• 제목/요약/키워드: InGaAs/InAlAs

검색결과 720건 처리시간 0.029초

The Formation and Phase Stability of Cobalt-aluminide(CoAl) Thin Films on GaAs

  • Ko, Dae-Hong;Robert Sinclair
    • The Korean Journal of Ceramics
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    • 제4권1호
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    • pp.43-46
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    • 1998
  • We have investigated the formation and thermal stability of cobalt aluminide(CoAl) thin films on GaAs. In order to obtain cobalt-aluminide thin films, we deposited a multilayer of Co/Al on GaAs, and subsequently annealed the samples at 80$0^{\circ}C$ for 30 min. After annealing, single-phase cobalt aluminide was produced showing a flat and uniform interface with GaAs. which indicates that cobalt aluminide (CoAl) is thermally stable with GaAs. In addition, the adherence and mechanical properties of the as-deposited, and annealed Co/Al multilayer structure on GaAs are compatible with those required for device fabrication processes. The electrical property of the CoAl/GaAs contact shows rectifying characteristics, indicating that the diodes were usable as rectifying gate electrodes.

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AlGaAs/GaAs HBTs의 에미터 크기에 따른 전류 이득 변화에 관한 연구 (A Study on the Current Gain Variation with the Emitter Size in AlGaAs/GaAs HBTs)

  • 정준오;이헌용;이태우;김일호;박문평;박성호;편광의
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.10-12
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    • 1996
  • AlGaAs/GaAs Heterojunotion Bipolar Transistors (HBTs) with various emitter areas were fabricated and the device size dependence on the current gain was examined. With the different emitter areas, the passivated devices having the same peripheral length were fabricated and measured. The measured base current density in the Gummel plots shows an ideality factor of nearly 2. It is found that as the emitter area becomes small, the base current density with the ideality factor of 2 increases linearly, and as the emitter perimeter/area ratio becomes large, the surface recombination current density component increases. The current gain performance in AlGaAs/GaAs HBTs is mainly determined by either the larger emitter area or the smaller ratio of the emitter perimeter to the emitter area. These results will be compared with experimental works for GaInP/GaAs HBTs

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InP/InGaAs/InP 분포귀환형 회절격자 위에 성장된 InAs/InAlGaAs 양자점의 구조적.광학적 특성 (Structural and Optical Characteristics of InAs/InAlGaAs Quantum Dots Grown on InP/InGaAs/InP Distributed Feedback Grating Structure)

  • 곽호상;김진수;이진홍;홍성의;최병석;오대곤;조용훈
    • 한국진공학회지
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    • 제15권3호
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    • pp.294-300
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    • 2006
  • 금속유기화학증착기 (metal-organic chemical vapor deposition)를 이용하여 분포귀환형 (distributed feed back) InP/InGaAs/InP 회절격자 구조를 제작하고 원자력간현미경 (atomic force microscopy)과 주사전자현미경 (scanning electron microscopy) 실험을 통해 표면 및 단면을 분석하였다. 그 위에 분자선증착기(molecular beam epitaxy)법을 이용하여 자발형성 (self-assembled) InAs/InAlGaAs 양자점 (quantum dot)을 성장하고, 광학적 특성을 온도변화 광여기 발광 (photoluminescence)으로 회절격자 구조 없이 성장한 양자점 시료와 비교 분석하였다. 회절격자의 간격 대비 폭의 비가 약 30%인 InP/InGaAs/InP 회절격자가 제작되었으며, 그 위에 성장된 양자점의 경우 상온 파장이 1605 nm에서 PL이 관찰되었다. 이는 회절격자 없이 같은 조건에서 성장된 시료의 상온 파장인 1587 nm 보다 장파장에서 발광하였으며, 회절격자의 영향으로 양자점 크기가 변하였음을 조사하였다.

