• 제목/요약/키워드: Improvement Devices

검색결과 1,344건 처리시간 0.028초

강우감지기 오류현황 분석 및 관측 알고리즘 개선 연구 (A study on the improvement of rain detectors error status analysis and observation algorithm)

  • 황성은;김병택;이영태;인소라
    • 한국수자원학회논문집
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    • 제57권9호
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    • pp.627-631
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    • 2024
  • 본 연구에서는 1980년대 도입되어 활용되고 있는 기상관측용 강우감지기의 관측 장애 및 오류 현황을 확인하고, 관측 효율 개선을 위해 강우감지기 1분 자료 수집, 산출 알고리즘 개선하고자 하였다. 오류 현황 분석 결과 강우감지기는 기상관측기 중 수동 품질관리를 가장 많이 시행되는 관측 장비로 이는 강수 산출 알고리즘 개선을 통해 강수 인식율 향상이 가능한 것으로 판단되었다. 국내외 강우감지기 알고리즘을 확인,선별하여 임의의 자료로 강수 인식율을 비교한 결과 10초 간격으로 강수를 측정 1회 이상 강수 측정 시 '강수'로 판별하는 알고리즘이 가장 높은 강수 인식율을 보였다. 해당 알고리즘이 강수를 과대모의하는 경향이 있으나 이는 원시자료 품질관리를 통해 개선 가능할 것으로 판단된다. 본 연구 결과를 토대로 강우감지기 오류율 감소와 정확도 향상에 기여할 수 있을 것으로 사료된다.

Temperature-Dependent Self-Powered Solar-Blind Photodetector Based on Ag2O/-Ga2O3 Heterojunction

  • Taejun Park;Sangbin Park;Joon Hui Park;Ji Young Min;Yusup Jung;Sinsu Kyoung;Tai Young Kang;Kyunghwan Kim;You Seung Rim;Jeongsoo Hong
    • Nanomaterials
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    • 제12권17호
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    • pp.2983-2998
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    • 2022
  • In this study, a high-photoresponsivity self-powered deep ultraviolet (DUV) photodetector based on an Ag2O/β-Ga2O3 heterojunction was fabricated by depositing a p-type Ag2O thin film onto an n-type β-Ga2O3 layer. The device characteristics after post-annealing at temperatures ranging from 0 to 400 ℃ were investigated. Our DUV devices exhibited typical rectification characteristics. At a post-annealing temperature of 300 ℃, the as-fabricated device had a low leakage current of 4.24 × 10-11 A, ideality factor of 2.08, and a barrier height of 1.12 eV. Moreover, a high photoresponsivity of 12.87 mA/W was obtained at a 100 µW/cm2 light intensity at a 254 nm wavelength at zero bias voltage, the detectivity was 2.70 × 1011 Jones, and the rise and fall time were 29.76, 46.73 ms, respectively. Based on these results, the Ag2O/β-Ga2O3 heterojunction photodetector operates without an externally applied voltage and has high responsivity, which will help in the performance improvement of ultraviolet sensing systems.

재택산소요법을 받고 있는 환자들에 대한 임상 관찰 (Clinical Experience of Long-term Home Oxygen Therapy)

