• 제목/요약/키워드: Infrared microscopy

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He-SiH4혼합가스를 이용하여 RF-PECVD에 의해 증착된 수소화된 나노결정질 실리콘 박막의 재료적 특성에 관한 연구

  • 김인교;정호범;임종혁;김경남;염근영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.170-170
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    • 2011
  • 태양전지와 박막 트랜지스터를 위한 유망한 재료로서 수소화된 비정질 실리콘과 나노결정 실리콘 박막이 관심을 받아 왔다. 특히, 수소화된 나노결정 실리콘 박막은 비정질 대비 높은 방향성과 조밀한 구조 덕에 박막 태양전지나 TFT(Thin film transistor) 소자의 성능 향상에 기여할 수 있는 물질로 연구되고 있다. 이러한 박막들은 보통 $SiH_4$같은 Si을 포함한 가스에 다량의 $H_2$를 희석시켜 플라즈마 화학 증착법(PECVD, Plasma Enhanced Chemical Vapor Deposition)에 의해 성장된다. 이러한 CVD증착 방식을 이용하여 결정화된 박막을 얻기 위해서는 대개 높은 수소 희석비를 이용하는 것이 일반적이나, 이러한 공정 방식은 실리콘이 결합되어야 할 결합위치에 bonding energy가 더 높은 수소의 결합을 촉진하게 된다. 이러한 특성은 박막 태양전지에서 효율을 떨어뜨리는 주요 요소로 작용하고 있다.(1) 본 연구에서는 수소의 결합 확률을 낮춘 결정화된 박막을 성장시키기 위해 수소를 대신하여 헬륨을 희석가스로 사용하여 박막을 증착하고 그 특성을 분석해 보았다. 박막의 구조적 특성, 결정화도(Xc), 플라즈마 내 활성 라디칼(Active radical in plasma), Si-H결합 특성, 전도도(Conductivity)와 같은 박막 특성을 알아보기 위해 주사전자현미경(SEM, Scanning Electron Microscopy), 라만 분광기(Raman spectroscopy), 광 방출 분광기(OES, Optical Emission Spectrocopy), 적외선 분광기(FT-IR, Fourier Transform-Infrared Spectroscopy), Keithley measurement kit이 사용되었다. 수소를 대신하여 헬륨을 사용함으로써 동일 결정화도 대비 10%이상 낮은 microstructure factor 값을 얻을 수 있었으며 인가되는 RF 전력을 140W까지 증가시켰을 때 약 80%의 결정화도를 관찰할 수 있었다.

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Decrease of Global Warming Effect During Dry Etching of Silicon Nitride Layer Using C3F6O/O2 Chemistries

  • Kim, Il-Jin;Moon, Hock-Key;Lee, Jung-Hun;Jung, Jae-Wook;Cho, Sang-Hyun;Lee, Nae-Eung
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.459-459
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    • 2012
  • Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

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Characterizations of Modified Silica Nanoparticles(II) ; Preparation and Application of Silica Nanoparticles as a Environmentally Filler

  • Min, Seong-Kee;Bae, Deok-Kwun;Park, Sang-Bo;Yoo, Seong-Il;Lee, Won-Ki;Park, Chan-Young;Seul, Soo-Duk
    • 한국재료학회지
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    • 제22권8호
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    • pp.433-438
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    • 2012
  • A chemical process involves polymerization within microspheres, whereas a physical process involves the dispersion of polymer in a nonsolvent. Nano-sized monodisperse microspheres are usually prepared by chemical processes such as water-based emulsions, seed suspension polymerization, nonaqueous dispersion polymerization, and precipitation polymerizations. Polymerization was performed in a four-necked, separate-type flask equipped with a stirrer, a condenser, a nitrogen inlet, and a rubber stopper for adding the initiator with a syringe. Nitrogen was bubbled through the mixture of reagents for 1 hr. before elevating the temperature. Functional silane (3-mercaptopropyl)trimethoxysilane (MPTMS) was used for the modification of silica nanoparticles and the self-assembled monolayers obtained were characterized by X-ray photoelectron spectroscopy (XPS), laser scattering system (LSS), Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), elemental analysis (EA), and thermogravimetric analysis (TGA). In addition, polymer microspheres were polymerized by radical polymerization of ${\gamma}$-mercaptopropyl modified silica nanoparticles (MPSN) and acrylamide monomer via precipitation polymerization; then, their characteristics were investigated. From the elemental analysis results, it can be concluded that the conversion rate of acrylamide monomer was 93% and that polyacrylamide grafted to MPSN nanospheres via the radical precipitation polymerization with AAm in ethanol solvent. The microspheres were successfully polymerized by the 'graft from' method.

