구센터) ;
  • 송찬일 (조선대학교 공과대학 전기제어계측공학부) ;
  • 곽이구 (조선대학교 대학원 정밀기계공학과) ;
  • 마상동 (조선대학교 대학원 정밀기계공학과) ;
  • 한재호 (송원대학 자동차과) ;
  • 이승찬 (대한상공회의소 광주직업훈련원 자동차설비과)
  • Published : 1999.05.01
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Abstract

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

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