• Title/Summary/Keyword: InGaN/GaN multi-quantum well

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Selective growth of micro scale GaN initiated on top of stripe GaN

  • Lee, J.W.;Jo, D.W.;Ok, J.E.;Yun, W.I.;Ahn, H.S.;Yang, M.
    • Journal of Ceramic Processing Research
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    • v.13 no.spc1
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    • pp.93-95
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    • 2012
  • We report on the growth and characterization of the nano- and micro scale GaN structures selectively grown on the vertex of GaN stripes using the metal organic vapor phase epitaxy method and conventional photolithography technique. The triangular shaped nano- and micro GaN structures which have semi-polar {11-22} facets were formed only on the vertex of the lower GaN stripes. Crystalline defects reduction was observed by transmission electron microscopy for upper GaN stripes. We also have grown the InGaN/GaN multi-quantum well structures on the semi-polar facets of the upper GaN stripes. Cathodoluminescence images were taken at 366, 412 and 555 nm related to GaN band edge, InGaN/GaN layer and defects, respectively.

Bias-Dependent Photoluminescence Analysis on InGaN/GaN MQW Solar Cells

  • Shim, Jae-Phil;Jeong, Hoonil;Choi, Sang-Bae;Song, Young Ho;Jho, Young-Dahl;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.347-348
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    • 2013
  • To obtain high conversion efficiency in InGaN-based solar cells, it is critical to grow high indium (In) composed InGaN layer for increasing sun light absorption wavelength rage. At present, most InGaN-based solar cells adopt InGaN/GaN multi-quantum-well (MQW) structure for high crystalline quality of InGaN with high In composition. In this study, we fabricated and compared the performances of two types of InGaN/GaN MQW solar cells which have the 15% (SC 15) and 25% (SC 25) of In composition at quantum well layer. Although both devices showed similar dark current density and leakage current, SC 15 showed better performance under AM 1.5G illumination as shown in Fig. 1. It is interesting to note that SC 25 showed severe current density decrease as increasing voltages. As a result, it lowered short circuit current density and fill factor of the device. However, SC 15 showed steady current density and over 75 % of fill factor. To investigate these differencesmore clearly, we analyzed their photoluminescence (PL) spectra under various applied voltages as shown in Fig. 2. At the same time, photocurrent, which was generated by PL excitation, was also measured as shown in Fig. 3. Further, we investigated the relationship between piezoelectric field and performance of InGaN based solar cell varying indium composition.

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Formation of Anodized GaN Nanopores on InGaN/GaN Multi-quantum Well Structures (InGan/GaN 다중양자우물구조 위에 제작되어진 산화된 GaN 나노구멍)

  • Choi, Jae-Ho;Kim, Keun-Joo;Jung, Mi;Woo, Deok-Ha
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.315-316
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    • 2006
  • We fabricated GaN nanopores m the etching process of anodic oxidation of aluminum. The aluminum was deposited by using E-beam evaporator on p-type GaN. After the aluminum was anodized GaN structure was exposed to the electric field with the oxidat species. The fabricated nanopore structure provides the enhanced intensity of light emission at the wavelengths 470 nm. We investigated the structure of the GaN nanopores from FE-SEM and EDS measurements.

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Improved Multi-band Transfer Matrix Method for Calculating Eigenvalues and Eigenfunctions of Quantum Well and Superlattice Structures

  • Kim, Byoung-Whi;Jun, Yong-Il;Jung, Hee-Bum
    • ETRI Journal
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    • v.20 no.4
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    • pp.361-379
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    • 1998
  • We present an improved transfer matrix algorithm which can be used in solving general n-band effective-mass $Schr{\ddot{o}}dinger$ equation for quantum well structures with arbitrary shaped potential profiles(where n specifies the number of bands explicitly included in the effective-mass equation). In the proposed algorithm, specific formulas are presented for the three-band (the conduction band and the two heavy- and light-hole bands) and two-band (the heavy- and light-hole bands) effective-mass eigensystems. Advantages of the present method can be taken in its simple and unified treatment for general $n{\times}n$ matrix envelope-function equations, which requires relatively smaller computation efforts as compared with existing methods of similar kind. As an illustration of application of the method, numerical computations are performed for a single GaAs/AlGaAs quantum well using both the two-band and three-band formulas. The results are compared with those obtained by the conventional variational procedure to assess the validity of the method.

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Fabrication of Nano-photonic Crystals with Lattice Constant of 460-nm by Inductively-coupled Plasma Etching Process (유도결합형 플라즈마 식각공정을 통해 제작된 460 nm 격자를 갖는 나노 광결정 특성)

  • Choi, Jae-Ho;Kim, Keun-Joo
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.2 s.15
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    • pp.1-5
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    • 2006
  • The GaN thin film on the 8 periods InGaN/GaN multi-quantum well structure was grown on the sapphire substrate using metal-organic chemical vapor deposition. The nano-scaled triangular-lattice holes with the diameter of 150 nm were patterned on a polymethylmethacrylate blocking film using an electron beam nano-lithography system. The thin slab and two-dimensional photonic crystals with the thickness of 28 nm were fabricated on the GaN layer for the blue light diffraction sources. The photonic crystal with the lattice parameter of 460 nm enhances spectral intensity of photoluminescence indicating that the photonic crystals provides the source of nano-diffraction for the blue light of the 450-nm wavelength.