  • 이영석;차승익;한춘덕;김창호;김연재;박재용;정태훈
    • Tuberculosis and Respiratory Diseases
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    • 제40권3호
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    • pp.283-291
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    • 1993
  • 연구배경 : 장기간의 저농도 산소요법은 저산소혈증을 가진 만성폐쇄성폐질환 환자들의 생존율을 향상시킬 뿐만 아니라 삶의 질을 향상시킨다. 저자들은 재택산소요법을 시행하는 환자의 실태를 알아보고 효과적인 개선책을 알아보기 위하여 추적관찰중인 환자 26예에 대한 임상적 관찰을 하였다. 방법 : 대상환자는 경북대학병원 호흡기내과에서 진료를 받고 있는 환자 가운데 가정에서 장기간의 저농도 산소요법을 시행하고 있는 남자 18명 여자 8명 이었으며 재택산소요법을 시행하기전에 신체적 특성과 병력, 폐기능검사, 심전도, 동맥혈가스 및 말초 혈액검사 소견들과 사용중인 산소용기의 종류, 하루에 흡입하는 시간, 투여산소의 농도, 그리고 사용기간 및 문제점 등에 대해서 조사하였다. 결과 : 원인질환은 만성폐쇄성폐질환 14예, 중증폐결핵의 후유증 9예, 기관지확장증 2예 그리고 특발성 폐섬유증 1예였다. 산소치료의 시행동기는 폐성심이 21예, 운동시 호흡곤란 및 심한 환기장애 4예, 그리고 수면중 산소포화도가 90%미만인 경우가 1예였다. 치료시작전의 동맥혈가스소견의 평균치는 $PaO_2$ 57.7 mmHg, $PaCO_2$ 48.2 mmHg 및 $SaO_2$ 87.7% 였으며 폐활량의 평균치는 VC 2.05 L, $FEV_1$ 0.92 L, $FEV_1$/FVC% 51.9%였다. 사용중인 산소용기는 산소탱크를 사용하는 경우가 19예, 산소농축기를 사용하는 경우가 1예, 산소탱크와 액화산소를 함께 사용하는 경우가 2예, 그리고 산소탱크와 휴대용산소를 함께 사용하는 경우 4예였다. 산소사용 기간은 1년 미만이 3예, 1년에서 2년이 15예, 3년에서 5년이 6예 그리고 9년, 10년 동안 산소요법을 시행한 경우도 각각 1예씩 있었다. 산소농도는 전예에서 2.5L/min 이하를 사용하고 있었고 하루 사용시간은 10예 만이 15시간 이상을 사용하였고 대부분이 짧은 시간 동안만 산소를 사용하고 있었다. 결론 : 효과적인 산소투여를 위해서는 환자 및 주위의 사람들에게 장기간의 저농도 산소요법에 대한 교육이 필요하며 편리하게 사용할 수 있는 산소용기의 구입을 위한 제도적 뒷받침이 필요하다.

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소형 스크린 상에서의 텍스트 가독성 향상을 위한 대각분할 칼럼 디자인과 평가 (The Design and Evaluation of a Diagonally Splitted Column to Improve Text Readability on a Small Screen)

  • 김연지;이우훈
    • 디자인학연구
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    • 제19권4호
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    • pp.51-60
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    • 2006
  • 이제 스크린을 통한 독서는 아주 일상적인 일이 되었다. 특히 휴대폰, PDA, e북리더기 등 휴대형 정보기기의 등장으로 우리는 언제 어디서나 스크린을 통해 수많은 텍스트 기반 컨텐츠를 감상할 수 있게 되었다. 종래의 많은 연구는 스크린을 통한 독서가 종이에 비해 독서수행도가 저하되는 것으로 지적하고 있다. 더욱이 휴대형 정보기기에서는 스크린에 표시할 수 있는 텍스트의 행폭과 행수가 감소하므로 가독성은 더욱 악화될 수밖에 없다. 본 연구는 소형 스크린에서의 텍스트 가독성에 영향을 미치는 매개변수를 탐색하고 새로운 텍스트 레이아웃을 통해 가독성을 개선할 수 있는 방법을 제안하였다. 본 연구에서는 기존의 단조로운 직사각형 칼럼을 대각으로 분할하여 독서에서 리드미컬한 시선의 흐름을 유도할 수 있는 새로운 텍스트 레이아웃을 제안하고 직사각형 칼럼과 대각분할 칼럼에 대한 비교실험을 실시하였다. 그 결과 독서에 대한 주관적 만족도와 문장이해도 차원에서 양자 간에 유의한 차이가 발견되지 않았지만, $4000mm^2$$8000mm^2$크기의 소형 스크린에서는 대각분할 칼럼에서의 독서속도가 각각 18.9%, 34.0%향상되었음을 확인할 수 있었다. 대각분할 칼럼에서의 획기적인 독서수행도 개선의 원인을 보다 세밀하게 분석하기 위해 $4000mm^2$크기/3:1비례 화면의 조건에서 대각분할 칼럼을 구성하는 좌삼각 칼럼과 우삼각 칼럼의 독서수행도 비교실험을 실시하였다. 실험결과 직사각형 칼럼과 비교하였을 때 좌삼각 칼럼의 경우 21.1%, 우삼각 칼럼의 경우 67.6% 만큼 독서속도가 향상되었음을 확인할 수 있었다. 결국 우삼각 칼럼에서의 독서속도 향상이 대각분할 전체의 독서속도 향상에 크게 기여하고 있음을 알 수 있었다. 본 연구는 소형 스크린에서 대각분할이 독서수행도를 획기적으로 개선할 수 있음을 확인할 수 있었고 이는 소형 모바일 정보기기의 텍스트 레이아웃 디자인에 충분히 활용 가능할 것으로 기대된다.

