• Title/Summary/Keyword: Inorganic film

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Atmospheric Pressure Plasma Etching Technology for Forming Circular Holes in Perovskite Semiconductor Materials (페로브스카이트 반도체 물질에 원형 패턴을 형성하기 위한 상압플라즈마 식각 기술)

  • Kim, Moojin
    • Journal of Convergence for Information Technology
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    • v.11 no.2
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    • pp.10-15
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    • 2021
  • In this paper, we formed perovskite (CH3NH3PbI3) thin films on glass with wet coating methods, and used various analytical techniques to discuss film thickness, surface roughness, crystallinity, composition, and optical property. The coated semiconductor material has no defects and is uniform, the surface roughness value is very small, and a high absorption rate has been observed in the visible light area. Next, in order to implement the hole shape in the organic-inorganic layer, Samples in the order of a metal mask with holes at regular intervals, a glass coated with a perovskite material, and a magnet were etched with atmospheric pressure plasma equipment. The shape of the hole formed in the perovskite material was analyzed by changing the time. It can be seen that more etching is performed as the time increases. The sample with the longest processing time was examined in more detail, and it was classified into 7 regions by the difference according to the location of the plasma.

Al2O3 High Dense Single Layer Gas Barrier by Neutral Beam Assisted Sputtering (NBAS) Process

  • Jang, Yun-Seong;Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.157-157
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    • 2015
  • Recently, the growing interest in organic microelectronic devices including OLEDs has led to an increasing amount of research into their many potential applications in the area of flexible electronic devices based on plastic substrates. However, these organic devices require a gas barrier coating to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency OLEDs require an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}g/m^2day$. The Key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required ($1{\times}10^{-6}g/m^2day$) is the suppression of defect sites and gas diffusion pathways between grain boundaries. In this study NBAS process was introduced to deposit enhanced film density single gas barrier layer with a low WVTR. Fig. 1. shows a schematic illustration of the NBAS apparatus. The NBAS process was used for the $Al_2O_3$ nano-crystal structure films deposition, as shown in Fig. 1. The NBAS system is based on the conventional RF magnetron sputtering and it has the electron cyclotron resonance (ECR) plasma source and metal reflector. $Ar^+$ ion in the ECR plasma can be accelerated into the plasma sheath between the plasma and metal reflector, which are then neutralized mainly by Auger neutralization. The neutral beam energy is controlled by the metal reflector bias. The controllable neutral beam energy can continuously change crystalline structures from an amorphous phase to nanocrystal phase of various grain sizes. The $Al_2O_3$ films can be high film density by controllable Auger neutral beam energy. we developed $Al_2O_3$ high dense barrier layer using NBAS process. We can verified that NBAS process effect can lead to formation of high density nano-crystal structure barrier layer. As a result, Fig. 2. shows that the NBAS processed $Al_2O_3$ high dense barrier layer shows excellent WVTR property as a under $2{\times}10^{-5}g/m^2day$ in the single barrier layer of 100nm thickness. Therefore, the NBAS processed $Al_2O_3$ high dense barrier layer is very suitable in the high efficiency OLED application.

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Physical Properties of ZnO Thin Films Grown by Sol-Gel Process with Different Preheating Temperatures (예열 온도 변화에 따른 Sol-Gel 법에 의해 제작된 ZnO 박막의 물리적 특성 연구)

  • 김익주;한호철;이충선;송용진;태원필;서수정;김용성
    • Journal of the Korean Ceramic Society
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    • v.41 no.2
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    • pp.136-142
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    • 2004
  • A homogeneous and stable ZnO sol was prepared by dissolving the zinc acetate dihydrate(Zn(CH$_3$COO)$_2$$.$2H$_2$O) in solution of isopropanol((CH$_3$)$_2$$.$CHOH) and monoethanolamine(MEA:H$_2$NCH$_2$CH$_2$OH). ZnO thin films were prepared by sol-gel spin-coating method and investigated for c-axis preferred orientation and physical properties with preheating temperature. The c-axis growth had a difference as increaing preheating temperature. ZnO thin film preheated at 275$^{\circ}C$ and post-heated at 650$^{\circ}C$ was highly oriented along the (002) plane. After preheating at 200∼300$^{\circ}C$ and post-heating at 650$^{\circ}C$, the transmittance of ZnO thin films by UV-vis. measurement was over 85% in visible range and exhibited absorption edges at about 370 nm. The optical band gap energy was obtained about 3.22 eV, The photoluminescence emission characteristics of ZnO thin film preheated at 275$^{\circ}C$ and post-heated at 650$^{\circ}C$ was found to orange emission(620 nm, 2.0 eV) by PL measurement, which revealed the possibility for application of inorganic photoluminescence device.

