• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.249-252
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• 1997

The resolution of analog sensor is determined by its sensitivity and amplitude of noise. This paper presents modeling of inductive gap sensor base on equivalent magnetic circuit and analysis of sensitivity. The model of inductive gap sensor is verified by the experimental results. Then we can simulate static characteristic of inductive gap sensor using this model. Computer simulation show that sensor's sensitivity and linearity are affected by magnetic flux's leakage and fringing, and that they are affected by shape of sensor probe.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.250-254
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• 2001

The resolution of analog sensor is determined by its sensitivity and amplitude of noise. This paper presents modeling of inductive gap sensor base on equivalent magnetic circuit and analysis of sensitivity. We can simulate static characteristic of inductive gap sensor using this model. Computer simulation show that sensor's sensitivity is affected by magnetic flux's leakage and fringing, and that they are affected by shape of sensor probe. Base on this, we designed shape of inductive position sensor probe.

• Journal of Welding and Joining
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• 제23권4호
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• pp.66-72
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• 2005

An electromagnetic inductive sensor consisted of one exciter and three separated (triple) detectors has been developed for both tracking the weld seam of a workpiece and controlling the sensor-to-workpiece distance (height) simultaneously. The left and right detectors are used to track the seam, while the fore and the other two detectors allow the sensor to determine the height and the gap width by being coupled their outputs together. A series of experiments with the proposed sensor located above a mild steel plate containing a weld seam of gap are carried out to examine the feasibility of the sensor. The results revealed that the proposed sensor could fairly well track the desired seam and also well control the height to be constant even when the gap width of the seam varied. The gap width can be also determined during the seam tracking by using the sensor outputs. As a consequence, these can provide the developed sensor with substantial improvement for industrial uses with respect to the previous electromagnetic sensors being used for the weld seam tracking.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.733-734
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.207-211
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• 2004

The performance of an inductive position sensor has approved by previous research papers. In this paper, magnetic circuit model of a ring-type multi-pole insuctive position sensor is described. The magnetic circuit model is required to design in ductive position sensor as well as draw a fault tolerance algorithm. Using the magnetic circuit theory, we derived the relationship between voltage applied and flux density in the normal air-gap. By idealizing the modulation/demodulation processes of signal processing circuit, sensor gain with respect to change of displacement is theoretically calculation using the magnetic circuit model, which validate the theoretical derivation.

• 한국정밀공학회지
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• 제21권4호
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• pp.72-78
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• 2004

In this paper, a development of an inductive position sensor is described. The sensor is similar to a radial magnetic bearing in that the sensor stator is shaped like a heteropolar magnetic bearing and is driven by a switching amplifier. A demodulation filter extracts the gap information from the switching current ripples. A prototype sensor exhibits the resolution of $0.43\mum$ and the dynamic bandwidth of about 800Hz. The dynamic performance can be improved by increasing the switching frequency. However, the eddy current effects become noticeable at high switching frequency, thus limiting the improvement of the bandwidth.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.987-992
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle systems. The main goal of our research is to develop technology for producing high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is being developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. This paper describes the selection process of the sensor types and the design of the driving circuit. We also report the experimental results that characterize the static and dynamic performances of the inductive sensor.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.32-37
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• 2000

In a high speed spindle system, it is very important to monitor the operation of the spindle to prevent catastrophic damage to the system. Widely used sensors for monitoring are eddy-current and capacitive types. These sensors provide high accuracy of monitoring, but their steep prices lead to expensive high speed spindle system. The main god of our research is to develop technology to produce high speed spindle system utilizing magnetic bearings. As active magnetic bearings require position sensors for feedback control, a noncontact position sensor is bang developed as a part of this main goal. Once developed, it will contribute to affordable high speed spindle system. In this paper, we report the selection process of the sensor types and the experimental results with driving circuits.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 한국전기전자재료학회논문지
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• 제26권9호
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• pp.669-676
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• 2013

In this study, we introduce a polymer(polyimide) based pressure sensor to measure real-time heart beat and blood pressure. The sensor have been designed with consideration of skin compatibility of material, cost effectiveness, manufacturability and wireless detection. The designed sensor was composed of inductor coils and an air-gap capacitor which generate self-resonant frequency when electrical source is applied on the system. The sensor was obtained with metalization, etching, photolithography, polymer adhesive bonding and laser cutting. The fabricated sensor was shaped in circular type with 10mm diameter and 0.45 mm thickness to fit radial artery. Resonant frequencies of the fabricated sensors were in the range of 91~96 MHz on 760 mmHg pressurized environment. Also the sensor has good linearity without any pressure-frequency hysteresis. Sensitivity of the sensor was 145.5 kHz/mmHg and accuracy was less than 2 mmHg. Real-time heart beat measurement was executed with a developed hand-held measurement system. Possibility of real-time blood pressure measurement was showed with simulated artery system. After installation of the sensor on skin above radial artery, simple real blood pressure measurement was performed with 64 mmHg blood pressure variation.