• 제목/요약/키워드: Index matching film

검색결과 11건 처리시간 0.03초

Index Matching Film이 적용된 ITO 투과율 특성에 관한 연구 (A Study on Transmittance Characteristic of ITO with Index Matching Film)

  • 기현철;김상기;김은미;박경희;구할본
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.307-308
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    • 2009
  • We have proposed an index matching film to improve the emitting efficiency of green OLED. Here, SiO2 and TiO2 were selected to coat the green OLED. The structures of index matching film were designed in G1ass/TiO2/SiO2/ITO and SiO2/TiO2/Glass/ITO. Then, these materials were deposited by ion-assisted deposition system. Transmittances of deposited devices were 86.14 and 85.07 %, respectively.

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Characteristics of Index Matching ITO Film on PET Film Grown by Roll to Roll Sputtering Process for Touch Screen Panel

  • 이상진;김철환;백종현;조성근;함동석;최우진;김광제;이재흥
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.244.1-244.1
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    • 2014
  • 디스플레이 패널의 터치 스크린에 가장 널리 사용되는 ITO 전극은 사용자의 눈에 전극 면이 시각적으로 구분되지 않도록 해야 한다. 따라서 최근에는 ITO 전극 면이 구분되지 않도록 하기 위해 다층 박막으로 이루어진 인덱스 매칭(index matching, IM) 기술을 이용하여 ITO 전극 필름을 제작하고 있다. 이러한 인덱스 매칭된 ITO 필름은 기판이나 공정 조건, 인덱스 매칭 층의 물질 종류에 따라 ITO 박막의 전기적 광학적 특성이 각각 다르게 나타나기 때문에 이에 대한 많은 연구가 이루어지고 있다. 본 연구에서는 롤투롤 스퍼터링(roll to roll sputtering) 방법으로 고굴절과 저굴절이 순차적으로 코팅 처리된 PET 기판 위에 ITO 박막을 증착하여 IM-ITO 필름을 제작하고 전기적 광학적 특성을 관찰하였다. 이를 위해 습식(wet) 코팅 방법으로 저굴절층과 고굴절층을 PET 필름 위에 코팅하여 IM층을 제작한 PET 필름 위에 ITO 박막을 증착하고, $150^{\circ}C$로 후 열처리를 하여 인덱스 매칭된 ITO 필름을 제작하였다. 제작된 필름은 GIXD를 이용하여 박막의 구조와 결정성을 조사하였고, 면저항 측정기와 홀측정 장치를 이용하여 전기적 특성을 관찰하였다. 그리고 분광광도계와 탁도(haze) 측정기를 이용하여 광학적 특성을 조사하였다. 본 연구를 통해 롤투롤 스퍼터링 방법으로 유무기 복합막으로 구성된 IM-ITO 박막의 전기적 광학적 구조적 특성에 대해 보고하고자 한다.

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PDMS 굴절 조정층이 Mn-Doped SnO2 (MTO)/Ag/MTO/PDMS/MTO 투명전극의 특성에 미치는 영향 (Effect of PDMS Index Matching Layer on Characteristics of Mn-Doped SnO2 (MTO)/Ag/MTO/PDMS/MTO Transparent Electrode)

  • 조영수;장건익
    • 한국전기전자재료학회논문지
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    • 제31권6호
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    • pp.408-411
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    • 2018
  • We fabricated highly flexible Mn-doped $SnO_2$ (MTO)/Ag/MTO/polydimethylsiloxane (PDMS)/MTO multilayer transparent conducting films. To reduce refractive-index mismatching of the MTO/Ag/MTO/polyethylene terephthalate (PET), index-matching layers were inserted between the oxide-metal-oxide-structured films and the PET substrate. The PDMS layer was deposited by spin-coating after adjusting the mixing ratio of PDMS and hexane. We investigated the effects of the index-matching layer on the color and reflectance differences with different PDMS dilution ratios. As the dilution ratio increased from 1:100 to 1:130, the color difference increased slightly, while the reflectance difference decreased from 0.62 to 0.32. The MTO/Ag/MTO/PDMS/MTO film showed a transmittance of 87.18~87.68% at 550 nm. The highest value of the Haacke figure of merit was $47.54{\times}10^{-3}{\Omega}^{-1}$ for the dilution ratio of 1:130.

Refractive-index matched layers applied to flexible conductive MTO/Ag/MTO multilayer films on the PET substrate

  • Sangmoo Yoon;Gun-Eik Jang
    • Journal of Ceramic Processing Research
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    • 제22권1호
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    • pp.114-120
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    • 2021
  • A hybrid structure of Mn (2.59 wt.%) doped SnO2 (MTO)/Ag/MTO films with refractive index matching layers (IMLs) was deposited on PET substrate by a RF/DC magnetron sputtering method at room temperature. To match the refractive index (n) of MTO/Ag/MTO/PET film, high and low refractive index materials of MTO (n = 2.02) and SiO2 (n = 1.52) were placed between MTO/Ag/MTO and PET substrate, respectively. In order to evaluate the effect of IMLs on the reflectivity and color variation, an optical simulation program, Essential Macleod Program (EMP) was adopted, in advance. From EMP simulation, the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm) with optimized IMLs of SiO2 (120 nm)/MTO (10 nm) shows the excellent optical transmittance above 86.1% at the 550 nm wavelength, and the pattern visible defect was reduced as compared with the reference film of MTO/Ag/MTO/PET film without IMLs. From the bending test, the multilayer film of MTO (40 nm)/Ag (13 nm)/MTO (40 nm)/SiO2 (90 nm)/MTO (10 nm)/PET showed excellent flexible properties. There was only 10% resistance variation under 10,000 bending cycle with curvature radius of 5 mm.