The electrical characteristics of flexible organic field effect transistors with flexible multi-stacked hybrid encapsulation

  • Seol, Yeong-Guk;Heo, Uk;Park, Ji-Su;Lee, Nae-Eung;Lee, Deok-Gyu;Kim, Yun-Je;An, Cheol-Hyeon;Jo, Hyeong-Gyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.176-176
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    • 2010
  • One of the critical issues for applications of flexible organic thin film transistors (OTFTs) for flexible electronic systems is the electrical stabilities of the OTFT devices, including variation of the current on/off ratio (Ion/Ioff), leakage current, threshold voltage, and hysteresis under repetitive mechanical deformation. In particular, repetitive mechanical deformation accelerates the degradation of device performance at the ambient environment. In this work, electrical stability of the pentacene organic thin film transistors (OTFTs) employing multi-stack hybrid encapsulation layers was investigated under mechanical cyclic bending. Flexible bottom-gated pentacene-based OTFTs fabricated on flexible polyimide substrate with poly-4-vinyl phenol (PVP) dielectric as a gate dielectric were encapsulated by the plasma-deposited organic layer and atomic-layer-deposited inorganic layer. For cyclic bending experiment of flexible OTFTs, the devices were cyclically bent up to 105 times with 5mm bending radius. In the most of the devices after 105 times of bending cycles, the off-current of the OTFT with no encapsulation layers was quickly increased due to increases in the conductivity of the pentacene caused by doping effects from $O_2$ and $H_2O$ in the atmosphere, which leads to decrease in the Ion/Ioff and increase in the hysteresis. With encapsulation layers, however, the electrical stabilities of the OTFTs were improved significantly. In particular, the OTFTs with multi-stack hybrid encapsulation layer showed the best electrical stabilities up to the bending cycles of $10^5$ times compared to the devices with single organic encapsulation layer. Changes in electrical properties of cyclically bent OTFTs with encapsulation layers will be discussed in detail.

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The Effects of pH and Alkalinity Adjustment on Internal Corrosion Control and Water Quality in Drinking Water Pipelines (정수의 pH 및 알칼리도 동시 조절이 상수도관의 내부부식 제어 및 수질에 미치는 영향)

  • Lee, Hyun-Dong;Jung, Hae-Ryong;Kwak, Phill-Jae;Chung, Won-Sik
    • Journal of Korean Society of Environmental Engineers
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    • v.22 no.4
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    • pp.661-669
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    • 2000
  • This research was carried out to evaluate effect of metallic release and change of water corrosive indices by the pH and alkalinity adjustment using the SDLS (Simulated Distribution Loop System) which consist of six types of pipe loop with DCIP, PVC, PE, STS304, CP, GSP, respectively, and its effects on water quality changes which were microbes quality(SPC), residual chlorine. THMs and other parameters. And it was to propose optimal criteria of water quality control for the field application. According to the results, water control system by pH and alkalinity adjustment showed the changing of corrosive water and reducing of metallic release rate and it was not affects of THMs formation, microbes regrowth and variation of other parameters. Water quality stability and corrosion control were due to calcium carbonate precipitation film formation of pipe inner by water quality control. Therefore, corrosive water control system by pH and alkalinity adjustment can be attributed to effective water quality management in water distribution system according to water quality stability of pH and TIC(Total Inorganic Carbonate concentration) that affect the precipitation and dissolution of solids.

