• 제목/요약/키워드: Inorganic-organic composite

검색결과 174건 처리시간 0.029초

반도체 웨이퍼 다이싱용 나노 복합재료 블레이드의 제작 (Fabrication of Organic-Inorganic Nanocomposite Blade for Dicing Semiconductor Wafer)

  • 장경순;김태우;민경열;이정익;이기성
    • Composites Research
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    • 제20권5호
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    • pp.49-55
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    • 2007
  • 반도체 쿼츠 웨이퍼 다이싱용 블레이드는 마이크로/나노 디바이스와 부품을 제조하기 위해 고정밀도의 가공성을 요구한다. 따라서 균일한 마이크로/나노 선폭의 가공을 위해서는 블레이드의 제작 단계에서 균일한 두께와 밀도를 유지하는 것이 중요하다. 기존의 실리콘웨이퍼 가공을 위해서는 금속의 블레이드가 사용되고 있지만 쿼츠 웨이퍼 가공을 위해서는 고분자 복합재가 사용된다. 이러한 복합재는 가공성, 전기전도성, 그리고 적절한 강도와 연성 및 마모저항성이 있어야 한다. 그러나 기존의 건식성형 공정으로는 균일성을 유지하기 위해 많은 공정과 비용이 소비되고 있다. 본 연구에서는 도전성 나노 세라믹스 분말, 연마재 세라믹스 분말에 열경화성 수지, 전도성 고분자를 혼합한 복합재 분말을 습식성형 공정에 의해 제조, 평가하는 연구를 수행하였다. 먼저 복합재 분말을 액상과 혼합하여 블레이드를 제작하였으며, 액상의 종류, 액상 건조공정의 영향을 고찰하였다. 평가는 마이크로미터 측정기와 현미경을 이용하여 두께를 측정하였다. 두께편차와 기공률, 밀도, 경도, 등의 특성을 비교, 평가하였다. 그 결과 습식성형에 의해 블레이드의 두께편차를 감소시킬 수 있었으며, 경도 등의 특성을 향상시킬 수 있었다.

열처리 온도에 따른 PVDF-$SiO_2$ 복합나노섬유의 특성 변화 (Characteristic Change of PVDF-$SiO_2$ Composite Nanofibers with Different Thermal Treatment Temperature)

  • 김영진
    • 폴리머
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    • 제35권6호
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    • pp.605-609
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    • 2011
  • 전기방사법과 열처리 공정을 통하여 PVDF-$SiO_2$ 복합나노섬유를 제조하였으며, 얻어진 나노섬유는 서로 연결된 기공으로 이루어진 적층 구조를 하고 있었다. 즉, 전기방사로 제조된 나노섬유는 직경이 380 nm, 기공도가 80% 이상인 다공성막을 형성하였다. TEM 사진과 EDX 스펙트라의 분석 결과로부터 $SiO_2$가 나노섬유에 균일하게 분산되어 존재한다는 것이 확인되었다. 또한 전기방사법의 도입에 의해 나노섬유의 기공도가 현저히 개선되었다. ATR-FTIR 및 XRD 분석 결과 복합나노섬유 상에서 PVDF는 ${\alpha}$-phase와 ${\beta}$-phase가 혼재되어 있는 결정구조를 가지고 있었으며, 열처리에 의해서 PVDF의 ${\alpha}$-phase가 증가하였으며, 이로 인해 결정화도가 증가하였다. 특히, 기계적 강도, 열적 특성 및 소수성은 열처리 공정에 의해서 매우 증가되는 것을 확인할 수 있었다.