Fast Approach for Stereo Balancing Mapping Function

  • Kim, J.S.;Lee, S.K.;Kim, T.Y.;Lee, J.Y.;Choi, J.S.
    • 한국방송∙미디어공학회:학술대회논문집
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    • 한국방송공학회 2009년도 IWAIT
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    • pp.286-289
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    • 2009
  • This paper presents an effective approach to minimize recursive computations for balancing stereo pairs by using disparity vector errors and its directional histogram. A stereo balancing function is computed from the correspondent pixels between two images, and a simple approach is to find the matching blocks of two images. However, this procedure requires recursive operation, and its computation cost is very high. Therefore, in this paper, we propose an efficient balance method using structural similarity index and a partial re-searching scheme to reduce the computation cost considerably. For this purpose, we determine if re-searching for each block is necessary or not by using the errors and the directional histogram of disparity vectors. Experiment results show that the performance of the proposed approach can save the computations significantly with ignorable image quality degradation compared with full re-search approach.

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Circular Polarizers for Reflective LCDs

  • Yoshimi, Hiroyuki;Yano, Shuji;Fujimura, Yasuo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.905-909
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    • 2002
  • Characteristics of reflective LCDs, which have gained a lot of notice in recent years, rely largely on optical design of circular polarizers and the quarter-wave plates, as a component. Important design includes wavelength dispersion, viewing angle, uniformity of display and matching of refractive index. Our work has contributed to improving performance of reflective LCDs by enhancing the characteristics of polymer film using stretching and optical lamination technologies. To design that offers higher contrast and wider viewing angle, we have discovered that it is necessary to control viewing angle variation of the polarizing axis in order to compensate for the viewing angle of the polarizing film as well as the optical anisotropic properties of liquid crystal. Applying this technology to circular polarizers used for reflective LCDs enables design of wide viewing angle circular polarizers. In order to realize higher contrast for reflective LCDs, it is also necessary to design other optical materials including polarizing films. For design of hybrid optical film, it is particularly necessary to reduce surface reflection and interface reflection. This paper also reports our findings concerning this topic.

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광분배를 위한 Y-branch 제작과 광파이버와의 결합특성에 관한 연구 (A study on the fabrication of Y-branch for optical power distribution and its coupling properties with optical fiber)

  • 김상덕;박수봉;윤중현;이재규;김종빈
    • 한국통신학회논문지
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    • 제21권12호
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    • pp.3277-3285
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    • 1996
  • In this paper, w designed an opical power distribution device for application to an optical switching and an optical subscriber loop. We fabricated PSG thin film by LPCVD. Based on the measured index of fabricted thin film, rib-type waveguide was transformed to two-dimension by the effective index method and we simulated dispersion property to find asingle-mode condition. We found that the optimum design parameters of rib-type waveguide are:cladding layer of 3.mu.m, core layer of 3.mu.m, buffer layer of 10.mu.m, and core width of 4.mu.m. Each side of the guiding region was etched down to 4.mu.m to shape the core. We used these optimum parameters of the rib-type waveguide with branching angle of 0.5.deg. and simulted the Y-branch waveguide by the BPM simulation. Numerical loss in branching area was claculated to be 0.1581dB and equal to the total loss of the Y-branch. The loss of the fabricated Y-branch waveguide on PSG film ws 1.6dB at .lambda.=1.3.mu.m before annealing but was 1.2dB after annealing at 1000.deg. C for 10 minutes. Consequently, the loss of branching area from 3000.mu.m to 6000.mu.m in the z-direction was 0.8dB, and single-mode propagation was confirmed by measuring the near field pattern. For coupling the fabricated Y-branch waveguide with an optical fiber, we fabricated V-groove which was used as the upholder of optical fiber. An etching angle was 54.deg. and the width and depth of guiding groove was 150.mu.m, 70.mu.m, respectively. The optical fiber is inserted onto V-groove. Both the Y-branch and V-groove were connected through the index matching oil. Coupling loss after connecting Y-branch and the optical fiber on V-groove was 0.34dB and that after injecting index mateching oil was 0.14dB.