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Inorganic Electro-luminescence Device Fabricated with $BaTiO_3$-PVDF Composite Film ($BaTiO_3$-PVDF 복합체로 제작한 무기 EL 소자)

  • Son, Yong-Ho;Jeong, Joon-Seok;Jo, Chan-Woo;Woo, Duck-Hyun;Kim, Young-Min;Kim, Sung-Jin;Yoon, Man-Soon;Ryu, Sung-Lim;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.299-299
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    • 2007
  • 후막형 무기 EL (electro-luminescence) 소자는 제조공정이 간단하고, 얇고, 가볍고, 유연한 동의 많은 장점들 때문에 휴대폰의 키패드 (key-pad) 및 광고용 back-light용으로 사용되고 있다. 이 무기 EL 소자는 비교적 손쉬운 스크린 프린팅 (screen-printing) 법으로 대면적을 제작할 수 있지만, LED (light emitting diode) 등과 비교하여 밝기가 낮아서 그 응용 분야가 제한되고 있다. EL 소자의 형광층은 전면 전극과 후면 전극 사이에 위치한다. EL은 이 형광층에 고 전기장이 걸릴 때, 전기장에 의해 가속된 전자가 형광층 내부에 첨가된 발광 중심의 전자를 여기시키고, 여기된 전자가 다시 바닥상태로 완화될 때 빛이 방출되는 현상이다. 즉, EL 소자는 이러한 전자 발광 현상을 이용한 소자로서, 전압 인가 시 발광 면 전체가 균일하게 발팡하는 평면 광원이다. 이러한 EL 소자에서 휘도의 증가는 후면 전극과 형광층 사이에 삽입되는 유전체 층의 특성과 밀접한 연관성이 있다. 본 연구에서는 고휘도 무기 EL 소자를 제작하기 위하여 이 유전체 층의 특성과 소자의 성능 사이의 관계를 알아보고자 하였다. 유전체 층에 사용하기 위해서 $BaTiO_3$-PVDF (polyvinylidene fluoride)의 복합체 필름을 제조하였다. 먼저 이 복합체 필름을 스크린 프린팅 (screen printing) 법으로 코팅하기 위한 페이스트 제작을 위해서, PVDF 수지를 용제에 녹였다. 그 다음, 일반 혼합기 및 삼단 롤밀 혼합기 (3-roll milling mixer) 등을 이용하여 $BaTiO_3$ 분말과 PVDF 용액을 다양한 비율로 혼합하여 페이스트를 제조하였다. ITO가 증착된 PET Film에 스크린 프린팅 법을 사용하여 형광층, 유전층, 배면 전극 등을 차례로 코팅하였다. $BaTiO_3$ (BT) 분말과 복합체 필름의 XRD 분석 결과, 분말 시료와 복합체 시료 모두 페로브스카이트 구조의 BT 회절선만 관찰되었다. 복합체의 단면 SEM 관찰에서는, BT 분말의 무게비가 증가할수록 더 치밀한 구조를 보여줌을 확인하였다. 또 EL소자의 유전상수와 휘도도 BT 분말의 혼합비가 증가할수록 증가하였다. 본 연구에서 제작한 무기 EL 소자의 최대 휘도는 약 $130\;cd/m^2$ 정도로 측정되었는데, 이는 휴대폰 키패드의 back-light용 광원으로 사용하기 충분하다고 판단되어진다.

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Formation of MOCVD TiN from a New Precursor (새로운 증착원으로 형성된 MOCVD TiN에 관한 연구)

  • Choe, Jeong-Hwan;Lee, Jae-Gap;Kim, Ji-Yong;Lee, Eun-Gu;Hong, Hae-Nam;Sin, Hyeon-Guk
    • Korean Journal of Materials Research
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    • v.9 no.3
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    • pp.244-250
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    • 1999
  • MOCVD TiN films were prepared from a new TiN precursor, tetrakis(etylmethylamino)titanium (TEMAT) and ammonia. Deposition of TiN films from a single precursor, TEMA T yielded the growth rates of $70 to 1050\AA$/min, depending on the deposition temperature. Furthermore, the excellent bottom coverage of -90% over $0.35\mu\textrm{m}$ contacts was obtained at $275^{\circ}C$. The addition of ammonia to TEMA T lowered the resistivity of as- deposited TiN film to ~ $800\mu\omega-cm$ from $3500~6000\mu\omega-cm$ and improved the stability of TiN film in air. Examination of the films by Auger electron spectroscopy(AES) showed that the oxygen and carbon contents decreased with the addition of ammonia. However, increasing ammonia flow rate decreased the bottom coverage of TiN films over $0.5\mu\textrm{m}$ contacts, probably due to the high sticking coefficient of intermediate species produced from the gas phase reaction of TEMA T and ammonia. Based on the byproduct gases detected by the quadrupole mass spectrometer (QMS), the transammination reaction was proposed to be responsible for TiN deposition. In addition, XPS analysis revealed that the carbon in the films made from TEMA T and ammonia was metallic carbon, suggesting that $\beta$-hydrogen activation process occurs competitively with the transammination reaction.