MOCVD를 이용한 Heteroface p-$Al_{x}Ga_{1-x}As/p-GaAs/n-GaAs/n^{+}$-GaAs 태양전지의 개발 (Heteroface p-$Al_{x}Ga_{1-x}As/p-GaAs/n-GaAs/n^{+}$-GaAs Solar Cell Grown by MOCVD)

  • 창기근;임성규
    • 전자공학회논문지A
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    • 제28A권1호
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    • pp.30-39
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    • 1991
  • The influence of physical parameters (Al mole fraction, thickness, doping concentration) in the window and emitter on the efficiency characteristics of heteroface p-$Al_{x}Ga_{1-x}As/p-GaAs/n-GaAs/n^{+}$-GaAs solar cell is investigated. The maximum efficiency theoretically calculated in this device is obtained when a thickness of the window is in a range of (400-1000))$\AA$and a thickness/doping concentration of the emitter is in a range of (0.5-0.8)$\mu$m/(1-7)${\times}10^{17}cm^{-3}$, respectively. Also is the efficiency improved according to the increase of Al mole fraction in the indirect gap window(0.41${\le}x{\le}1.0$). The optimum designed heteroface cell with an area of 0.165cm$^2$fabricated using MOCVD exhibits an active area conversion efficiency of 17%, having a short circuit current density of 21.2mA/cm\ulcorner an open circuit voltage of 0.94V, and a fill factor of 0.75 under ELH-100mW/cm$^2$illumination.

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GaAs MESFET에서 AlGaAs buffer layer에 의한 Drain 누설전류 차단 (Reduction of Drain Leakage Current by AlGaAs buffer layer in GaAs MESFET)

  • 박준;조중열
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 D
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    • pp.1321-1323
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    • 1998
  • We investigated drain leakage current in GaAs power MESFET. The device we studied by 20 simulation has a $1000{\AA}$ thick AlGaAs buffer layer under n-GaAs active layer. The calculation shows that the leakage current through GaAs substrate is significantly reduced by the buffer layer.

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GaAs/AlAs/InGaAs 에피층의 고분해능 TEM 이미지 전산모사 (Computer Simulations of HRTEM Images in GaAs/AlAs/InGaAs Epilayers)

  • 이확주;류현;이재덕;남산
    • Applied Microscopy
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    • 제26권4호
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    • pp.479-487
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    • 1996
  • Thin epilayer structures of GaAs/AlAs/InGaAs, grown by Molecular Beam Epitaxy, were investigated by high resolution transmission electron microscopy, Image in the [110] zone axis was taken and compared with the calculated images. The supercell structure which contains GaAs, AlAs and InGaAs layers was designed and was employed in the image calculation with MacTempas computer program. Good agreement was shown between experimental image and a set of calculated images with varying defocus and sample thickness.

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InGaAs/AlGaAs 양자선 래이저에서 관찰된 이상 방출 스펙트럼 (Anomalous Emission Spectra Observed in InGaAs/AlGaAs Quantum-Wire Lasers)

  • 김경찬;김태근
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 C
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    • pp.2020-2021
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    • 2004
  • Distributed optical feedback by gain coupling in V-groove quantum-wire lasers is investigated using InGaAs/AlGaAs active materials grown by metalorganic chemical vapor deposition (MOCVD). In order to avoid grating overgrowth during the fabrication of DFB structures, a newly developed constant MOCVD growth method is employed. Gain anisotropy in emission spectra near Bragg wavelength, resulting from optical feedback along the DFB direction, is clearly observed at room temperature.