자동차 내장재용 고분자 재료의 필드 열화에 따른 마찰소음 특성변화 (Observation and Characterization of Squeak Noises of Polymeric Materials for Automotive Interior Parts Under Field-Degradation)

  • 이창훈;강병현;최병호;이종호;이광희
    • 한국자동차공학회논문집
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    • 제25권2호
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    • pp.257-265
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    • 2017
  • In this work, the effect of field-degradation of automotive polymeric interior parts on the squeak characteristics was studied for a number of used vehicles with various mileages and years of service. The purpose of this study was to characterize the squeak noise related with long-term degradation in service life. The characteristics of field-degraded polymeric samples are analyzed using Fourier transform infrared(FT-IR) spectroscopy and scanning electron microscopy(SEM). Complicated carbonyl spectra from FT-IR were deconvoluted into various carbonyls to trace field-degradation phenomenon. In addition, various mechanical tests, i.e. tensile test, hardness test as well as coefficient of friction test, were performed to analyze the variation in mechanical properties due to field-degradation. Squeak noise was measured and analyzed by frequency analysis. It was shown that the changes in the chemical structures of polymer due to field-degradation influenced the variation in mechanical properties, and squeak noise may worsen by increasing the squeak noise level in the wide frequency range. The results indicated that customer complaints regarding the squeak noise coming from used vehicles might be one of the important reliability issues because the increase in sound pressure level especially in the high frequency range could annoy drivers and passengers.

콜로이드 합성법에 의한 HgTe 양자점의 제조와 특성 분석 (Colloidal synthesis of IR-Iuminescent HgTe quantum dots)

  • 송현우;조경아;김현석;김상식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.31-34
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    • 2002
  • HgTe quantum dots were synthesized in aqueous solution at room temperature by colloidal method. The synthesized materials were identified to be zincblende cubic structured HgTe quantum dots by X-ray diffraction and transmission electron microscopy image revealed that these quantum dots are agglomerate of a individual particle. The colloidally prepared HgTe quantum dots have the sphere-like shape with a diameter of approximately 4 nm. The optical properties of the HgTe quantum dots were investigated with photoluminescence(PL). The PL appears in the near-infrared region, which represent a dramatic shift from bulk HgTe behavior. The analytic results revealed that HgTe quantum dots have the broad size distribution, as PL emission spectrum covers the spectral region from 900 to 1400 nm. In this study, the factors affecting PL of HgTe quantum dots and particle size distributiont are described.會Ā᐀䁇?⨀젲岒Ā㰀會Ā㰀顇?⨀끩Ā㈀會Ā㈀?⨀䡪ఀĀ᐀會Ā᐀䡈?⨀Ā᐀會Ā᐀ꁈ?⨀硫ᜀĀ저會Ā저?⨀샟ගऀĀ저會Ā저偉?⨀栰岒ఀĀ저會Ā저ꡉ?⨀1岒Ā저會Ā저J?⨀惝ග؀Ā؀會Ā؀塊?⨀ග嘀Ā切會Ā切끊?⨀⣟ගĀ搀會Ā搀ࡋ?⨀큭킢Ā저會Ā저恋?⨀桮킢Ā저會Ā저롋?⨀⣅沥ࠀĀࠀ會Āࠀ၌?⨀샅沥Ā저會Ā저桌?⨀壆沥ሀĀ저會Ā저쁌?⨀o킢瀀ꀏ會Āᡍ?⨀棤좗ĀĀĀ會ĀĀ灍?⨀å좗ĀĀĀ會ĀĀ졍?⨀飥좗ĀĀĀ會ĀĀ⁎?⨀?ꆟᤀ

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Preparation and characterization of microporous NaOH-activated carbons from hydrofluoric acid leached rice husk and its application for lead(II) adsorption