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Contents of Inorganic Nutrient in Leaf Perilla in Growing Stages under Plastic Film House Cultivation (시설재배 잎들깨의 생육시기에 따른 엽 중 무기성분 함량)

  • Lee, Ju-Young;Sung, Jwa-Kyung;Kang, Seong-Soo;Jang, Byoung-Choon;Lee, Su-Yeon;Kim, Rog-Young;Lee, Ye-Jin
    • Korean Journal of Soil Science and Fertilizer
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    • v.45 no.2
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    • pp.215-222
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    • 2012
  • This experiment was conducted to clear up the cause of nutrient physiological disorder and to manage of optimum fertilization for leaf perilla crop under plastic film house condition in Geum-san area in 2009. A nutrient contents of leaf perilla were analyzed during the growing stages of crop from the first harvest to the last harvest stages, and the data were going to use as the nutritional factors for farms' activity in the fields. In survey of leaf perilla growing status at five farmers' fields, it was needed 30 days for growing of 5~10 stems, 60 days for 10~15 stems and 45 days for 15~20 stems of leaf perilla. Contents of nitrogen, phosphorus and potassium in leaf and stem had been kept on some high values in early stages, but it had been decreased in gradually in late stages of growing. Nitrogen and potassium contents were more changeable in leaf than stem, and phosphorus content was kept in more both of leaf and stem than those of nitrogen and potassium. The major macro-nutrient contents of perilla leaf on first of July were 6.34 in N, 0.54 in P, 2.48 in K, 1.98 in Ca and 0.62% in Mg, total uptake amounts of major three elements were $400kg\;ha^{-1}$ in N, $30kg\;ha^{-1}$ in P and $250kg\;ha^{-1}$ in K. Total yield of perilla leaf was $52,000kg\;ha^{-1}$, and total dry matter was $10,510kg\;ha^{-1}$ with $8,680kg\;ha^{-1}$ in leaf dry matter and $1,830kg\;ha^{-1}$ in stem dry matter.

Chemistry of mist deposition of organic polymer PEDOT:PSS on crystalline Si

  • Shirai, Hajime;Ohki, Tatsuya;Liu, Qiming;Ichikawa, Koki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.388-388
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    • 2016
  • Chemical mist deposition (CMD) of poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) was investigated with cavitation frequency f, solvent, flow rate of nitrogen, substrate temperature $T_s$, and substrate dc bias $V_s$ as variables for efficient PEDOT:PSS/crystalline (c-)Si heterojunction solar cells (Fig. 1). The high-speed camera and differential mobility analysis characterizations revealed that average size and flux of PEDOT:PSS mist depend on f, solvent, and $V_s$. The size distribution of mist particles including EG/DI water cosolvent is also shown at three different $V_s$ of 0, 1.5, and 5 kV for a f of 3 MHz (Fig. 2). The size distribution of EG/DI water mist without PEDOT:PSS is also shown at the bottom. A peak maximum shifted from 300-350 to 20-30 nm with a narrow band width of ~150 nm for PEDOT:PSS solution, whose maximum number density increased significantly up to 8000/cc with increasing $V_s$. On the other hand, for EG/water cosolvent mist alone, the peak maximum was observed at a 72.3 nm with a number density of ~700/cc and a band width of ~160 nm and it decreased markedly with increasing $V_s$. These findings were not observed for PEDOT:PSS/EG/DI water mist. In addition, the Mie scattering image of PEDOT:PSS mist under white bias light was not observed at $V_s$ above 5 kV, because the average size of mist became smaller. These results imply that most of solvent is solvated in PEDOT:PSS molecule and/or solvent is vaporized. Thus, higher f and $V_s$ generate preferentially fine mist particle with a narrower band width. Film deposition occurred when $V_s$ was impressed on positive to a c-Si substrate at a Ts of $30-40^{\circ}C$, whereas no deposition of films occurred on negative, implying that negatively charged mist mainly provide the film deposition. The uniform deposition of PEDOT:PSS films occurred on textured c-Si(100) substrate by adjusting $T_s$ and $V_s$. The adhesion of CMD PEDOT:PSS to c-Si enhanced by $V_s$ conspicuously compared to that of spin-coated film. The CMD PEDOT:PSS/c-Si solar cell devices on textured c-Si(100) exhibited a ${\eta}$ of 11.0% with the better uniformity of the solar cell parameters. Furthermore, ${\eta}$ increased to 12.5% with a $J_{sc}$ of $35.6mA/cm^2$, a $V_{oc}$ of 0.53 V, and a FF of 0.67 with an antireflection (AR) coating layer of 20-nm-thick CMD molybdenum oxide $MoO_x$ (n= 2.1) using negatively charged mist of 0.1 wt% 12 Molybdo (VI) phosphoric acid n-Hydrate) $H_3(PMo_{12}O_40){\cdot}nH_2O$ in methanol. CMD. These findings suggest that the CMD with negatively charged mist has a great potential for the uniform deposition of organic and inorganic on textured c-Si substrate by adjusting $T_s$ and $V_s$.