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기판온도가 Nb2O5/SiO2 버퍼층위에 증착한 ITO 박막의 광학적 및 전기적 특성에 미치는 영향 (Effect of Substrate Temperature on the Optical and Electrical Properties of ITO Thin Films deposited on Nb2O5/SiO2 Buffer Layer)

  • 정양희;강성준
    • 한국정보통신학회논문지
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    • 제20권5호
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    • pp.986-991
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    • 2016
  • 본 연구에서는 $Nb_2O_5/SiO_2$ 두개의 버퍼층위에 기판온도 (상온~$400^{\circ}C$) 에 따른 ITO 박막을 DC 마그네트론 스퍼터링 법으로 증착하여 전기적 및 광학적 특성을 조사하였다. 기판온도가 상승함에 따라 그레인 크기 증가에 기인한 결정성 향상 때문에 비저항이 낮아지는 경향을 나타내었다. 기판온도 $400^{\circ}C$ 에서 증착한 ITO 박막이 $3.03{\times}10^{-4}{\Omega}{\cdot}cm$ 의 비저항과 $86.6{\Omega}/sq.$의 면저항으로 가장 우수한 값을 나타내었다. 광학적 특성을 측정한 결과, 기판온도가 상승함에 따라 가시광 영역 (400~800nm) 에서의 평균 투과도는 증가하였으며 색도 ($b^*$) 값은 감소하였다. $400^{\circ}C$에서 증착한 ITO 박막의 평균 투과도와 색도 ($b^*$) 는 85.8% 와 2.13 으로 버퍼층이 삽입되지 않은 ITO 박막의 82.8% 와 4.56 에 비해 상당히 향상된 결과를 나타내었다. 이를 통해 $Nb_2O_5/SiO_2$ 두개의 버퍼층을 도입한 ITO 박막은 인덱스 매칭 효과로 인해 투과도 및 색도 ($b^*$) 등의 광학적 특성이 현저히 향상되었음을 확인할 수 있었다.

Experimental Demonstration of Enhanced Transmission Due to Impedance-matching Si3N4 Layer in Perforated Gold Film

  • Park, Myung-Soo;Yoon, Su-Jin;Hwang, Je-Hwan;Kang, Sang-Woo;Kim, Deok-kee;Ku, Zahyun;Urbas, Augustine;Lee, Sang Jun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.359-359
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    • 2014
  • In this study, surface plasmon resonance structures for the selective and the enhanced transmission of infrared light were designed. In order to relieve the large discontinuity of refractive index between air and metal hole array, $Si_3N_4$ was used as the impedance matching layer. Experimental parameter were calculated and determined in advance by the rigorous coupled wave analysis (RCWA) simulation, and then the experiment was carried out. A 2-dimensional metal hole array structures were patterned on the size of $1{\times}1cm^2$ GaAs substrate using photolithography process, and 5 nm thick Ti, 50 nm thick Au were deposited by E-beam evaporator, respectively. Subsequently, $Si_3N_4$ films with various thicknesses (150, 350, 550, and 750 nm) were deposited by plasma enhanced chemical vapor deposition (PECVD). For the comparison, transmittance of specimens with and without $Si_3N_4$ was measured using Fourier transform infrared spectroscopy (FTIR) in the range of $2.5-15{\mu}m$. Furthermore, the surface and the cross-sectional images were collected from the specimens by scanning electron microscopy (SEM). From the results, it was demonstrated that the transmittance was enhanced up to 80% by the deposition of 750 nm $Si_3N_4$ at $6.23{\mu}m$. It has advantage of enhanced transmission despite the simple fabrication process.

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정전용량식 터치스크린 패널을 위한 SiO2 버퍼층 두께에 따른 ITO 박막의 전기적 및 광학적 특성 (Electrical and Optical Properties of ITO Thin Films with Various Thicknesses of SiO2 Buffer Layer for Capacitive Touch Screen Panel)

  • 정윤근;정양희;강성준
    • 한국전자통신학회논문지
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    • 제17권6호
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    • pp.1069-1074
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    • 2022
  • 본 연구에서는 Nb2O5/SiO2 이중 버퍼층위에 ITO박막을 증착하여, SiO2버퍼층 두께 변화 (40~50 nm)에 따른 전기적 및 광학적 특성을 조사하였다. Nb2O5/SiO2 이중 버퍼층을 도입한 ITO박막의 표면 거칠기는 0.815에서 1.181 nm 범위의 작은 값을 가지는 매끄러운 형상을 보였고, 면저항은 99.3~134.0 Ω/sq. 범위로 정전용량식 터치스크린 패널에 적용하는데 문제가 없는 것으로 나타났다. 특히 Nb2O5 (10 nm) / SiO2 (40 nm) 이중 버퍼층을 삽입한 ITO박막의 단파장(400~500 nm) 영역에서의 평균 투과도와 색도(b*)는 83.58 % 와 0.05로 이중버퍼층이 삽입되지 않은 ITO박막의 74.46 % 와 4.28에 비해 상당히 향상된 결과를 나타내었다. 이를 통해 Nb2O5/SiO2 이중 버퍼층을 도입한 ITO박막에서 인덱스 매칭 효과로 인해 단파장 영역의 투과도 및 색도와 같은 광학적 특성이 현저히 향상되었음을 확인할 수 있었다.