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임대주택단지의 생활안전 위해요인 해소방안 (Resolution Method of Hazard Factor for Life Safety in Rental Housing Complex)

  • 손정락;조건희;김진원;송상훈
    • 토지주택연구
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    • 제8권1호
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    • pp.1-11
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    • 2017
  • The government has been constructing and supplying public rental housing to ordinary people in order to stabilize housing since 1989. However, the public rental houses initially supplied to ordinary people are at high risk for safety accidents due to the deterioration of the facilities. Therefore, this study is aimed to propose a solution to solve the life safety hazards of the old rental housing complex as a follow-up study of Analysis of Accident Patterns and Hazard Factor for Life Safety in Rental Housing Complex. Types of life safety accidents that occur in public rental housing complexes are sliding, falling, crash, falling objects, breakage, fire accidents, traffic accidents and criminal accidents. The types of safety accidents that occur in rental housing complexes analyzed in this study are sliding, crashes, falling objects, and fire accidents. Although the incidence of safety accidents such as falling, breakage, traffic accidents and crime accidents in public rental housing complexes is low, these types are likely to cause safety accidents. The method of this study utilized interviews and seminar results, and it suggested ways to solve the life safety hazards in rental housing complexes. Interviews were conducted with residents and managers of rental housing complexes. Seminars were conducted twice with experts in construction, maintenance, asset management, housing welfare and safety. Through interviews and seminars, this study categorizes the life safety hazards that occur in rental housing complexes by types of accidents and suggests ways to resolve them as follows. (1) sliding ; use of flooring materials with high friction coefficient, installation of safety devices such as safety handles, implementation of maintenance, safety inspections and safety education, etc. (2) falling ; supplementation of safety facilities, Improvement of the design method of the falling parts, Safety education, etc. (3) crash ; increase the effective width of the elevator door, increase the effective width of the lamp, improve the lamp type (U type ${\rightarrow}$ I type), etc. (4) falling objects and breakage ; design of furniture considering the usability of residents, replacement of old facilities, enhancement of safety consciousness of residents, safety education, etc. (5) fire accidents ; installation of fire safety equipment, improvement by emergency evacuation, safety inspection and safety education, etc. (6) traffic accidents ; securing parking spaces, installing safety facilities, conducting safety education, etc. (7) criminal accidents; improvement of CCTV pixels, installation of street lights, removal of blind spots in the complex, securing of security, etc. The roles of suppliers, administrators and users of public rental housing proposed in this study are summarized as follows. Suppliers of rental housing should take into consideration the risk factors that may arise not only in the design and construction but also in the maintenance phase and should consider the possibility of easily repairing old facilities considering the life cycle of rental housing. Next, Administrators of rental housing should consider the safety of the users of the rental housing, conduct safety checks from time to time, and immediately remove any hazardous elements within the apartment complex. Finally, the users of the rental housing needs to form a sense of ownership of all the facilities in the rental housing complex, and efforts should be made not to cause safety accidents caused by the user's carelessness. The results of this study can provide the necessary information to enable residents of rental housing complexes to live a safe and comfortable residential life. It is also expected that this information will be used to reduce the incidence of safety accidents in rental housing complexes.

