• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.81-82
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• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, so as to investigate the influence of mixed abrasive slurry (MAS), such as $ZrO_2$, $CeO_2$, and $MnO_2$ for Ti-CMP application.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.83-84
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• 2006

Chemical mechanical polishing (CMP) process has been attracted as an essential technology of multi-level interconnection. However, the COO (cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. Also, the addition effects of $MnO_2$ abrasives and the diluted silica slurry (DSS) on CMP performances were evaluated. Finally, we have investigated the possibility of new abrasive for the oxide CMP application.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.4
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• pp.7-13
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• 2019

Power module is getting attention from electronic industries such as solar cell, battery and electric vehicles. Transient liquid phase (TLP) boding, sintering with Ag and Cu powders and wire bonding are applied to power module packaging. Sintering is a popular process but it has some disadvantages such as high cost, complex procedures and long bonding time. Meanwhile, TLP bonding has lower bonding temperature, cost effectiveness and less porosity. However, it also needs to improve ductility of the intermetallic compounds (IMCs) at the joint. Wire boding is also an important interconnection process between semiconductor chip and metal lead for direct bonded copper (DBC). In this study, TLP bonding using Sn-based solders and wire bonding process for power electronics packaging are described.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1727-1728
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• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry(MAS). In order to save the costs of slurry, the original silica slurry was diluted by do-ionized water (DIW). And then, $ZrO_2$,$CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1731-1732
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• 2006

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. We have investigate the possibility of new abrasive for the oxide CMP application.

• KEPCO Journal on Electric Power and Energy
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• v.5 no.4
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• pp.311-321
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• 2019

With Korean Government's Renewable energy 3020 plan and 8th Basic plan for long-term power supply, renewable energy industries in Korea are active and catching attention from many relevant industry's relations. Especially with Interconnection guarantee policy established in Oct, 2016, DERs interconnection delay due to lack of allowable distribution hosting capacity is happening and reduction of reinforcement cost for distribution system where 70 % of DERs in South Korea are installed became one of important issues of KEPCO. Therefore, KEPCO needed to extract reasonable solutions to increase feasible hosting capacity of distribution feeders in order to reduce reinforcement cost under the condition of no matter in distribution system operation. This paper proposes feasible hosting capacity of distribution feeders that can be adopted and the status of DER installation in distribution system, PV output data, minimum load in distribution feeders as well as capacity of distribution lines have been investigated and analyzed in proof of the proposal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.109-112
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• 2003

Recently, CMP (Chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. Also, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korea Convergence Society
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• v.8 no.8
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• pp.9-15
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• 2017

With the development of semiconductor integration technology, central processing units and storage devices have been miniaturized and performance has been rapidly developed, interconnection network technology is becoming a more important factor in terms of the performance of high performance computing system. In this paper, we analyze the trend of interconnection network technology used in high performance computing. Interconnect technology, which is the most widely used in the Supercomputer Top 500(2017. 06.), is an Infiniband. Recently, Ethernet is the second highest share after InfiniBand due to the emergence of 40/100Gbps Gigabit Ethernet technology. Gigabit Ethernet, where latency performance is lower than InfiniBand, is preferred in cost-effective medium-sized data centers. In addition, top-end HPC systems that demand high performance are devoting themselves from Ethernet and InfiniBand technologies and are attempting to maximize system performance by introducing their own interconnect networks. In the future, high-performance interconnects are expected to utilize silicon-based optical communication technology to exchange data with light.

• Korean Journal of Materials Research
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• v.28 no.9
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• pp.528-533
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• 2018

In recent years, solar cells based on crystalline silicon(c-Si) have accounted for much of the photovoltaic industry. The recent studies have focused on fabricating c-Si solar modules with low cost and improved efficiency. Among many suggested methods, a photovoltaic module with a shingled structure that is connected to a small cut cell in series is a recent strong candidate for low-cost, high efficiency energy harvesting systems. The shingled structure increases the efficiency compared to the module with 6 inch full cells by minimizing optical and electrical losses. In this study, we propoese a new Conductive Paste (CP) to interconnect cells in a shingled module and compare it with the Electrical Conductive Adhesives (ECA) in the conventional module. Since the CP consists of a compound of tin and bismuth, the module is more economical than the module with ECA, which contains silver. Moreover, the melting point of CP is below $150^{\circ}C$, so the cells can be integrated with decreased thermal-mechanical stress. The output of the shingled PV module connected by CP is the same as that of the module with ECA. In addition, electroluminescence (EL) analysis indicates that the introduction of CP does not provoke additional cracks. Furthermore, the CP soldering connects cells without increasing ohmic losses. Thus, this study confirms that interconnection with CP can integrate cells with reduced cost in shingled c-Si PV modules.

• Journal of Electrical Engineering and Technology
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• v.8 no.5
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• pp.1070-1077
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• 2013

Owing to the consistent increase in energy efficiency issues, studies for improving regenerative energy utilization have been receiving attention in the Urban DC railway systems, where currently, the utilization of regenerative energy is low due to the lack of a specific plan for using this energy. The regenerative energy in railway systems has a low efficiency problem which results in the increase of the catenary voltage and a possibility to create problems to the electrical devices connected to the system. This paper deals with the power integration of large urban railway subsystems to improve regenerative energy utilization where the railway subsystems are integrated with other railway subsystems to improve the energy efficiency. Through the case studies, to find the realistic effect of integrated operation, the Seoul Metro subsystems, namely Line 5 and Line 7, has been applied. Also, evaluation for the electricity cost saving has been performed by using KEPCO electricity cost table.