• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.516-519
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• 2002

In this paper, a new type of inchworm motion actuator is introduced. This is consisted of two piezoelectric ceramics; one is for moving the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the system is good enough for the high precision motion. Since the system is more compact than the conventional system using three piezoelectric ceramics, it is applicable fur the micro-machine or MEMS. However, the effort for reducing the vibration, velocity discrepancy in the motion direction, and compensating the hysteresis behavior is additionally needed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.458-461
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• 1995

A new type of rotational motor which is developed has a resolution smaller than 10 $^{-4}$ radian and can be accessed for full rotational angles. The operation principle of the motor is based on inchworm motion of two belt driving mechanism. Flexure hinge mechanism, which is pertinent to symmetry construction of the motor, is designed to minimze the effort to frame and is analyzed by using finite element method. Depending on input signal amplitude, rotational angle by one cycle is varied form 0.2*10 $^{-4}$ rad to 9.76* $^{-4}$ rad. This shows that it has the capability of getting very small rotational angle by considering radius of rotor and amplitude of input signal.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.26 no.3
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• pp.313-319
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• 2017

This study presents a genetic algorithm (GA) to design a PID controller systematically for an inchworm operated by piezoelectric actuators. The performance index considering overshoot and settling time is adopted to search an optimal PID gain using GA. The piezoelectric actuator shows nonlinear characteristics including hysteresis and residual displacement. The PID feedback system combined with an integrator is used to improve the ability of tracking the complex input signals and suppressing the steady state error. The PID controller tuned by GA can track the various motion contours effectively. However, the PID controller shows an improper residual vibration under the application of high-frequency square input. The input shaper combined with the feedback system can overcome this limitation of the PID controller.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.871-877
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• 2005

This paper proposes a new modeling scheme to describe the hysteresis between input voltage and displacement of piezoelectric actuators in the inchworm. From the experimental analysis of Piezoelectric actuator behaviors. the hysteresis characteristics including residual displacement can be modeled by second order functions of a maximum Input voltage and preload. Various experiments are performed to demonstrate the effectiveness and validation of the proposed modeling scheme.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.152-157
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• 2001

An ultraprecision rotary motor is developed using inchworm motion of two belts actuated by elongation of piezoelectric elements. A symmetric lever mechanism with flexure hinges is designed to connect belts with piezoelectric elements. The lever mechanism is used not only to amplify the elongation of piezoelectric element but also to minimize the numbers of components and the effort for assembly. By experiment, the rotational angle by one cycle is varied from $0.2{\times}10-4 rad to 9.76{\times}10-4$ rad depending on input signal amplitude. Further, the motor has the capability of getting more precise rotational resolution by enlarging the radius of the rotor.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.458-461
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• 2005

In this paper, a new type of inchworm motion actuator is developed in fabrication of actuators for micro-press machine. This is consisted of three piezoelectric actuators, one is for moving the tool guide and the other are for clamping the guide. The inchworm motor provides both high load and large displacement in small size actuator. PZT has compressive strength and often fails under tensile stress and pulling. Thus, in order to prevent failure, we have designed pre-load housing and accomplished FEM analysis. The pre-load housing was used for determining the optimal design condition by comparing the von-mises stresses with the change of hinge stiffness. Also, in order to predict the performance of the motor under certain conditions, the system model was simulated using MATLAB. This is open loop control actuator and driven by the period of input voltage.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.81-88
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• 2007

This paper presents the development of a new inchworm actuation system using the shearing deformation of the piezoelectric actuators. In this new actuation system, piezoelectric shearing/expanding actuators, an inertial mass and an advanced preload system are configured innovatively to generate the motion of an inertial mass. There are two modes in the new actuation system: (1) stick mode, and (2) clamp mode. In stick mode, the deformation of the piezoelectric shearing actuators drives an inertial mass by means of the friction force at their contact interface. On the other hand, in clamp mode, the piezoelectric expanding actuators provide the gripping force to an inertial mass and, as a result, eliminate its backward motion following the rapid backward deformation of the piezoelectric shearing actuators. To investigate the feasibility of the proposed new actuation system, the experimental system is built up, and the static performance evaluation and dynamic analysis are conducted. The open-loop performance of the linear motion of the proposed new actuation system is evaluated. In dynamic analysis, the mathematical model for the contact interface is established based on the LuGre friction model and the equivalent parameters are identified.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.