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Relationship among Chemical Properties of Soils with Different Texture Taken from Plastic Film House of Chungbuk Area (충북지역 시설재배지 토성별 토양화학성의 상호관계)

  • Kim, Jai-Joung;Kang, Seong-Soo;Kim, Ki-In;Hong, Soon-Dal
    • Korean Journal of Soil Science and Fertilizer
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    • v.39 no.3
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    • pp.144-150
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    • 2006
  • Chemical characteristics and their interrelationships of 156 soils included by 74 sandy loam and 82 loam soils collected from plastic film house in Chungbuk area were investigated from 1998 to 2001. Seventeen chemical properties including pH, organic matter (OM), electrical conductivity (EC), inorganic nitrogen, available phosphorus, exchangeable cations, CEC, etc., were analyzed by correlation, standardized partial regression coefficient, and principal factor analysis. Standardized partial regression coefficients of chemical properties were estimated to determine the degree of contribution of EC and OM contents in soils. Principal factor analysis was applied to classify the studied chemical properties into different groups having similar chemical properties. The pH of experimental soils ranged from 4.24 to 7.14 and 4.95 to 7.35 for loam and sandy loam soils, respectively. The EC of soils varied from 0.93 to $15.65dS\;m^{-1}$ for loam and $0.91{\sim}22.30dS\;m^{-1}$ for sandy loam soils, respectively with significant differences among them. The EC measured by 1:5 $H_2O$ dilution method and saturation method were significantly related with 8.163 and 8.599 as the slopes of regression equation for loam and sandy loam soils, respectively. These slopes more than 8.0 in this regression equation was higher than the slope of 5.0 that is estimated from dilution coefficient suggesting that EC measured by 1:5 dilution method might be erratic. The standardized partial regression coefficient of different chemical properties for the estimation of EC was in the order of $NO_3{^-}$ > $Cl^-$ > OM > exchangeable Mg for loam soils and $NO_3{^-}$ > exchangeable Mg > $Cl^-$ for sandy loam soils. Contribution order of the chemical properties based on standardized partial regression coefficient differed 1:5 dilution method and saturation method, indicating that different chemical compounds might be present in the extract solutions of these two methods. Consequently the measurement of EC by saturation method was thought be still better for estimation of chemical property because accuracy of EC measurement by 1:5 dilution method can't be improved by any specific coefficient for adjustment of EC. Regardless of differences in soil textures and extraction methods, correlation coefficients between EC and the other chemical properties were routinely in the order of $NO_3{^-}$ > $Cl^-$ > degree of base saturation > exchangeable Mg > exchangeable Ca > $SO{_4}^{2-}$. The principal factor analysis revealed four factor groups of the chemical properties studied. The groups for sandy loam were as follows; ; 1. salt components, 2. soil reaction components, 3. fixed and adsorption components, 4. CEC components. The groupings of loam soils were similar to sandy loam except that exchangeable Na substituted the CEC of sandy loam.