• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.190-193
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• 2002

The processing technology of organic thin-film transistors (Ons) performances have improved fur the last decade. Gate insulator layer has generally used inorganic layer, such as silicon oxide which has properties of a low electrical conductivity and a high breakdown field. However, inorganic insulating layers, which are formed at high temperature, may affect other layers termed on a substrate through preceding processes. On the other hand, organic insulating layers, which are formed at low temperature, dose not affect pre-process. Known wet-processing methods for fabricating organic insulating layers include a spin coating, dipping and Langmuir-Blodgett film processes. In this paper, we propose the new dry-processing method of organic gate dielectric film in field-effect transistors. Vapor deposition polymerization (VDP) that is mainly used to the conducting polymers is introduced to form the gate dielectric. This method is appropriate to mass production in various end-user applications, for example, flat panel displays, because it has the advantages of shadow mask patterning and in-situ dry process with flexible low-cost large area displays. Also we fabricated four by four active pixels with all-organic thin-film transistors and phosphorescent organic light emitting devices.

• Journal of Fisheries and Marine Sciences Education
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• v.28 no.3
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• pp.861-871
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• 2016

The coastal water of Korean Peninsula is the major habitat for finless porpoises. However, hundreds of finless porpoises are currently caught incidentally by stow-net fishery every year. To prevent the mass mortality of finless porpoises and conserve marine animals, Busan Aquarium has been designated as a "Marine Life Ex-Situ Conservation Institution and Marine Animal Conservation Center," and Cetacean Research Institute, under the National Institute of Fisheries Science have started RRR (rescue, rehabilitation and release) project together since 2011. From 2012 to 2013, four individuals of finless porpoises had been rescued and two of them finally released to their original habitat after fully recovered in July 2013. As a result, according to growth curve of finless porpoise of Korea more than 140 cm of body length, 38 kg of total weight referred to adult, results of observation of the change in the hormone revealed that mating time of finless porpoises is January, Jun and July. To become the initial institution which rescues, treatment, husbandry and releases finless porpoise in Korea.

• Bulletin of the Korean Chemical Society
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• v.34 no.8
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• pp.2399-2402
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• 2013

The catalytic pyrolysis of cellulose was carried out over SAPO-11 for the first time. Pyrolyzer-gas chromatography/mass spectroscopy was used for the in-situ analysis of the pyrolysis products. The acid sites of SAPO-11 converted most levoglucosan produced from the non-catalytic pyrolysis of cellulose to furans. In particular, the selectivity toward light furans, such as furfural, furan and 2-methyl furan, was high. When the catalyst/cellulose ratio was increased from 1/1 to 3/1 and 5/1, the increase in the quantity of acid sites led to the promotion of deoxygenation and the resultant increase of the contents of light furan compounds. Because furans can be used as basic feedstock materials, the augmentation of the economical value of bio-oil through the catalytic upgrading over SAPO-11 is considerable.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.1
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• pp.31-43
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• 1993

Thermal behavior and $O_{2}$ plasma effects on residue and penetrated impurities formed by reactive ion etching (RIE) in CHF$_{3}$/C$_{2}$F$_{6}$ have been investigated using X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) techniques. Decomposition of polymer residue film begins between 200-300.deg. C, and above 400.deg. C carbon compound as graphite mainly forms by in-situ resistive heating. It reveals that thermal decomposition of residue can be completed by rapid thermal anneal above 800.deg. C under nitrogen atmosphere and out-diffusion of penetrated impurities is observed. The residue layer has been removed with $O_{2}$ plasma exposure of etched silicon and its chemical bonding states have been changed into F-O, C-O etc.. And $O_{2}$ plasma exposure results in the decrease of penetrated impurities.

• Journal of Korean Society on Water Environment
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• v.26 no.1
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• pp.156-159
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• 2010

Peroxide is used frequently to provide electron acceptors to aerobes for the purpose of in situ bioremediation of contaminated soil/sediment. In this study, oxygen release rate of peroxides and factors affecting on dissolution and diffusion of oxygen into pore water were evaluated. Peroxides studied in this study were magnesium peroxide ($MgO_2$), calcium peroxide ($CaO_2$), and sodium percarbonate ($Na_2CO_3{\cdot}1.5H_2O_2$). $Na_2CO_3{\cdot}1.5H_2O_2$ showed the highest oxygen release rate per unit mass and the shortest release duration time among three peroxides. A simple first-order decay model for predicting the release rate of oxygen from peroxide into pore water was presented and used to fit the experimental data. The first order oxygen release rate constants k for $MgO_2$, $CaO_2$ and $Na_2CO_3{\cdot}1.5H_2O_2$ were 0.45 /hr, 3.22 /hr and 134 /hr, respectively. If $MgO_2$ was mixed with clay, oxygen release rate was lowered significantly mainly due to limitation of contact area and diffusion, implying that oxygen can be provided to the indigenous aerobes for the extended period of time.