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A Novel Multi-Quantum Well Injection Mode Diode And Its Application for the Implementation of Pulse-Mode Neural Circuits (다중 양자우물 주사형 다이오드와 펄스-모드 신경회로망 구현을 위한 그 응용)

  • Song Chung Kun
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.8
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    • pp.62-71
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    • 1994
  • A novel semiconductor device is proposed to be used as a processing element for the implementation of pulse-mode neural networks which consists of alternating n' GaAs quantum wells and undoped AlGaAs barriers sandwitched between n' GaAs cathode and P' GaAs anode and in simple circuit in conjunction with a parallel capacitive and resistive load the trigger circuit generates neuron-like pulse train output mimicking the function of axon hillock of biological neuron. It showed the sigmoidal relationship between the frequency of the pulse-train and the applied input DC voltage. In conjunction with MQWIMD the various neural circuits are proposed especially a neural chip monolithically integrated with photodetectors in order to perfrom the pattern recognition.

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Terahertz Detection Characteristics of Low-Temperature Grown InGaAs/InAlAs Multi Quantum Well

  • Park, Dong-U;Han, Im-Sik;Kim, Chang-Su;No, Sam-Gyu;Ji, Yeong-Bin;Tae, In;Lee, Gi-Ju;Kim, Jin-Su;Kim, Jong-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.317-318
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    • 2013
  • Terahertz (THz) wave는 광학 영역과 방송파 영역 사이에 광대역 주파수 스펙트럼을 차지하고 있다. X선과는 달리 비이온화 광원으로 직진성, 투과성, 낮은 에너지 (meV)를 가지고 있어 비파괴적이고 무해한 장점을 지니고 있다. 본 연구에서는 In0.53Ga0.47As:Be/In0.52Al0.48As의 multi quantum well (MQW)을 Semi-insulting InP:Fe substrate 위에 active layer의 두께와 적층을 변화주어서 성장하였고Au (200 nm)/Ti (30 nm)의 금속전극으로 공정을 하였다. Ti:Sapphire femtosecond pulse laser를 조사하여 THz time-domain spectrometer 시스템을 이용하여 광전도검출법으로 THz 검출 특성을 연구하였다. THz 검출은 짧은 전하수명과 높은 저항을 요구한다. LTInGaAs의 경우 AsGa antisite로 인하여 짧은 전하수명을 얻게 되면 n-type의 높은 전하밀도를 가지게 되어서 저항이 낮아지게 된다. 높은 저항을 만들기 위하여 Be doping을 이용하여 과잉의 전자들을 보상하고 InAlAs layer를 삽입시켜 보다 높은 저항을 얻었다. LT-InGaAs:Be는 LT-GaAs보다 1/70 정도의 amplitude를 보이는데 LT-InGaAs/InAlAs MQW의 경우 LT-GaAs 대비 약 3/4 정도의 큰 amplitude를 얻었다. 또 active layer의 두께가 얇고 적층이 많을수록 신호가 커지는 것을 알 수 있었다. 이는 상대적으로 band gap이 큰 InAlAs층이 더 높은 저항을 만든 것으로 사료된다.

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Study of Multi-stacked InAs Quantum Dot Infrared Photodetectors Grown by Metal Organic Chemical Vapor Deposition (유기금속화학기상증착법을 이용한 적층 InAs 양자점 적외선 수광소자 성장 및 특성 평가 연구)

  • Kim, Jung-Sub;Ha, Seung-Kyu;Yang, Chang-Jae;Lee, Jae-Yel;Park, Se-Hun;Choi, Won-Jun;Yoon, Eui-Joon
    • Journal of the Korean Vacuum Society
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    • v.19 no.3
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    • pp.217-223
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    • 2010
  • We grew multi-stacked InAs/$In_{0.1}Ga_{0.9}As$ DWELL (dot-in-a-well) structure by metal organic chemical vapor deposition and investigated optical properties by photoluminescence and I-V characteristics by dark current measurement. When stacking InAs quantum dots (QDs) with same growth parameter, the size and density of QDs were changed, resulting in the bimodal emission peak. By decreasing the flow rate of TMIn, we achieved the uniform multi-stacked QD structure which had the single emission peak and high PL intensity. As the growth temperature of n-type GaAs top contact layer (TCL) is above $600^{\circ}C$, the PL intensity severely decreased and dark current level increased. At bias of 0.5 V, the activation energy for temperature dependence of dark current decreased from 106 meV to 48 meV with increasing the growth temperature of n-type GaAs TCL from 580 to $650^{\circ}C$. This suggest that the thermal escape of bounded electrons and non-radiative transition become dominant due to the thermal inter-diffusion at the interface between InAs QDs and $In_{0.1}Ga_{0.9}As$ well layer.

A Study on the III-nitride Light Emitting Diode with the Chip Integration by Metal Interconnection (금속배선 칩 집적공정을 포함하는 질화물 반도체 LED 광소자 특성 연구)

  • 김근주;양정자
    • Journal of the Semiconductor & Display Technology
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    • v.3 no.3
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    • pp.31-35
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    • 2004
  • A blue light emitting diode with 8 periods InGaN/GaN multi-quantum well structure grown by metal-organic chemical vapor deposition was fabricated with the inclusion of the metal-interconnection process in order to integrate the chips for light lamp. The quantum well structure provides the blue light photoluminescence peaked at 479.2 nm at room temperature. As decreasing the temperature to 20 K, the main peak was shifted to 469.7 nm and a minor peak at 441.9 nm appeared indicating the quantum dot formation in quantum wells. The current-voltage measurement for the fabricated LED chips shows that the metal-interconnection provides good current path with ohmic resistance of 41 $\Omega$.

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