• Title/Summary/Keyword: InGaAs/InAlAs

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Optimization Study on the Epitaxial Structure for 100nm-Gate MHEMTs with InAlAs/InGaAs/GaAs Heterostructure (InAlAs/InGaAs/GaAs 100 nm-게이트 MHEMT 소자의 에피 구조 최적화 설계에 관한 연구)

  • Son, Myung-Sik
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.4
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    • pp.107-112
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    • 2011
  • This paper is for improving the RF frequency performance of a fabricated 100nm ${\Gamma}$-gate MHEMT, scaling down vertically for the epitaxy-structure layers of the device. Hydrodynamic simulation parameters are calibrated for the fabricated MHEMT with the modulation-doped $In_{0.52}Al_{0.48}As/In_{0.53}Ga_{0.47}$As heterostructure grown on the GaAs substrate. With these calibrated parameters, simulations for the vertically-scaled epitaxial layers of the device are performed and analyzed for DC/RF characteristics, including the quantization effect due to the thickness reduction of InGaAs channel layer. A newly designed epitaxy-structure device shows higher extrinsic transconductance, $g_m$ of 1.556 S/mm, and higher frequency performance, $f_T$ of 222.5 GHz and $f_{max}$ of 849.6 GHz.

An Analytical Model for the Derivation of the Ⅰ-Ⅴ Characteristics of a Short Channel InAlAs/InGaAs HEMT by Solving Two-Dimensional Poisson's Equation (2차원 Poisson방정식 풀이에 의한 단 채널 InAlAs/InGaAs HEMT의 전류-전압 특성 도출에 관한 해석적 모델)

  • Oh, Young-Hae;Suh, Chung-Ha
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.5
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    • pp.21-28
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    • 2007
  • In this paper, in order to derive the two-dimensional field effect of n-InAlAs/InGaAs HEMTs, we suggested analytical model by solving the two-dimensional Poisson's equation in both InAlAs and InGaAs regions by taking into account the longitudinal field variation, field-dependent mobility, and the continuity condition of the channel current flowing within the quantum well shaped channel. Derived expressions for long and short channel devices would be applicable to the entire operating regions in a unified manner. Simulation results show that the drain saturation current increases and the threshold voltage decreases as drain voltage increases. Compared with the conventional model, the present model may offer more reasonable explanation for the drain-induced threshold voltage roll-off, the Early effect, and the channel length modulation effect. Furthermore, it is expected that the proposed model would provide more reasonable theoretical basis for analyzing various long and short channel InAlAs/InGaAs HEMT devices.

The Characteristics of High Power AlGaAs/AlGaAs Infrared LED with DDH structure (DDH 구조를 갖는 고출력 AlGaAs/AlGaAs 적외선 LED소자의 특성)

  • Lee, Eun-Cheol;Ra, Yong-Choon;Eom, Moon-Jong;Lee, Cheol-Jin;Sung, Man-Young;Sung, Yung-Kwon
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1459-1461
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    • 1996
  • The optical and electrical properties of High Power AlGaAs/AlGaAs Infrared LED with DDH( Double power Double Hetero Junction) structure are investigated. The high power LED is recently studied in order to apply to high speed communication devices. The power out of AlGaAs/AlGaAs with DDH structure is 13.0[mW], the forward voltage is 1.45[V], and the average decrease rate of power out is about 5[%] after aging test. The optical and electrical properties of DDH structure LED are superior than that of SH structured LED. The DDH structured LED is suitable to the high speed communication devices.

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Improved Dit between ALD HfAlO Dielectric and InGaAs Substrate Using NH3 Plasma Passivation (InGaAs 위의 NH3 Plasma Passivation을 이용한 ALD HfAlO유전체 계면전하(Dit) 향상)

  • Choi, Jae Sung
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.4
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    • pp.27-31
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    • 2018
  • The effect of $NH_3$ plasma passivation on the chemical and electrical characteristics of ALD HfAlO dielectric on the InGaAs substrate was investigated. The results show that $NH_3$ plasma passivation exhibit better electrical & chemical performance such as much lower leakage current, lower density of interface trap(Dit) level, and low unstable interfacial oxide. $NH_3$ plasma passivation can effectively enhance interfacial characteristics. Therefore $NH_3$ plasma passivation improved the HfAlO dielectric performance on the InGaAs substrate.

Ohmic Resistance of AlGaAs/GaAs HBT at High Temperature (고온 특성을 위한 AlGaAs/GaAs HBT의 설계에 관한 연구)

  • 이준영;신훈법;안형근;한득영
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.366-370
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    • 2002
  • GaAs has become a very popular material for the fabrication of high frequency, low noise and microwave power devices. GaAs devices are also well suited for high temperature operation because of the large band gap of this material. The standard GaAs technology and device structures have to be modified for stable operation at high temperature. In this paper, AlGaAs/GaAs HBT considering stable ohmic contact at high temperature as well as thermal effect such as self-heating effect are introduced. All the data obtained study will be used as input data for the simulator and the result will be compared with an analytical model available in this study,

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The Effect of Low Power Laser Irradiation on acute pain of Rats Induced by Wound (저강도 레이저가 흰쥐 창상 후 급성통증에 미치는 영향)

  • Kim Dong-Hyun;Baek Su-Jeong;Kim Suk-Bum;Song Ju-Min;Kim Jin-Sang
    • The Journal of Korean Physical Therapy
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    • v.14 no.2
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    • pp.234-249
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    • 2002
  • This study was performed, using c-fos and Substance P, to investigate the effect of GaAlAs laser on acute pain model induced by wound in lumbar region's spinal level. The test group was divided into control and experimental group. Control group is shamed group(c-fos and substance P expression after non-irradiation by a GaAlAs laser), The experimental group was divided into two subgroups: one is experimental group I (c-fos expression after irradiation by a GaAlAs laser), and the other is experimental group II (substance P expression after irradiation by a GaAlAs laser). The results of this study were as following: 1. The numbers of c-fos immunoreactive neuron in spinal cord was increased markedly 1 day after wound, and decreased gradually from 1 day to 2 days in wound with GaAlAs laser irradiation. 2. The changes of the average percentages of substance P immunoreactive neurons in spinal cord was increased markedly 1 day after wound, and decreased gradually from 1 day to 2 days in wound with GaAlAs laser irradiation. Therefore, decreasing the changes of c-fos and substance P expression after irradiation by a GaAlAs laser indicates and GaAlAs laser have effect on pain control.