Single-cathode와 Dual-cathode 미생물연료전지의 탄소원과 질산성질소의 전류발생 특성 (Electricity Production Performance of Single- and Dual-cathode Microbial Fuel Cells Coupled to Carbon Source and Nitrate)

  • 장재경;이은영;유영선;이성현;황지환;이형모;김종구;강연구;김영화
    • 한국미생물·생명공학회지
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    • 제39권4호
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    • pp.382-386
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    • 2011
  • 이 연구에서는 일반적인 음극부 한 개에 양극부 한 개로 구성된 single-cathode 미생물연료전지(SCMFC)와 음극부 한 개에 양극부 두 개로 이루어진 dual-cathode 미생물연료전지(DCMFC)를 이용하여 전류발생에 비치는 영향을 확인하였다. 이 결과 dual-cathode 미생물연료전지에서 single-cathode 미생물연료전지 보다 전류발생이 약 40% 높았으며 COD 제거율도 약 13% 더 높은 것으로 확인되었다. 이것은 양극부와 음극부의 접촉면적이 증가하여 양극반응속도가 향상된 것에 의한 것으로 판단되며 dual-cathode 미생물연료전지가 single-cathode보다 전류발생과 COD제거 측면서 더 효율이 높은것으로 나타났다. 음극부 전자수용체에 대한 영향 실험에서는 전자수용체로 사용된 질산성질소의 농도가 높아질수록 급격히 전류발생이 감소하는 것을 확인 할 수 있었으며, 이에 대한 적절한 처리가 필요한 것으로 나타났다.

공기조화, 냉동 분야의 최근 연구 동향 -2004년 및 2005년 학회지 논문에 대한 종합적 고찰- (Recent Progress in Air Conditioning and Refrigeration Research - A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2004 and 2005 -)

  • 최영돈;강용태;김내현;김만회;박경근;박병윤;박진철;홍희기
    • 설비공학논문집
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    • 제19권1호
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    • pp.94-131
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    • 2007
  • A review on the papers published in the Korean Journal of Air-Conditioning and Refrigerating Engineering in 2004 and 2005 has been done. Focus has been put on current status of research in the aspect of heating, cooling, air-conditioning, ventilation, sanitation and building environment. The conclusions are as follows. (1) Most of fundamental studies on fluid flow were related with heat transportation of facilities. Drop formation and rivulet flow on solid surfaces were interesting topics related with condensation augmentation. Research on micro environment considering flow, heat, humidity was also interesting for comfortable living environment. It can be extended considering biological aspects. Development of fans and blowers of high performance and low noise were continuing topics. Well developed CFD and flow visualization(PIV, PTV and LDV methods) technologies were widely applied for developing facilities and their systems. (2) The research trends of the previous two yews are surveyed as groups of natural convection, forced convection, electronic cooling, heat transfer enhancement, frosting and defrosting, thermal properties, etc. New research topics introduced include natural convection heat transfer enhancement using nanofluid, supercritical cooling performance or oil miscibility of $CO_2$, enthalpy heat exchanger for heat recovery, heat transfer enhancement in a plate heat exchanger using fluid resonance. (3) The literature for the last two years($2004{\sim}2005$) is reviewed in the areas of heat pump, ice and water storage, cycle analysis and reused energy including geothermal, solar and unused energy). The research on cycle analysis and experiments for $CO_2$ was extensively carried out to replace the Ozone depleting and global warming refrigerants such as HFC and HCFC refrigerants. From the year of 2005, the Gas Engine Heat Pump(GHP) has been paid attention from the viewpoint of the gas cooling application. The heat pipe was focused on the performance improvement by the parametric analysis and the heat recovery applications. The storage systems were studied on the performance enhancement of the storage tank and cost analysis for heating and cooling applications. In the area of unused energy, the hybrid systems were extensively introduced and the life cycle cost analysis(LCCA) for the unused energy systems was also intensively carried out. (4) Recent studies of various refrigeration and air-conditioning systems have focused on the system performance and efficiency enhancement. Heat transfer characteristics during evaporation and condensation are investigated for several tube shapes and of alternative refrigerants including carbon dioxide. Efficiency of various compressors and expansion devices are also dealt with for better modeling and, in particular, performance improvement. Thermoelectric module and cooling systems are analyzed theoretically and experimentally. (5) According to the review of recent studies on ventilation systems, an appropriate ventilation systems including machenical and natural are required to satisfied the level of IAQ. Also, an recent studies on air-conditioning and absorption refrigeration systems, it has mainly focused on distribution and dehumidification of indoor air to improve the performance were carried out. (6) Based on a review of recent studies on indoor environment and building service systems, it is noticed that research issues have mainly focused on optimal thermal comfort, improvement of indoor air Quality and many innovative systems such as air-barrier type perimeter-less system with UFAC, radiant floor heating and cooling system and etc. New approaches are highlighted for improving indoor environmental condition as well as minimizing energy consumption, various activities of building control and operation strategy and energy performance analysis for economic evaluation.