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ECR 플라즈마와 습식 식각으로 게이트 리세스한 AlGaAs/InGaAs/GaAs PHEMT 소자의 전기적 특성연구 (A Study of Electrical Properties for AlGaAs/InGaAs/GaAs PHEMT s Recessed by ECR Plasma and Wet Etching)

  • 이철욱;배인호;최현태;이진희;윤형섭;박병선;박철순
    • 한국전기전자재료학회논문지
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    • 제11권5호
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    • pp.365-370
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    • 1998
  • We studied a electrical properties in GaAs/AlGaAs/InGaAs pseudomorphic high electron mobility transistors(PHEMT s) recessed by electron cyclotron resonance(ECR) plasma and wet etching. Using the $NH_4OH$ solution, a nonvolatile AlF$_3$layer formed on AlGaAs surface after selective gate recess is effectively eliminated. Also, we controlled threshold voltage($V_th$) using $H_3PO_4$ etchant. We have fabricated a device with 540 mS/mm maximum transconductance and -0.2 V threshold voltage by using $NH_4OH$ and $H_3PO_4$dip after ECR gate recessing. In a 2-finger GaAs PHEMT with a gate length of 0.2$\mu m$ and width of 100 $\mu m$, a current gain of 15 dB at 10 GHz and a maximum cutoff frequency of 58.9 GHz have been obtained from the measurement of current gain as a function of frequency at 12mA $I_{dss}$ and 2 V souce-drain voltage.

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$Al_{0.3}$$Ga_{0.7}$As/GaAs 다중 양자 우물 구조의 표면 광전압에 관한 연구 (Surface Photovoltage of $Al_{0.3}$$Ga_{0.7}$As/GaAs Multi-Quantum Well Structures)

  • 이정열;김기홍;손정식;배인호;김인수;박성배
    • 한국전기전자재료학회논문지
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    • 제13권1호
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    • pp.21-27
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    • 2000
  • We used the surface photovoltage spectroscopy(SPVS) for characterization of GaAs/Al\ulcornerGa\ulcornerAs multi-quantum well(MQW) structures grown by molecular beam epitaxy(MBE) method. Energy gap related transitions in GaAs and AlGaAs were observed. The Al composition(x=0.3) was determined by Sek's composition formula. Transition energies in MQW were determined using the differential surface photo-volatage spectroscopy)DSPVS) of the measured resonanced. In order to indentify the transitions, the experimentally observed energies were compared with results of the envelope function approximation for a rectangular quantum well. We have observed and interesting behavior of the temperature dependence(80K~300K) of the 11Hand 11L transition for sample.

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GaAs 기판위에 성장된 단결정 AlAs층의 선택적 산화 및 XPS (X-ray photonelectron spectroscopy) 분석 (Selective Oxidation of Single Crystalline AlAs layer on GaAs substrate and XPS(X-ray photoelectron spectroscopy) Analysis)

  • 이석헌;이용수;태흥식;이용현;이정희
    • 센서학회지
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    • 제5권5호
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    • pp.79-84
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    • 1996
  • $n^{+}$형 GaAs 기판위에 MBE로 $1\;{\mu}m$ 두께의 GaAs층과 AlAs층 및 GaAs cap 단결정층을 차례로 성장시켰다. AlAs/GaAs epi층을 $400^{\circ}C$에서 각각 2시간 및 3시간동안 $N_{2}$로 bubbled된 $H_{2}O$ 수증기(水蒸氣)($95^{\circ}C$)에서 산화시켰다. 산화시간에 따른 산화막의 XPS 분석결과, 작은 양의 $As_{2}O_{3}$ 및 AlAS 그리고 원소형 As들이 2시간동안 산화된 시편에서 발견되었다. 그러나 3시간동안 산화시킨 후에는, 2시간동안 산화시켰을 때 산화막내에 존재하던 소량의 As 산화물과 As 원자들은 발견되지 않았다. 따라서 As-grown된 AlAs/GaAs epi층은 3시간동안 $400^{\circ}C$의 산화온도에서 선택적으로 $Al_{2}O_{3}/GaAs$으로 변화되었다. 그러므로 산화온도 및 산화시간은 AlAs/GaAs 계면에서 결함이 없는 표면을 형성하고 기판쪽으로 산화가 진행되는 것을 멈추기 위해서는 매우 결정적으로 작용하는 것으로 조사되었다.

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