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Dry Etching of GaAs and AlgaAs Semiconductor Materials in High Density BCl$_3$, BCl$_3$/Ar Inductively Coupled Plasmas (BCl$_3$, BCl$_3$/Ar 고밀도 유도결합 플라즈마를 이용한 GaAs 와 AlGaAs 반도체 소자의 건식식각)

  • Lim, Wan-Tae;Baek, In-Kyoo;Lee, Je-Won;Cho, Guan-Sik;Jeon, Min-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.31-36
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    • 2003
  • We investigated dry etching of GaAs and AlGaAs in a high density planar inductively coupled plasma system with $BCl_3$ and $BCl_3/Ar$ gas chemistry. A detailed process study as a function of ICP source power, RIE chuck power and $BCl_3/Ar$ mixing ratio was performed. At this time, chamber pressure was fixed at 7.5 mTorr. The ICP source power and RIE chuck power were varied from 0 to 500 W and from 0 to 150 W, respectively. GaAs etch rate increased with the increase of ICP source power and RE chuck power. It was also found that etch rate of GaAs in $BCl_3$ gas with 25% Ar addition was superior to that of GaAs in a pure $BCl_3$ (20 sccm $BCl_3$) plasma. The result was same with AlGaAs. We expect that high ion-assisted effect in $BCl_3$/Ar plasma increased etch rates of both materials. The GaAs and AIGaAs features etched at 20 sccm $BCl_3$ and $15BCl_3/5Ar$ with 300 W ICP source power, 100 W RIE chuck power and 7.5 mTorr showed very smooth surfaces(RMS roughness < 2 nm) and excellent sidewall. XPS study on the surfaces of processed GaAs also proved extremely clean surfaces of the materials after dry etching.

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Monte carlo analysis of InAlGaAs/InGaAs HBT (InAlGaAs/InGaAs HBT의 Monte carlo 해석)

  • 황성범;김용규;송정근
    • Proceedings of the IEEK Conference
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    • 1998.06a
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    • pp.405-408
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    • 1998
  • Due to the large conduction band discontinuity between emitter base, OmGaAs HBT has an advantge to enable the hot electrons to inject into the base. In this paper, InAlGaAs/InGaAs HBT with the various emitter junction gradings and the modified collectors are simulated and analyzed by HMC(hybrid monte carlo) simulator in order to find a optimal structure for the shortest transit time. A minium base transit time (.tau.$_{b}$ ) of 0.21 ps was obtained for HBT with the grading layer, which is parabolically graded from x=1.0 to x=0.5. The minimum collector transit time (.tau.$_{c}$ ) of 0.31ps was found when the collector was modified by inserting p$^{[-10]}$ and p$^{+}$ layers. Thus HBT in combination with the emitter grading and the modified collector layer showed the cut-off frequency (f$_{T}$) of 183GHz.z.z.

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Electro-magnetic properties of GaAs/AlGaAs quantum wires (GaAs/AlGaAs 양자세선의 전자기적 특성)

  • 이주인;서정철;이창명;임재영
    • Journal of the Korean Vacuum Society
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    • v.10 no.2
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    • pp.262-266
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    • 2001
  • We have presented the electrical properties of the quantum wire fabricated by split gate on GaAs/AlGaAs heterostructures by using the Shubnikov de Haas oscillation and quantum Hall effect measurements. We observed the 1D properties of the sample as increasing gate voltage. The misfit between quantum Hall plateau and minima in Shubnikov do Haas oscillations are interpreted as Landauer-B$"{u}$ tikker formula based on the edge state transport.port.

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Optical Characteristics of Multi-Stacked InAs/InAlGaAs Quantum Dots (다층 성장한 InAs/InAlGaAs 양자점의 광학적 특성)

  • Oh, Jae-Won;Kwon, Se-Ra;Ryu, Mee-Yi;Jo, Byoung-Gu;Kim, Jin-Soo
    • Journal of the Korean Vacuum Society
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    • v.20 no.6
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    • pp.442-448
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    • 2011
  • Self-assembled InAs/InAlGaAs quantum dots (QDs) grown on an InP (001) substrate have been investigated by using photoluminescence (PL) and time-resolved PL measurements. The single layer (QD1) and seven stacks (QD2) of InAs/InAlGaAs QDs grown by the conventional S-K growth mode were used. The PL peak at 10 K was 1,320 nm for both QD1 and QD2. As the temperature increases from 10 to 300 K, the PL peaks for QD1 and QD2 were red-shifted in the amount of 178 and 264 nm, respectively. For QD1, the PL decay increased with increasing emission wavelength from 1,216 to 1,320 nm, reaching a maximum decay time of 1.49 ns at 1,320 nm, and then decreased as the emission wavelength was increased further. However, the PL decay time for QD2 decreased continuously from 1.83 to 1.22 ns as the emission wavelength was increased from 1,130 to 1,600 nm, respectively. These PL and TRPL results for QD2 can be explained by the large variation in the QD size with stacking number caused by the phase separation of InAlGaAs.