• The Journal of Korea Robotics Society
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• v.2 no.2
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• pp.178-182
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• 2007

Precision stages are essential device for micro machines, fiber optic assembly systems, and biology instruments. In this paper, a precision inchworm type actuator for a linear stage is proposed and evaluated. An analytic method to design an inchworm type motor is proposed. Developed actuator provides fast motion compared with a commercial inchworm actuator, and can be used as an actuator for a stage in substitution for a conventional rotary actuator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1041-1044
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• 2002

Inchworm linear motor is one of the ultra precision position apparatuses and has many kinds of forms and structures according to the conditions of working space and range. In this paper, the Inchworm linear motor consists of three PZTs(Piezo-electric transducer), three columns ma two plates. finite element method was used to determine the type or hinges installed in column of inchworm linear motor DOE(Design of experiment) was used to determine the optimal design condition of a column by comparing the von-mises stresses according to the change of thickness of hinge, round of hinge, height of arm, angle of v-notch, round of v-notch and thickness of column. From the result, round of hinge, height of arm and thickness of hinge were determined a effective design parameters.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.458-461
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• 1995

A new type of rotational motor which is developed has a resolution smaller than 10 $^{-4}$ radian and can be accessed for full rotational angles. The operation principle of the motor is based on inchworm motion of two belt driving mechanism. Flexure hinge mechanism, which is pertinent to symmetry construction of the motor, is designed to minimze the effort to frame and is analyzed by using finite element method. Depending on input signal amplitude, rotational angle by one cycle is varied form 0.2*10 $^{-4}$ rad to 9.76* $^{-4}$ rad. This shows that it has the capability of getting very small rotational angle by considering radius of rotor and amplitude of input signal.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.152-157
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• 2001

An ultraprecision rotary motor is developed using inchworm motion of two belts actuated by elongation of piezoelectric elements. A symmetric lever mechanism with flexure hinges is designed to connect belts with piezoelectric elements. The lever mechanism is used not only to amplify the elongation of piezoelectric element but also to minimize the numbers of components and the effort for assembly. By experiment, the rotational angle by one cycle is varied from $0.2{\times}10-4 rad to 9.76{\times}10-4$ rad depending on input signal amplitude. Further, the motor has the capability of getting more precise rotational resolution by enlarging the radius of the rotor.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.228.2-228.2
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• 2005

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.458-461
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• 2005

In this paper, a new type of inchworm motion actuator is developed in fabrication of actuators for micro-press machine. This is consisted of three piezoelectric actuators, one is for moving the tool guide and the other are for clamping the guide. The inchworm motor provides both high load and large displacement in small size actuator. PZT has compressive strength and often fails under tensile stress and pulling. Thus, in order to prevent failure, we have designed pre-load housing and accomplished FEM analysis. The pre-load housing was used for determining the optimal design condition by comparing the von-mises stresses with the change of hinge stiffness. Also, in order to predict the performance of the motor under certain conditions, the system model was simulated using MATLAB. This is open loop control actuator and driven by the period of input voltage.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.