  • Hassan, A.F.;Youssef, A.M.
    • Carbon letters
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    • 제15권1호
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    • pp.57-66
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    • 2014
  • Three activated carbons (ACs) were prepared using NaOH (N) as an activating agent. Hydrofluoric acid pre-leached rice husk was used as a precursor. After leaching, the precursor was washed with distilled water, dried, crushed, and then sieved; a size fraction of 0.3-0.5 mm was selected for carbonization in the absence of air at $600^{\circ}C$. The carbonization product (LC) was mixed with NaOH at ratios of 1:2, 1:3, and 1:4 (wt of LC: wt of NaOH) and the produced ACs after activation at $800^{\circ}C$ were designated NLC21, NLC31, and NLC41, respectively. Surface and textural properties were determined using nitrogen adsorption at $-196^{\circ}C$, scanning electron microscopy images, thermogravimetric analysis, and Fourier transform infrared spectra. These ACs were used as adsorbents for lead(II) from aqueous solutions. The effects of the textural properties and the chemistry of the carbon surfaces were investigated and the impact of the operation conditions on the capacity for lead(II) sorption was also considered. Modification of NLC41 with $H_2O_2$ and $HNO_3$ gave two other adsorbents, $H_{NLC41}$ and $N_{NLC41}$ respectively. These two new samples exhibited the highest removal capacities for lead(II), i.e.117.5 and 128.2 mg/g, respectively. The adsorption data fitted the Langmuir isotherm and the kinetic adsorption followed pseudo-second order kinetics. The thermodynamic parameters have been determined and they indicated a spontaneous endothermic process.

Improvement of the Biocompatibility of Chitosan Dermal Scaffold by Rigorous Dry Heat Treatment

  • Kim, Chun-Ho;Park, Hyun-Sook;Gin, Yong-Jae;Son, Young-Sook;Lim, Sae-Hwan;Park, Young-Ju;Park, Ki-Sook;Park, Chan-Woong
    • Macromolecular Research
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    • 제12권4호
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    • pp.367-373
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    • 2004
  • We have developed a rigorous heat treatment method to improve the biocompatibility of chitosan as a tissue-engineered scaffold. The chitosan scaffold was prepared by the controlled freezing and lyophilizing method using dilute acetic acid and then it was heat-treated at 110$^{\circ}C$ in vacuo for 1-3 days. To explore changes in the physicochemical properties of the heat-treated scaffold, we analyzed the degree of deacetylation by colloid titration with poly(vinyl potassium sulfate) and the structural changes were analyzed by scanning electron microscopy, Fourier transform infrared (FT-IR) spectroscopy, wide-angle X-ray diffractometry (WAXD), and lysozyme susceptibility. The degree of deacetylation of chitosan scaffolds decreased significantly from 85 to 30% as the heat treatment time increased. FT-IR spectroscopic and WAXD data indicated the formation of amide bonds between the amino groups of chitosan and acetic acids carbonyl group, and of interchain hydrogen bonding between the carbonyl groups in the C-6 residues of chitosan and the N-acetyl groups. Our rigorous heat treatment method causes the scaffold to become more susceptible to lysozyme treatment. We performed further examinations of the changes in the biocompatibility of the chitosan scaffold after rigorous heat treatment by measuring the initial cell binding capacity and cell growth rate. Human dermal fibroblasts (HDFs) adhere and spread more effectively to the heat-treated chitosan than to the untreated sample. When the cell growth of the HDFs on the film or the scaffold was analyzed by an MTT assay, we found that rigorous heat treatment stimulated cell growth by 1.5∼1.95-fold relative to that of the untreated chitosan. We conclude that the rigorous dry heat treatment process increases the biocompatibility of the chitosan scaffold by decreasing the degree of deacetylation and by increasing cell attachment and growth.