• Particle and aerosol research
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• v.13 no.2
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.7
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• pp.549-554
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• 2009

Al thin films were synthesized on TiN/Si substrate by MOCVD using N-methylpyrrolidine alane (MPA) precursor. Effects of substrate temperature, reaction pressure on the deposition rate, surface roughness and electrical resistivity were investigated. The early stage of Al thin film formation was analyzed by in-situ surface reflectivity measurement with a laser and photometer apparatus. From the Arrhenius plot of deposition rate vs. substrate temperature, it was found that the activation energy of surface reaction was 91.1kJ/mole, and the transition temperature from surface-reaction-limited region to mass-transfer-limited region was about $150^{\circ}C$. The growth rate increased with the reaction pressure, and average growth rates of $200{\sim}1,200nm/min$ were observed at various experimental conditions. Surface roughness of the film increased with the film thickness. The electrical resistivity of Al film was about $4{\mu}{\Omega}{\cdot}cm$ in the case of optimum condition, and it was close to the value of the bulk Al, $2.7{\mu}{\Omega}{\cdot}cm$.

• Tunnel and Underground Space
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• v.8 no.2
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• pp.118-129
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• 1998

A three dimensional boundary element method-BEAP3D was applied to the stability analysis of the mine openings not only to improve the stability during mining operations but also to serve the evaluation of the mine openings for further utilization. Stability analysis on the stability of the room-and-pillar stopes underneath of the old mine openings and the openings to be created by the newly proposed sublevel stoping method at the Nowhado Pyrophyllite Mine, showed that rock mass around the old and new stopes would be stable. Six stopes of a sublevel stoping designed for the Choongmu Limestone Quarry would be stable, too. A sublevel stoping method consisting of six stopes was similarly suggested for the Keumpyung Quartzite Mine. The stability can be guaranteed through out six stopes. Since mining starts from the bottom 1st sublevel to the uppermost sublevel, the safety of the stopes will improve together with the mining process. It would highly be recommended to investigate in-situ rock properties and the rock stresses for future studies. Even though the rock around the uppermost part and bottom of all the stopes have a very high factor of safety, spot reinforcements such as rock bolting would be recommended to mitigate the intermediate and minor principal stresses acting in a tensile mode.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.17-20
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• 2001

Nonvolatile semiconductor memory devices with reoxidized nitrided oxide(RONO) gate dielectrics were fabricated, and nitrogen distribution and bonding species which contribute to memory characteristics were analyzed. Also, memory characteristics of devices depending on the anneal temperatures were investigated. The devices were fabricated by retrograde twin well CMOS processes with $0.35{\mu}m$ Nonvolatile semiconductor memory devices with reoxidized nitrided oxide(RONO) gate dielectric were fabricated, and nitrogen distribution and bonding species which contributing memory characteristics were analyzed. Also, memory characteristics of devices according to anneal temperatures were investigated. The devices were fabricated by $0.35{\mu}m$ retrograde twin well CMOS processes. The processes could be simple by in-situ process of nitridation anneal and reoxidation. The nitrogen distribution and bonding state of gate dielectric were investigated by Dynamic Secondary Ion Mass Spectrometry(D-SIMS), Time-of-Flight Secondary Ion Mass Spectrometry(ToF-SIMS), and X-ray Photoelectron Spectroscopy(XPS). Nitrogen concentrations are proportional to nitridation anneal temperatures and the more time was required to form the same reoxidized layer thickness. ToF-SIMS results show that SiON species are detected at the initial oxide interface and $Si_{2}NO$ species near the new $Si-SiO_{2}$ interface that formed after reoxidation. As the anneal temperatures increased, the device showed worse retention and degradation properties. These could be said that nitrogen concentration near initial interface is limited to a certain quantity, so excess nitrogen are redistributed near the $Si-SiO_{2}$ interface and contributed to electron trap generation.

• The Journal of Engineering Geology
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• v.19 no.1
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• pp.43-50
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• 2009

A 3-D numerical analysis was carried out to observe potential effects of orientation of inherent weak zones to tunnel behaviors and stress distributions during tunnel excavation. Weak zones used for the analysis were placed at the upper 1D part from crown, on the crown and on the center of face, using orientations derived from the 6th RMR parameter for assessment of joint orientation effect on tunnel. Mechanical properties of rock mass were derived through a in-situ displacement measurement-based back analysis. Finally, a classification chart for crown settlement with five ranks based on orientation and location of weak zones is suggested.