다층구조 $SrTiO_3$/Organic composites를 이용한 Broad Coupled Line Coupler 설계 (Broad-Coupled Line Coupler Design using multilayer $SrTiO_3$/Organic composites)

  • 윤제현;유찬세;유명재;박세훈;김동수;이우성;육종관
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.45-45
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    • 2008
  • $SrTiO_3$/Organic composites 는 Inorganic/organic 복합재료로, 유전 특성이 우수하고, 저온하여 제조단가의 감소가 가능하다. 이를 바탕으로 $SrTiO_3$/Organic composites 복합재를 이용한 가능성을 확인하기 위해 Multilayer 구조의 Coupler를 설계, 제작 후 특성을 분석하였다. Coupler 는 RF signal을 분기하기 위한 목적으로 평행한 한 쌍의 Conductor line 구조를 가진다. 2개의 Line 의 길이를 특정주파수 $f_0$의 wavelength $\lambda$/4 로 설계하여 서로 근접 시켰을 때 $f_0$를 중심으로 RF 신호 분기 현상이 나타난다. 보다 넓은 대역에 걸쳐서 신호분기를 하기 위해서는 두 line 간의 간격을 좁혀 Signal coupling 효과를 증가 시킨다. single layer conductor 구조에서는 물리적인 한계가 있으므로, multilayer 구조를 사용하면 보다 넓은 대역의 Coupled line coupler 로서 기능하게 된다.

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이산화규소/스티렌의 코어-셀 합성에서 음이온 계면활성제의 영향 (Effect of Anionic Surfactants in Synthesizing Silicone Dioxide/Styrene Core-Shell Polymer)

  • 박근호
    • 한국응용과학기술학회지
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    • 제25권3호
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    • pp.404-409
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    • 2008
  • The core-shell composite particles of inorganic/organic were polymerized by using styrene(St) as a shell monomer and potassium persulfate (KPS) as an initiator. We studied the effect of core-shell structure of silicone dioxide/styrene in the presence of an anionic surfactant sodium lauryl sulfate (SLS) and polyoxyethylene alky lether sulfate (EU-S133D). We found that when $SiO_2$ core/PSt shell polymerization was prepared on the surface $SiO_2$ particle, to minimize the coagulation during the shell polymerization, the optimum conditions were at concentration of $2.56{\times}10^{-2}mole/L$ SLS. The structure of core-shell polymer was confirmed by measuring the thermal decomposition of polymer composite using thermogravimetric analyzer and morphology of core-shell polymer particles by transmission electron microscope (TEM).

$CaCO_3$/Poly ethyl methacrylate를 이용한 무독성 혼합라텍스의 개발 (A Development of Nontoxic Composite Latex Using $CaCO_3$/PEMA)

  • 설수덕;이선룡;이내우
    • 한국안전학회지
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    • 제17권4호
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    • pp.133-139
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    • 2002
  • Core-shell polymers of inorganic/organic pair, which are consisted of both core and shell component, were synthesized by sequential emulsion polymerization using ethyl methacrylate (EMA) as a shell monomer and ammonium persulfate as initiator. We found that $CaCO_3$ core should be prepared by adding 2.0wt% SDBS(sodium dodecyl benzene sulfonate), $CaCO_3$ core/PEMA shell polymerization was carried out on the surface of $CaCO_3$ particle during EMA shell polymerization in the core-shell polymer preparation. The structure of core-shell polymer were investigated by measuring the degree on decomposition of $CaCO_3$ by HCI solution, thermal decomposition of polymer composite on thermogravimetric analyzer, glass transition temperature on differential scanning calorimeter, and morphology using scanning electron microscope.

실란처리된 Epoxy/MICA 콤포지트의 열적, 기계적 전기적 특성연구 (A Study on Thermal, Mechanical and Electrical Properties as Silane Treated Epoxy/MICA Composites)

  • 박재준
    • 전기학회논문지
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    • 제62권2호
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    • pp.213-218
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    • 2013
  • In this study, epoxy/mica composite was prepared by mixing with mechanical stirrer together with homogenizer, and the effect of amino-type silane coupling agent was also studied. To reduce the viscosity without any decrement of other properties, 1,4-Butanediol diglycidyl ether (1,4-BDGE) as an aliphatic epoxy reactive diluent was introduced to the epoxy/mica composite in order to use as vanish for high voltage motor and generator stator winding. It was confirmed by scanning electron microscopy (SEM) observation that interfacial characteristics between organic epoxy and inorganic mica was modified by coupling agent treatment so that glass transition temperature increased, and tensile strength and electrical breakdown strength increased. The properties were estimated by Weibull statistical analysis and the ac electrical breakdown strength was 20.2% modified by treating silane coupling agent.

