Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 1999.05a
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- Pages.56-62
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- 1999
A Study on the Design and Control Super-Precision Positioning Apparatus
초정밀 위치결정기구의 제어성능 평가에 관한 연구
Abstract
We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.
Keywords
- Piezoelectric actuator;
- Fine positioning;
- Coarse positioning;
- Resolution;
- DSP(digital signal processing);
- roportional-integral-differential control
- 압전소자 엑츄에이터;
- 미동위치결정;
- 조동위치 결정;
- 분해능;
- PID제어;