The Powder Preparation of Blue Cobalt Aluminate at 210 °C Using the Malonate Method

  • Lee, Gong-Yeol;Lee, Dong-Hoon;Kim, Hong-Gun;Kim, Yoo-Young
    • Bulletin of the Korean Chemical Society
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    • 제31권1호
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    • pp.47-51
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    • 2010
  • A powder, containing 80 percent of blue cobalt aluminate $(CoAl_2O_4)$ crystallites, was synthesized at $210 ^{\circ}C$ using a (metal nitrate-malonic acid-ammonium hydroxide-ammonium nitrate) system. The optimal amount of concentrated ammonia water and initial decomposition temperature were determined for the blue $CoAl_2O_4$ crystallites preparation. Three $CoAl_2O_4$ precursor pastes, corresponding to the various amounts of concentrated ammonia water, were prepared by evaporating the initial solutions in an electric furnace fixed at $80 ^{\circ}C$ under a vacuum of 25 torr. The initial solution was used to dissolve the starting materials. The powder with the maximum content (80%) of blue $CoAl_2O_4$ crystallites was prepared when the prepared precursor was decomposed at $210 ^{\circ}C$. The blue $CoAl_2O_4$ crystallite content in the prepared sample decreased with increasing initial decomposition temperature. For 0.2 mole of the $Al^{3+}$ ion, the chemical compositions of the precursor corresponded to molar ratios of 0.4, 1.40, 2.56 and 2.00 for the $Co^{2+}$ ion, malonic acid, ammonia and ammonium nitrate per mole of the $Al^{3+}$ ion, respectively. The blue $CoAl_2O_4$ crystallite content in the sample decreased with the amount of ammonia deviated from the optimal value. The characteristics of the powders were examined using X-ray diffraction, optical microscopy, Fourier transformation infrared spectroscopy and the Brunauer-Emmett-Teller technique.

Synthesis and Characterization of Hydrotalcite/Graphene Oxide Containing Benzoate for Corrosion Protection of Carbon Steel

  • Nguyen, Thuy Duong;Tran, Boi An;Vu, Ke Oanh;Nguyen, Anh Son;Trinh, Anh Truc;Pham, Gia Vu;To, Thi Xuan Hang;Phan, Thanh Thao
    • Corrosion Science and Technology
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    • 제19권2호
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    • pp.82-88
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    • 2020
  • This work examined the corrosion protection performance of benzoate loaded hydrotalcite/graphene oxide (HT/GO-BZ) for carbon steel. HT/GO-BZ was fabricated by the co-precipitation method and characterized by infrared spectroscopy, X-ray diffraction, and scanning electronic microscopy. The corrosion inhibition action of HT/GO-BZ on carbon steel in 0.1 M NaCl solution was evaluated by electrochemical measurements. The benzoate content in HT/GO-BZ was determined by UV-Vis spectroscopy. Subsequently, the effect of HT/GO-BZ on the corrosion resistance of the water-based epoxy coating was investigated by the salt spray test. The obtained results demonstrated the intercalation of benzoate and GO in the hydrotalcite structure. The benzoate content in HT/GO-BZ was about 16%. The polarization curves of the carbon steel electrode revealed anodic corrosion inhibition activity of HT/GO-BZ and the inhibition efficiency was about 95.2% at a concentration of 3g/L. The GO present in HT/GO-BZ enhanced the inhibition effect of HT-BZ. The presence of HT/GO-BZ improved the corrosion resistance of the waterborne epoxy coating.

자성광촉매용 TiO2-Fe2O3 나노복합분말의 합성 (Synthesis of TiO2-Fe2O3 Nanocomposite Powders for Magnetic Photocatalyst)

  • 이창우;김순길;윤성희;이재성;좌용호
    • 한국재료학회지
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    • 제15권8호
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    • pp.508-513
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    • 2005
  • [ $TiO_2-Fe_2O_3$ ] nanocomposite powders for magnetic photocatalyst were synthesized by sol-gel process, in which $TiO_2$ photocatalytic layer was formed on the surface of $\gamma-Fe_2O_3$ magnetic core. Transmission electron microscopy (TEM) observation and X-ray diffractometry (XRD) analysis revealed that$\gamma-Fe_2O_3$ nanoparticles, $10\~20nm$ in diameter, were coated by $TiO_2$ shell of 5nm in thickness and $TiO_2$ was anatase phase. Also hydroxyl group (-OH) used to decompose organic compounds was detected by Fourier transformation infrared spectrometry(FT-IR) analysis. UV-Visible spectrophotometry results showed that light absorption occurred in the wavelength range of $400\~700 nm$, and the band gap energy $(E_g)$ of powder was 1.8 eV. Finally it was found that the coercivity $(H({ci})$ and saturation magnetization $(M_s)$ of the powder were 79 Oe and 14.8 emu/g, respectively as experimental vibrating sample magnetometer (VSM) measurements.