의료용 방사능측정기의 측정 정확도 평가 (Comparison of Radioactivity Measurement with Radionuclide Calibrators in Nuclear Medicine Centers)

  • 손혜경;김지혜;임천일;양현규;박기정;오헌진;김혁주;김동섭
    • 한국의학물리학회지:의학물리
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    • 제21권1호
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    • pp.16-21
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    • 2010
  • 우수한 핵의학 영상의 획득과 불필요한 환자 피폭을 최소화하기 위한 가장 중요한 요소 중 하나가 방사성의약품의 방사능을 정확하게 측정하는 것이다. 이를 위해서는 각 의료기관에서 사용하고 있는 방사능측정기에 대한 적절한 품질관리가 수행되어야 한다. 따라서 본 연구에서는 국내 의료기관이 보유하고 있는 방사능측정기의 품질관리를 지원하고 의료기관이 사용하고 있는 방사능측정기의 측정 정확도를 평가하고자 방사능비교측정을 수행하였다. 방사능비교측정은 I-131, Tc-99m, I-123을 이용하여 각각 수행하였다. I-131을 이용한 방사능 비교측정에는 45개 기관의 58개 방사능측정기가 참여하였고, Tc-99m의 경우 58개 기관의 74개 방사능측정기가 참여하였으며, I-123의 경우는 45개 기관 60개 방사능 측정기가 참여하였다. 편차가 ${\pm}10%$를 벗어나는 측정기에 대해서는 추가적인 비교측정을 수행하였으며, 그 결과 일부 측정기는 편차가 ${\pm}10%$ 이내로 개선되었다. 비교측정 결과 편차가 ${\pm}5%$ 이내인 측정기가 각각 81% (I-131), 61% (Tc-99m), 67% (I-123)이었고, 편차가 5%< $|{\Delta}|{\leq}|10%$ 이내인 측정기는 각각 17% (I-131), 20% (Tc-99m), 15% (I-123)이었으며, 편차가 ${\pm}10%$를 초과한 측정기는 각각 2% (I-131), 19% (Tc-99m), 18% (I-123)이었다. 본 연구의 결과로부터 방사능비교측정은 의료기관의 방사능 측정 정확도를 향상시키고, 방사능측정기의 측정 정확도 저하여부를 확인하기 위해 지속적으로 수행되어져야 할 것으로 생각한다.

New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.239-240
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    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

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