A Study of a Biodegradale Inorganic-Organic Composite Artificial Bone Substitute -Part 1. Synthesis of an Apatite with Similar Crystallinity to Bone-

  • Choon Ki Lee;Hwal Suh
    • 대한의용생체공학회:의공학회지
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    • 제15권2호
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    • pp.195-200
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    • 1994
  • To develop an artificial bone substitute that is gradually degraded and replaced by the regenerated natural bone, the authors designed a composite that consists consisted of calcium phosphate and collagen according to the natural bone's main composition. The crystallinity of the synthesized apatite was shown to depend on the synthesis temperature. Carbonate apatite synthesized at $58{\circ}C$ demonstrated crystallinity very similar to that of the natural bone. By sintering the apatite over $700{\circ}C$ in vacuum, porous carbonate apatite could be obtained, and the pore extent was controllable according to the additive hydrogenperoxide volume.

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SiC/p-Aramid 복합방적사 제조기술 연구 (Research of the Composite Spun Yarn Manufacturing Process using Silicon Carbide and Para Aramid Fiber)

  • 김북성;유희준
    • 한국염색가공학회지
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    • 제33권4호
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    • pp.309-316
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    • 2021
  • Due to the rigid nature of the silicon carbide fiber(SiC), fiber damage occurs from the friction during the carding process. This damage not only lowers the spun yarn yield, but also lowers the heat resistance of the spun yarn, so that ultra-high heat resistant yarn cannot be manufactured. Therefore, in the carding process where the most friction between fiber and machine(wire, etc.) occurs, some factors were modified and tested, and as a result of measuring the change in physical properties, fiber damage decreased due to the wire angle or wire density, resulting in improved yield. The test method used to measure the yield of SiC fiber was the carbonization method, and the content of SiC fibers was calculated using the remaining amount after carbonization. Carbonization test was performed at air condition, 700℃, and for 2 hours. Analysis by SEM-EDX showed that the carbide was consistent with the composition of the SiC fiber.

합금화용융아연도금강판의 품질특성에 미치는 유기윤활피막의 영향 (Effect of Organic Lubricant Film on Various Properties of Galvannealed Steel Sheets)

  • 김영근
    • 한국표면공학회지
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    • 제36권2호
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    • pp.176-184
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    • 2003
  • New lubricant film of organic and inorganic composite resin was developed to improve the press formability of galvannealed steel sheets (GA) for automotive body panels. The frictional coefficient of lubricant GA steel sheets is about 20% superior to that of uncoated GA. The current range of spot welding of lubricant GA is similar to that of the uncoated GA, but the burning trace of spot welding is inferior to that of the uncoated GA in the oiling condition. The alkaline degreasability of lubricant GA shows 100% in alkaline degreasing condition of automotive company. The size and shape of the phosphated coating layer are similar to those of the uncoated GA sheet. The powdering property of the lubricant GA gives rise to 20∼50% improved property compared with the uncoated GA sheet.

복합콘크리트와 이형 철근간의 부착강도에 관한 실험적 연구 (An Experimental Study on the Bond Splitting Strength between Composite Concrete and Deformed rebar)

  • 윤승조;허승웅
    • 대한건축학회연합논문집
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    • 제21권3호
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    • pp.87-92
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    • 2019
  • To relieve noise between floors in Korea, recent domestic and overseas studies have been developing materials that have the properties of ceramic, which is an inorganic compound, and polymer, which is an organic compound, to introduce a new function to polymer. This study conducted a bending strength experiment between re-bar and new composite concrete mixing POSS (Polyhedral Oligomeric Silses-quioxanes) nano complex on the inside of concrete, and by assembling the inside of each concrete with 3 and 4 main re-bars as an experiment to supplement various problems that occur by the expression of this strength and the distribution of the reinforcement. The number of the main re-bars. and the direction of laying the concrete were applied as the principal variables of the experiment. Upon experiment, there were no differences in the bond strength based on the location of the main re-bar, and a 2 % increase in the bond strength was shown in the specimen laid in the same direction as the main re-bar in comparison to that of the specimen laid in a different direction from the main re-bar. The experiment results displayed that the composite concrete had uniform performance based on the rapid reaction speed of POSS nano complex.