• Journal of the Korean Society for Precision Engineering
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• v.33 no.4
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• pp.295-301
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• 2016

The out-of-squareness is one of the error sources that affect the positioning accuracy of machine tools and coordinate measuring machines. Laser interferometer is widely used to measure the position and angular errors, and can measure the squareness using an optical square. However, the squareness measurement using the laser interferometer is difficult, as compared to other errors due to complicated optics setup and Abbe's error occurrence. The effect of out-of-squareness mainly appears at the face-diagonal of the movable plane. The diagonal displacements are also affected by the position dependent geometric errors. In this study, the squareness estimation techniques via diagonal displacement measurement using the laser interferometer without an optical square were proposed. For accurate estimation and measurement time reduction, the errors selected from proposed discriminant were measured. Discrepancy between the proposed technique with the laser interferometer (with an optical square) result was $0.6{\mu}rad$.

• Korean Journal of Optics and Photonics
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• v.6 no.4
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• pp.365-372
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• 1995

A signal processing technique for interferometric fiber-optic sensors is proposed. It does not require a any special optic components such as phase modulator, $3times3$ couplers,to obtain the full sensitivity of the interferometer. Instead, it requires a reference interferometer for phase referencing and a reference mirror for intensity referencing, but intensity referencing can be done without using the r reference mirror. The new technique utilizes the frequency chirping of the laser diode to process t the sensor signal with both wide dynamic range and high sensitivity of the interferometer. It was a applied to an internal-mirrored FP interferometric temperature sensor to obtain the system noise of $4\times10^{-3\circ}C$ from I cm FP Interferometor sensor device.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• The Korean Journal of Ceramics
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• v.5 no.4
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• pp.409-413
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• 1999

A two-beam polarization (TBP) interfermeter with a reflection configuration for measuring the linear electroptic coefficient is described and investigated experimentally and theoretically. It is shown that a TBP interferometer can be used for measuring the Pockels coefficient of thin film with a strong Fabry-Perot effect. The TBP interferometer technique is used to measure the effective differential linear electro-optic coefficient $re=r_{33}-(n_0/n_0)^3r_{13}$of lead zirconate titanate (PZT) thin film. The results are in agreement with known data.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.214-219
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• 1997

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600-1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with aims to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial mode laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, whlch allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.307-308
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• 2007

We present a novel chromatic dispersion measurement method using a spectral domain interferometer for single mode optical fiber over a wide spectral range (200 nm). This technique is based on the Mach-Zehnder interferometer using a white light source and spectrometer. A phase was directly retrieved from a measured spectral interferogram to obtain relative group velocity, chromatic dispersion and dispersion slope. The measured results with the proposed method were compared with those obtained using a conventional measurement method. Those results have good agreement with each other. Our proposed method can simply, accurately, and quickly (< 500 ms) measure chromatic information for a short length of optical fiber as well as optical device.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.248-253
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• 2004

We propose a near- field scanning optical interferometer (NSOI) based on the facet reflection of a nano-sized moveable tapered optical fiber. The interferometer can measure the position and the wave-front of a focused spot simultaneously. The interfering fringes are generated by the reflected beams from the sample surface and from the fiber facet. The wave-front analysis at the focusing position is obtained by using a phase shifting technique with a four-step algorithm. It is found that the resolution for controlling the focal position of our proposed NSOI is less than λ/3 and the measured wave-front aberration at the focal position is in good agreement with the ones obtained by a Twyman-Green interferometer.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.46-50
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• 2008

The present status and future prospects of the levitation mass method (LMM), a technique for precision mass and force measurement, are reviewed. In the LMM, the inertial force of a mass levitated using a pneumatic linear bearing is used as the reference force applied to the objects being tested, such as force transducers, materials, or structures. The inertial force of the levitated mass is measured using an optical interferometer. We have modified this technique for dynamic force calibration of impact, oscillation, and step loads. We have also applied the LMM to material testing, providing methods for evaluating material viscoelasticity under an oscillating or impact load, evaluating material friction, evaluating the biomechanics of a human hand, and generating and measuring micro-Newton-level forces.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.3
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• pp.188-194
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• 2016

We propose an acousto-optic technique for the nondestructive evaluation of adhesion properties of a Pt/Ti thin-film interface. Since there are some problems encountered when using prevailing techniques to nondestructively evaluate the interfacial properties of micro/nano-scale thin-films, we applied an interferometer that combined the acoustic and optical methods. This technique is based on the Michelson interferometer but the resultant surface of the thin film specimen makes interference instead of the mirror when the interface is excited from the acoustic transducer at the driving frequency. The thin film shows resonance-like behavior at a certain frequency range, resulting in a low-contrast fringe pattern. Therefore, we represented quantitatively the change in fringe pattern as a frequency spectrum and discovered the possibility that the interfacial adhesion properties of a thin film can be evaluated using the newly proposed technique.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.29 no.3
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• pp.275-281
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• 2011

To acquire an underwater topographic information is necessary for the design and construction of structures in marine and inland water. It consists of water depth information by bathymetric survey and underwater bottom topography image information can be obtained by side scan sonar in different ways. For the purpose of providing high quality data by means of engineering site survey, it is necessary to apply simultaneous acquisition of two information and carry out the integrated interpretation to each other. The present research aims to obtain information of the underwater topography and water depth at the same time using interferometer technique, and to validate interferometer technique with accuracy estimation.